scholarly journals Density Measurements in Low Pressure, Weakly Magnetized, RF Plasmas: Experimental Verification of the Sheath Expansion Effect

2017 ◽  
Vol 5 ◽  
Author(s):  
Yunchao Zhang ◽  
Christine Charles ◽  
Roderick W. Boswell
Keyword(s):  
Experimental Verification ◽  
Low Pressure ◽  
Rf Plasmas ◽  
Density Measurements ◽  
Expansion Effect

An efficient Monte Carlo simulator for low-pressure RF plasmas

1997 ◽  
Vol 25 (5) ◽  
pp. 1081-1085 ◽  
Author(s):  
M. Ardehali ◽  
H. Matsumoto
Keyword(s):  
Monte Carlo ◽  
Low Pressure ◽  
Rf Plasmas ◽  
Monte Carlo Simulator

Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes

2013 ◽  
Vol 46 (47) ◽  
pp. 475206 ◽  
Author(s):  
Nikola Škoro ◽  
Nevena Puač ◽  
Saša Lazović ◽  
Uroš Cvelbar ◽  
George Kokkoris ◽  
...  
Keyword(s):  
Low Pressure ◽  
Surface Cleaning ◽  
Rf Plasmas ◽  
Global Modelling ◽  
Pressure Hydrogen

Single Reflection Method for Pole-Density Measurements Accounting for Secondary Extinction in Textured Films

2004 ◽  
Vol 443-444 ◽  
pp. 141-144
Author(s):  
I. Tomov
Keyword(s):  
Experimental Verification ◽  
Pole Density ◽  
Reflection Method ◽  
Density Measurements ◽  
X Ray ◽  
Diffraction Angle ◽  
Pair Method ◽  
Secondary Extinction ◽  
Beam Polarisation

A method of pole density measurements is described, which uses the differences in X-ray beam polarisation of two monochromators. The method requires a single reflection at an intermediate diffraction angle. Experimental verification is provided by pole density measurements of Ag films and comparison the results obtained with the proposed method with results from the reflection-pair method [8-10].

Temperature of Particulates in Low-Pressure rf-Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures

2010 ◽  
Vol 50 (10) ◽  
pp. 954-961 ◽  
Author(s):  
H. R. Maurer ◽  
R. Basner ◽  
H. Kersten
Keyword(s):  
Low Pressure ◽  
Rf Plasmas

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

2021 ◽  
Author(s):  
David Alexander Schulenberg ◽  
Ihor Korolov ◽  
Zoltan Donko ◽  
Aranka Derzsi ◽  
Julian Schulze
Keyword(s):  
Experimental Validation ◽  
Low Pressure ◽  
Rf Plasmas
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