scholarly journals Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

Actuators ◽  
2020 ◽  
Vol 9 (3) ◽  
pp. 59
Author(s):  
Deepak Rajaram Patil ◽  
Venkateswarlu Annapureddy ◽  
J. Kaarthik ◽  
Atul Thakre ◽  
Jun Akedo ◽  
...  
Keyword(s):  
Thick Film ◽  
Thick Films ◽  
Cost Effective ◽  
Aerosol Deposition ◽  
Ceramic Coatings ◽  
Film Deposition ◽  
Energy Harvesters ◽  
Ceramic Films ◽  
Dense Ceramic ◽  
Processing Techniques

Conventional thin-film processing techniques remain inadequate for obtaining superior dense ceramic thick films. The incompatibility of ceramic films prepared via other methods, such as screen printing, spin coating, and sputtering, is a major obstacle in the fabrication of thick film-based ceramic electronic components. The granule spray in vacuum (GSV) processes and aerosol deposition (AD) are important coating approaches for forming dense ceramic thick films featuring nanoscale crystallite structures at room temperature, which offer excellent material properties and facilitate cost-effective production. AD ceramic coatings require the acceleration of solid-state submicron ceramic particles via gas streams with a velocity of a few hundred meters per second, which are then wedged onto a substrate. This process is economical and particularly useful for the fabrication of piezoelectric thick film-based microactuators, energy harvesters, sensors, and optoelectronic devices. More recently, the GSV technique was improved to achieve more uniform and homogeneous film deposition after AD. This review article presents a detailed overview of the AD and GSV processes for piezoelectric thick films in terms of recent scientific and technological applications.

scholarly journals Powder Pre-Treatment for Aerosol Deposition of Tin Dioxide Coatings for Gas Sensors

Materials ◽  
2018 ◽  
Vol 11 (8) ◽  
pp. 1342 ◽  
Author(s):  
Dominik Hanft ◽  
Murat Bektas ◽  
Ralf Moos
Keyword(s):  
Tin Dioxide ◽  
Mechanical Stability ◽  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Process ◽  
Temperature Treatment ◽  
Sensitive Film ◽  
Ceramic Films ◽  
Pre Treatment ◽  
Reducing Gases

The Aerosol Deposition (AD) method has the unique property to allow for manufacturing dense ceramic films at room temperature. As found in many publications, the deposition process is very sensitive to powder properties. In particular, powders of nano-sized particles and grains, e.g., from precipitation, are usually beyond the conventional size range of AD processability, yielding chalk-like films of low mechanical stability. Thus, the conventional AD process is limited in applicability. In this study, we try to overcome this problem by adapting the standard milling treatment of powders for improved deposition by additional temperature pre-treatment. Using commercial tin dioxide and including a temperature treatment for grain growth, makes the powder accessible to deposition. In this way, we achieve optically translucent and conductive SnO2 thick films. With the application such as a gas sensitive film as one of many possible applications for SnO2 thick-films, the sensors show excellent response to various reducing gases. This study shows one exemplary way of extending the range of adequate powder and applications for the AD method.

Preparation and Properties of CaCu3Ti4O12 Thick Film by Aerosol Deposition Method

2008 ◽  
Vol 368-372 ◽  
pp. 126-128
Author(s):  
Ji Feng Ma ◽  
Yuan Hua Lin ◽  
Ce Wen Nan ◽  
Takaaki Tsurumi
Keyword(s):  
Thick Film ◽  
Thick Films ◽  
Copper Substrate ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
X Ray Diffraction ◽  
Ceramic Powders ◽  
Aerosol Deposition Method ◽  
Reaction Processing ◽  
Deposited Films

CaCu3Ti4O12 (CCTO) ceramic thick films have been prepared on Copper substrate, using ceramic powders by an aerosol deposition method (ADM). The ceramic powders are prepared by traditional solid state reaction processing at 1100 oC for 5 h. X-ray diffraction and scanning electron microscopy are used to investigate the microstructure and the phase composition of the deposited films. The results indicate that thick films are pure CCTO phase and homogenous. The dielectric impedance spectra indicate that the dielectric constant of CCTO thick film can reach 3×103.

Hybrid Aerosol Deposition Process for Ceramic Coatings

2018 ◽  
Vol 87 (2) ◽  
pp. 136-143 ◽  
Author(s):  
Kentaro SHINODA ◽  
Takanori SAEKI ◽  
Jun AKEDO
Keyword(s):  
Aerosol Deposition ◽  
Deposition Process ◽  
Ceramic Coatings

The Future of Plasma-Based Surface Engineering Techniques in Tribology (Keynote)

2005 ◽  
Author(s):  
Allan Matthews ◽  
Adrian Leyland
Keyword(s):  
Surface Engineering ◽  
Performance Enhancement ◽  
Bulk Material ◽  
Cost Savings ◽  
Cost Effective ◽  
Ceramic Coatings ◽  
Performance Improvements ◽  
Treatment Techniques ◽  
Wide Range ◽  
Macro Scale

Over the past twenty years or so, there have been major steps forward both in the understanding of tribological mechanisms and in the development of new coating and treatment techniques to better “engineer” surfaces to achieve reductions in wear and friction. Particularly in the coatings tribology field, improved techniques and theories which enable us to study and understand the mechanisms occurring at the “nano”, “micro” and “macro” scale have allowed considerable progress to be made in (for example) understanding contact mechanisms and the influence of “third bodies” [1–5]. Over the same period, we have seen the emergence of the discipline which we now call “Surface Engineering”, by which, ideally, a bulk material (the ‘substrate’) and a coating are combined in a way that provides a cost-effective performance enhancement of which neither would be capable without the presence of the other. It is probably fair to say that the emergence and recognition of Surface Engineering as a field in its own right has been driven largely by the availability of “plasma”-based coating and treatment processes, which can provide surface properties which were previously unachievable. In particular, plasma-assisted (PA) physical vapour deposition (PVD) techniques, allowing wear-resistant ceramic thin films such as titanium nitride (TiN) to be deposited on a wide range of industrial tooling, gave a step-change in industrial productivity and manufactured product quality, and caught the attention of engineers due to the remarkable cost savings and performance improvements obtained. Subsequently, so-called 2nd- and 3rd-generation ceramic coatings (with multilayered or nanocomposite structures) have recently been developed [6–9], to further extend tool performance — the objective typically being to increase coating hardness further, or extend hardness capabilities to higher temperatures.

Robustness versus Performance Assessment for Different Gamma-TiAl Processing Routes

2011 ◽  
Vol 1295 ◽  
Author(s):  
Marc Thomas
Keyword(s):  
High Performance ◽  
Cost Effective ◽  
Processing Route ◽  
Transportation Industry ◽  
Tial Alloys ◽  
Alternative Processing ◽  
Aerospace Applications ◽  
Robust Processing ◽  
Processing Techniques ◽  
Robust Process

ABSTRACTOne of the main driving force for the development of advanced structural materials is weight saving especially in the transportation industry in order to reduce CO2 emission. The utilization of gamma aluminides, as good candidates for aerospace applications, is strongly related to the development of a cost-effective and robust processing route, as far as possible. It is well established that the processing route, i.e. cast, wrought or PM, has a dramatic effect on the microstructure and texture of gamma-TiAl alloys. Therefore, significant microstructural variations through post-heat treatments coupled with compositional modifications can only guarantee a proper balance of desired properties. However, a number of metallurgical factors during the processing steps can contribute to some scattering in properties. This review will highlight several critical process variables in terms of the resulting g-TiAl microstructures. Of primary importance is the as-cast texture which is difficult to control and may contribute to prefer some alternative processing routes to ensure a better repeatability in mechanical results. Some innovative processing techniques for controlling the structure will then be presented. The main point which will be discussed in this paper is whether an approach leading to a robust process would not be at the expense of the high performance of the structural material.

Structural and ferroelectric properties of (K,Na,Li)(Nb,Ta)O3 — CaZrO3 thick films by aerosol deposition

2015 ◽  
Vol 66 (7) ◽  
pp. 1101-1105
Author(s):  
Jungkeun Lee ◽  
Soohwan Lee ◽  
Min-Geun Choi ◽  
Soo-Bin Kang ◽  
Ji-Ho Lim ◽  
...  
Keyword(s):  
Ferroelectric Properties ◽  
Thick Films ◽  
Aerosol Deposition

scholarly journals Examination of Thick-Films Using Modern Surface Analytical Techniques

1984 ◽  
Vol 11 (3) ◽  
pp. 219-223 ◽  
Author(s):  
G. Harsányi ◽  
G. Ripka
Keyword(s):  
Integrated Circuits ◽  
Thick Film ◽  
Analytical Methods ◽  
Thick Films ◽  
Analytical Techniques ◽  
Electrical Measurements ◽  
Surface Impurity ◽  
And Migration

Modern surface analytical methods/EMPA, AES, SIMS etc. were used for studying the different layers in thick-film integrated circuits. Diffusion and migration effects, surface impurity distributions and surface compositions were examined. Some of the results are presented in this paper. Electrical measurements are not discussed here; only examples of the practical use of the methods are demonstrated.

scholarly journals Microstructures and Magnetic Properties of Sm-Fe-N Thick Films Produced by the Aerosol Deposition Method

2004 ◽  
Vol 45 (2) ◽  
pp. 369-372 ◽  
Author(s):  
Tomohito Maki ◽  
Satoshi Sugimoto ◽  
Toshio Kagotani ◽  
Koichiro Inomata ◽  
Jun Akedo
Keyword(s):  
Magnetic Properties ◽  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Aerosol Deposition Method
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