scholarly journals Deposition of 3YSZ-TiC PVD Coatings with High-Power Impulse Magnetron Sputtering (HiPIMS)

2021 ◽  
Vol 11 (6) ◽  
pp. 2753
Author(s):  
Bastian Gaedike ◽  
Svenja Guth ◽  
Frank Kern ◽  
Andreas Killinger ◽  
Rainer Gadow
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Physical Vapor Deposition ◽  
Target Material ◽  
Electrical Insulation ◽  
Electrically Conductive ◽  
New Approach ◽  
Conductive Oxide ◽  
Short Circuits ◽  
Carbide Ceramics

Optimized coating adhesion and strength are the advantages of high-power impulse magnetron sputtering (HiPIMS) as an innovative physical vapor deposition (PVD) process. When depositing electrically non-conductive oxide ceramics as coatings with HiPIMS without dual magnetron sputtering (DMS) or mid-frequency (MF) sputtering, the growing coating leads to increasing electrical insulation of the anode. As a consequence, short circuits occur, and the process breaks down. This phenomenon is also known as the disappearing anode effect. In this study, a new approach involving adding electrically conductive carbide ceramics was tried to prevent the electrical insulation of the anode and thereby guarantee process stability. Yttria-stabilized zirconia (3YSZ) with 30 vol.% titanium carbide (TiC) targets are used in a non-reactive HiPIMS process. The main focus of this study is a parameter inquisition. Different HiPIMS parameters and their impact on the measured current at the substrate table are analyzed. This study shows the successful use of electrically conductive carbide ceramics in a non-conductive oxide as the target material. In addition, we discuss the observed high table currents with a low inert gas mix, where the process was not expected to be stable.

Tribological Performances of CrSiN Coatings Deposited by High Power Pulse Magnetron Sputtering

2018 ◽  
Vol 281 ◽  
pp. 540-545 ◽  
Author(s):  
Wei Jie Chang ◽  
Hao Zhang ◽  
Ying Ying Chen ◽  
Jun Li ◽  
Xue Zhang ◽  
...  
Keyword(s):  
Wear Resistance ◽  
Magnetron Sputtering ◽  
High Power ◽  
Physical Vapor Deposition ◽  
Protective Coatings ◽  
Energy Dispersive Spectrometer ◽  
Testing Machine ◽  
Power Pulse ◽  
Pulse Magnetron ◽  
High Power Pulse

The coatings deposited by physical vapor deposition (PVD) technique have found a wide industrial application as protective coatings for their attractive properties such as high hardness, good wear resistance and chemical stability. In order to explore the triboligical performances of CrSiN coatings, CrSiN coatings were prepared o the surface of 316 stainless steel by high power pulse magnetron sputtering (HPPMS) in this paper. Sliding wear tests of CrSiN coatings against Si3N4 ceramic balls and titanium balls have been carried out on a friction abrasion testing machine under reciprocating sliding conditions. nanoindentation and scratch tester, field emission scanning electron microscopy equipped with energy dispersive spectrometer (FESEM/EDS) and a X-ray diffractometer (XRD) was used to study the tribological behaviors of CrSiN coatings systematically. Results showed that CrSiN coatings exhibited good wear resistance, which can be attributed to the smoother and denser surface of CrSiN coatings resulted from much fewer macroparticles and pitting defects. The differences on wear debris removal behaviors and wear mechanism were caused by the different microstructure of CrSiN coatings.

scholarly journals Pengaruh Dimensi Atom Target D.C. Magnetron Sputtering Terhadap Sifat Mekanis Baja AISI 410

2018 ◽  
Vol 1 (01) ◽  
pp. 7-10
Author(s):  
Gaguk Jatisukamto
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Physical Vapor Deposition ◽  
Room Temperature ◽  
Target Material ◽  
Nitride Layer ◽  
Micro Machining ◽  
Surgical Equipment ◽  
Layer Deposition ◽  
Film Layer

Micro machining technology uses AISI 410 steel as tools and surgical equipment. AISI 410 steel is hardenable so it is relatively easy to repair its mechanical properties. The weakness of heat treatment in AISI 410 steel for small dimensioned components causes distortion. Therefore, in this research, an effort to improve the mechanical properties of AISI 410 steel using physical vapor deposition (PVD) technique. The method of this research is to deposition Ti-N, Cr-N, W-N and Al-N with D.C magnetron sputtering technique. The sputtering process is carried out at room temperature by bombarding the target material (coating) with Argon gas, so that the bombed atoms will be deposited on the surface of the substrate (coated material). The results showed that the film layer deposition properties on the surface of AISI 410 steel were influenced by the characteristics of the formed nitride layer and the size of the atoms that struck the surface of AISI 410 steel.

High-power impulse magnetron sputtering and its applications

2010 ◽  
Vol 82 (6) ◽  
pp. 1247-1258 ◽  
Author(s):  
Arutiun P. Ehiasarian
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Physical Vapor Deposition ◽  
Peak Power ◽  
High Peak Power ◽  
Degree Of Ionization ◽  
Physical Vapor Deposition Method ◽  
Metal Flux ◽  
High Degree ◽  
Deposition Technology

High-power impulse magnetron sputtering (HIPIMS) was introduced in the late 1990s as a unique physical vapor deposition method. The technology utilizes magnetron sputtering cathodes and high peak power density of up to 3 kW cm–2 on the target. The plasma produces a metal flux with high degree of ionization. HIPIMS has been successfully used as a substrate pretreatment method to enhance coating adhesion by promoting local epitaxial growth. As a deposition technology, HIPIMS produces high-density microstructure films. It has been industrialized and has successful applications in hard, electronic, and optical coatings.

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