scholarly journals From Light to Displacement: A Design Framework for Optimising Spectral-Domain Low-Coherence Interferometric Sensors for In Situ Measurement

2020 ◽  
Vol 10 (23) ◽  
pp. 8590
Author(s):  
Tom Hovell ◽  
Jon Petzing ◽  
Laura Justham ◽  
Peter Kinnell

Growing requirements for in situ metrology during manufacturing have led to an increased interest in optical coherence tomography (OCT) configurations of low coherence interferometry (LCI) for industrial domains. This paper investigates the optimisation of spectral domain OCT hardware and signal processing for such implementations. A collation of the underlying theory of OCT configured LCI systems from disparate sources linking the journey of the light reflected from the object surface to the definition of the measurand is presented. This is portrayed in an applicable, comprehensible design framework through its application to profilometry measurements for optimising system performance.

2018 ◽  
Vol 16 (3) ◽  
pp. 031701
Author(s):  
Yi Wang Yi Wang ◽  
Liang Feng Liang Feng ◽  
Lida Zhu Lida Zhu ◽  
Hongxian Zhou Hongxian Zhou ◽  
Zhenhe Ma Zhenhe Ma

2021 ◽  
Vol 2127 (1) ◽  
pp. 012034
Author(s):  
L Burmak

Abstract The basic principles of measurements in spectral-domain low coherence interferometry (optical coherence tomography, optical coherence microscopy) based on acousto-optic filtration are discussed. Relations for extracting information about sample’s spatial structure from a series of spectral interference images acquired with spectral tuning are given. The implementation of measurements in spectral domain using acousto-optic filtration is considered. The effect of the acousto-optic filter characteristics on depth measurement range and depth resolution is estimated. The results of modelling of the interference signal and experimental data obtained in the scheme with acousto-optic filtration of interfering beams at the output of Michelson interferometer are presented.


2005 ◽  
Author(s):  
Wojciech J. Walecki ◽  
Alexander Pravdivtsev ◽  
Kevin Lai ◽  
Manuel SantosII ◽  
Ann Koo

2005 ◽  
Vol 875 ◽  
Author(s):  
Wojciech J. Walecki ◽  
Alexander Pravdivtsev ◽  
Kevin Lai ◽  
Manuel Santos ◽  
Georgy Mikhaylov ◽  
...  

Abstract. We propose novel stress metrology technique for measurement of local values stress tensor components in the coated wafers. New metrology is based on fiber-optic low coherence interferometry and can be applied to study stress not only in semicondiuctor wafers but in wide variety applications spanning from semiconductor to construction industry where measurements of plates covered by thin film encountered in flat panel displayes, solar cells, modern windows.


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