High-speed high-accuracy fiber optic low-coherence interferometry for in situ grinding and etching process monitoring

2006 ◽  
Author(s):  
Wojciech J. Walecki ◽  
Alexander Pravdivtsev ◽  
Manuel Santos II ◽  
Ann Koo
Keyword(s):  
Process Monitoring ◽  
High Speed ◽  
Fiber Optic ◽  
High Accuracy ◽  
Etching Process ◽  
Low Coherence ◽  
Low Coherence Interferometry

Fiber-optics Low-coherence Integrated Metrology for In-Situ Non-contact Characterization of Wafer Curvature for Wafers Having Non-uniform Substrate and Thin Film Thickness

2005 ◽  
Vol 875 ◽  
Author(s):  
Wojciech J. Walecki ◽  
Alexander Pravdivtsev ◽  
Kevin Lai ◽  
Manuel Santos ◽  
Georgy Mikhaylov ◽  
...  
Keyword(s):  
Thin Film ◽  
Construction Industry ◽  
Fiber Optics ◽  
Fiber Optic ◽  
Flat Panel ◽  
Thin Film Thickness ◽  
Low Coherence ◽  
Low Coherence Interferometry

Abstract. We propose novel stress metrology technique for measurement of local values stress tensor components in the coated wafers. New metrology is based on fiber-optic low coherence interferometry and can be applied to study stress not only in semicondiuctor wafers but in wide variety applications spanning from semiconductor to construction industry where measurements of plates covered by thin film encountered in flat panel displayes, solar cells, modern windows.

scholarly journals Digital phase demodulation for low-coherence interferometry-based fiber-optic sensors

2018 ◽  
Vol 411 ◽  
pp. 27-32 ◽  
Author(s):  
Y. Liu ◽  
R. Strum ◽  
D. Stiles ◽  
C. Long ◽  
A. Rakhman ◽  
...  
Keyword(s):  
Fiber Optic ◽  
Fiber Optic Sensors ◽  
Low Coherence ◽  
Digital Phase ◽  
Low Coherence Interferometry ◽  
Phase Demodulation

Fiber-optic temperature sensor using low-coherence interferometry

2008 ◽  
Vol 154 (1) ◽  
pp. 107-111 ◽  
Author(s):  
M. Jedrzejewska-Szczerska ◽  
R. Bogdanowicz ◽  
M. Gnyba ◽  
R. Hypszer ◽  
B. B. Kosmowski
Keyword(s):  
Temperature Sensor ◽  
Fiber Optic ◽  
Low Coherence ◽  
Low Coherence Interferometry ◽  
Fiber Optic Temperature Sensor ◽  
Fiber Optic Temperature

High-speed and high-sensitivity displacement measurement with phase-locked low-coherence interferometry

2012 ◽  
Vol 51 (19) ◽  
pp. 4333 ◽  
Author(s):  
Lazo M. Manojlović ◽  
Miloš B. Živanov ◽  
Miloš P. Slankamenac ◽  
Jovan S. Bajić ◽  
Dragan Z. Stupar
Keyword(s):  
High Speed ◽  
High Sensitivity ◽  
Displacement Measurement ◽  
Low Coherence ◽  
Low Coherence Interferometry

scholarly journals From Light to Displacement: A Design Framework for Optimising Spectral-Domain Low-Coherence Interferometric Sensors for In Situ Measurement

2020 ◽  
Vol 10 (23) ◽  
pp. 8590
Author(s):  
Tom Hovell ◽  
Jon Petzing ◽  
Laura Justham ◽  
Peter Kinnell
Keyword(s):  
Spectral Domain ◽  
Design Framework ◽  
Object Surface ◽  
Low Coherence ◽  
Interferometric Sensors ◽  
Spectral Domain Oct ◽  
Low Coherence Interferometry ◽  
Definition Of ◽  
In Situ Metrology

Growing requirements for in situ metrology during manufacturing have led to an increased interest in optical coherence tomography (OCT) configurations of low coherence interferometry (LCI) for industrial domains. This paper investigates the optimisation of spectral domain OCT hardware and signal processing for such implementations. A collation of the underlying theory of OCT configured LCI systems from disparate sources linking the journey of the light reflected from the object surface to the definition of the measurand is presented. This is portrayed in an applicable, comprehensible design framework through its application to profilometry measurements for optimising system performance.

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