scholarly journals WET ETCHING & UNIFORM WAFER-LEVEL THINNING OF BULK PIEZOELECTRIC CERAMICS ON SILICON

2012 ◽  
Author(s):  
E.E. Aktakka ◽  
R.L. Peterson ◽  
K. Najafi
Keyword(s):  
Piezoelectric Ceramics ◽  
Wet Etching ◽  
Wafer Level ◽  
Bulk Piezoelectric Ceramics

Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon

2013 ◽  
Vol 60 (6) ◽  
pp. 2022-2030 ◽  
Author(s):  
Ethem Erkan Aktakka ◽  
Rebecca L. Peterson ◽  
Khalil Najafi
Keyword(s):  
Piezoelectric Ceramics ◽  
Wafer Level ◽  
High Quality ◽  
Bulk Piezoelectric Ceramics

scholarly journals Highly Efficient Low-frequency Energy Harvester Using Bulk Piezoelectric Ceramics

2013 ◽  
Vol 476 ◽  
pp. 012133 ◽  
Author(s):  
M Colin ◽  
S Basrour ◽  
L Rufer ◽  
C Bantignies ◽  
A Nguyen-Dinh
Keyword(s):  
Energy Harvester ◽  
Low Frequency ◽  
Piezoelectric Ceramics ◽  
Highly Efficient ◽  
Bulk Piezoelectric Ceramics

scholarly journals Piezoelectric and structural properties of bismuth sodium potassium titanate lead-free ceramics for energy harvesting

2021 ◽  
Author(s):  
Javier Eduardo Camargo ◽  
Santiago Osinaga ◽  
Mariano Febbo ◽  
Sebastián P. Machado ◽  
Fernando Rubio-Marcos ◽  
...  
Keyword(s):  
Energy Harvesting ◽  
Piezoelectric Ceramics ◽  
Energy Conversion Efficiency ◽  
High Energy ◽  
Lead Free ◽  
Decisive Importance ◽  
Lead Titanate Zirconate ◽  
Effective Performance ◽  
Bulk Piezoelectric Ceramics ◽  
Energy Harvesting Devices

Abstract The development of bulk piezoelectric ceramics with high energy conversion efficiency is of decisive importance for the requirements of the advanced energy harvesting devices toward miniaturization and integration. There is an additional motivation in the piezoelectric ceramics, lead titanate-zirconate (PZT) ceramics are the most widely used energy harvesting (EH) materials. This fact is important because legal restrictions on the use of lead in electronic devices have led to greater efforts being made to develop lead-free alternatives to PZT-based materials. Here, we propose the Bi0.5(Na0.8K0.2)0.5TiO3 (BNKT) lead-free piezoceramics as a good candidate for the replacement of toxic lead compounds for energy harvesting applications. For that, we have carried out a systematic study of the voltage generation of BNKT-based piezoceramics for (EH) purposes. Specifically, our results reveal that the BNKT–based lead-free piezoceramics show adequated effective capacitance and output energy due to more effective performance with a piezoelectric charge coefficient and a maximum generated output voltage as high as 12.8 pC/N and 19.9 V, respectively. Finally, we consider that the design of new lead-free piezoceramics with superior property coefficients and functionalities, such as the BNKT-based piezoceramics, should be seriously considered as candidates for the replacement of the current toxic lead-based compounds.

Relationship Between Wafer-Level Warpage and Cu Overburden Thickness Controlled by Isotropic Wet Etching for Through Si Vias

2013 ◽  
Vol 3 (11) ◽  
pp. 1820-1825 ◽  
Author(s):  
Jae Woong Choi ◽  
Lee Guan Ong ◽  
Hong Yu Li ◽  
Soon Wook Kim ◽  
Gil Ho Hwang ◽  
...  
Keyword(s):  
Wet Etching ◽  
Wafer Level ◽  
Overburden Thickness
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