scholarly journals Powder Pre-Treatment for Aerosol Deposition of Tin Dioxide Coatings for Gas Sensors

Materials ◽  
2018 ◽  
Vol 11 (8) ◽  
pp. 1342 ◽  
Author(s):  
Dominik Hanft ◽  
Murat Bektas ◽  
Ralf Moos
Keyword(s):  
Tin Dioxide ◽  
Mechanical Stability ◽  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Process ◽  
Temperature Treatment ◽  
Sensitive Film ◽  
Ceramic Films ◽  
Pre Treatment ◽  
Reducing Gases

The Aerosol Deposition (AD) method has the unique property to allow for manufacturing dense ceramic films at room temperature. As found in many publications, the deposition process is very sensitive to powder properties. In particular, powders of nano-sized particles and grains, e.g., from precipitation, are usually beyond the conventional size range of AD processability, yielding chalk-like films of low mechanical stability. Thus, the conventional AD process is limited in applicability. In this study, we try to overcome this problem by adapting the standard milling treatment of powders for improved deposition by additional temperature pre-treatment. Using commercial tin dioxide and including a temperature treatment for grain growth, makes the powder accessible to deposition. In this way, we achieve optically translucent and conductive SnO2 thick films. With the application such as a gas sensitive film as one of many possible applications for SnO2 thick-films, the sensors show excellent response to various reducing gases. This study shows one exemplary way of extending the range of adequate powder and applications for the AD method.

scholarly journals Piezoelectric Thick Film Deposition via Powder/Granule Spray in Vacuum: A Review

Actuators ◽  
2020 ◽  
Vol 9 (3) ◽  
pp. 59
Author(s):  
Deepak Rajaram Patil ◽  
Venkateswarlu Annapureddy ◽  
J. Kaarthik ◽  
Atul Thakre ◽  
Jun Akedo ◽  
...  
Keyword(s):  
Thick Film ◽  
Thick Films ◽  
Cost Effective ◽  
Aerosol Deposition ◽  
Ceramic Coatings ◽  
Film Deposition ◽  
Energy Harvesters ◽  
Ceramic Films ◽  
Dense Ceramic ◽  
Processing Techniques

Conventional thin-film processing techniques remain inadequate for obtaining superior dense ceramic thick films. The incompatibility of ceramic films prepared via other methods, such as screen printing, spin coating, and sputtering, is a major obstacle in the fabrication of thick film-based ceramic electronic components. The granule spray in vacuum (GSV) processes and aerosol deposition (AD) are important coating approaches for forming dense ceramic thick films featuring nanoscale crystallite structures at room temperature, which offer excellent material properties and facilitate cost-effective production. AD ceramic coatings require the acceleration of solid-state submicron ceramic particles via gas streams with a velocity of a few hundred meters per second, which are then wedged onto a substrate. This process is economical and particularly useful for the fabrication of piezoelectric thick film-based microactuators, energy harvesters, sensors, and optoelectronic devices. More recently, the GSV technique was improved to achieve more uniform and homogeneous film deposition after AD. This review article presents a detailed overview of the AD and GSV processes for piezoelectric thick films in terms of recent scientific and technological applications.

Fabrication of Microstrip Band Pass Filters in GHz Region by Aerosol Deposition Process

2006 ◽  
Vol 301 ◽  
pp. 117-120
Author(s):  
Mihoko Momotani ◽  
Naoko Mori ◽  
Song Min Nam ◽  
Hirofumi Kakemoto ◽  
Satoshi Wada ◽  
...  
Keyword(s):  
High Frequency ◽  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Process ◽  
Passive Component ◽  
Band Pass Filter ◽  
Network Analyzer ◽  
Fabrication Technology ◽  
Pass Filter ◽  
Band Pass

In order to fabricate a microstrip band pass filter in GHz region as a passive component of RF modules, Al2O3 thick films were prepared on Cu metal substrates by AD (Aerosol Deposition) process. The dimensions of the filters were determined by the high frequency electromagnetic analysis. The filters were successfully fabricated on AD-derived Al2O3 thick films by employing sputtering, photolithography, electroplating and chemical etching processes. Their filtering characteristics were examined by a Network Analyzer. Through this work, we suggest that the AD process will be important the fabrication technology for integrated RF modules.

scholarly journals Preparation and evaluation of microwave dielectric ceramic thick films by aerosol deposition process

2008 ◽  
Vol 116 (1351) ◽  
pp. 406-408
Author(s):  
Jianyong LI ◽  
Daisuke TSUKIORI ◽  
Hirofumi KAKEMOTO ◽  
Satoshi WADA ◽  
Takaaki TSURUMI
Keyword(s):  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Process ◽  
Microwave Dielectric Ceramic ◽  
Dielectric Ceramic ◽  
Microwave Dielectric ◽  
Preparation And Evaluation

Hybrid Aerosol Deposition Process for Ceramic Coatings

2018 ◽  
Vol 87 (2) ◽  
pp. 136-143 ◽  
Author(s):  
Kentaro SHINODA ◽  
Takanori SAEKI ◽  
Jun AKEDO
Keyword(s):  
Aerosol Deposition ◽  
Deposition Process ◽  
Ceramic Coatings

Structural and ferroelectric properties of (K,Na,Li)(Nb,Ta)O3 — CaZrO3 thick films by aerosol deposition

2015 ◽  
Vol 66 (7) ◽  
pp. 1101-1105
Author(s):  
Jungkeun Lee ◽  
Soohwan Lee ◽  
Min-Geun Choi ◽  
Soo-Bin Kang ◽  
Ji-Ho Lim ◽  
...  
Keyword(s):  
Ferroelectric Properties ◽  
Thick Films ◽  
Aerosol Deposition

scholarly journals Microstructures and Magnetic Properties of Sm-Fe-N Thick Films Produced by the Aerosol Deposition Method

2004 ◽  
Vol 45 (2) ◽  
pp. 369-372 ◽  
Author(s):  
Tomohito Maki ◽  
Satoshi Sugimoto ◽  
Toshio Kagotani ◽  
Koichiro Inomata ◽  
Jun Akedo
Keyword(s):  
Magnetic Properties ◽  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Aerosol Deposition Method
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