Temperature of Particulates in Low-Pressure rf-Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures

2010 ◽  
Vol 50 (10) ◽  
pp. 954-961 ◽  
Author(s):  
H. R. Maurer ◽  
R. Basner ◽  
H. Kersten
Keyword(s):  
Low Pressure ◽  
Rf Plasmas

An efficient Monte Carlo simulator for low-pressure RF plasmas

1997 ◽  
Vol 25 (5) ◽  
pp. 1081-1085 ◽  
Author(s):  
M. Ardehali ◽  
H. Matsumoto
Keyword(s):  
Monte Carlo ◽  
Low Pressure ◽  
Rf Plasmas ◽  
Monte Carlo Simulator

Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes

2013 ◽  
Vol 46 (47) ◽  
pp. 475206 ◽  
Author(s):  
Nikola Škoro ◽  
Nevena Puač ◽  
Saša Lazović ◽  
Uroš Cvelbar ◽  
George Kokkoris ◽  
...  
Keyword(s):  
Low Pressure ◽  
Surface Cleaning ◽  
Rf Plasmas ◽  
Global Modelling ◽  
Pressure Hydrogen

Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

2021 ◽  
Author(s):  
David Alexander Schulenberg ◽  
Ihor Korolov ◽  
Zoltan Donko ◽  
Aranka Derzsi ◽  
Julian Schulze
Keyword(s):  
Experimental Validation ◽  
Low Pressure ◽  
Rf Plasmas

Effects of gas temperature, pressure, and discharge power on nucleation time of nano-particles in low pressure C2H2/Ar RF plasmas

2017 ◽  
Vol 122 (16) ◽  
pp. 163302 ◽  
Author(s):  
Jiashu Lin ◽  
Sagi Orazbayev ◽  
Marie Hénault ◽  
Thomas Lecas ◽  
Kazuo Takahashi ◽  
...  
Keyword(s):  
Low Pressure ◽  
Discharge Power ◽  
Nano Particles ◽  
Gas Temperature ◽  
Nucleation Time ◽  
Rf Plasmas

Formation processes of nanometer sized particles in low pressure Ar∕CH[sub 4] rf plasmas

2008 ◽  
Author(s):  
J. Beckers ◽  
G. D. G. J. Vacaresse ◽  
W. W. Stoffels ◽  
José Tito Mendonça ◽  
David P. Resendes ◽  
...  
Keyword(s):  
Low Pressure ◽  
Formation Processes ◽  
Rf Plasmas
Sign in / Sign up

Export Citation Format

Share Document