DRY-RELEASED POST-CMOS COMPATIBLE CONTOUR-MODE ALUMINUM NITRIDE MICROMECHANICAL RESONATORS FOR VHF APPLICATIONS

2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2004.9 ◽

2004 ◽

Author(s):

G. Piazza ◽

A.P. Pisano

Keyword(s):

Aluminum Nitride ◽

Micromechanical Resonators ◽

Cmos Compatible ◽

Contour Mode

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Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497509 ◽

2005 ◽

Cited By ~ 7

Author(s):

G. Piazza ◽

P.J. Stephanou ◽

M.B.J. Wijesundara ◽

A.P. Pisano

Keyword(s):

Aluminum Nitride ◽

Multiple Frequency ◽

Single Chip ◽

Micromechanical Resonators ◽

Contour Mode

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Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromeckanical resonators for UHF applications

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. ◽

10.1109/memsys.2005.1453857 ◽

2005 ◽

Cited By ~ 28

Author(s):

G. Piazza ◽

P.J. Stephanou ◽

J.M. Porter ◽

M.B.J. Wijesundara ◽

A.P. Pisano

Keyword(s):

Aluminum Nitride ◽

Motional Resistance ◽

Contour Mode

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POST-CMOS COMPATIBLE ALUMINUM NITRIDE RING WAVE GUIDE (RWG) RESONATORS

2008 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh2008.96 ◽

2008 ◽

Author(s):

K.E. Wojciechowski ◽

R.H. Olsson III ◽

M.R. Tuck

Keyword(s):

Aluminum Nitride ◽

Wave Guide ◽

Cmos Compatible

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Maskless lithography of CMOS-compatible materials for hybrid plasmonic nanophotonics: aluminum nitride/aluminum oxide/aluminum waveguides

Journal of Nanophotonics ◽

10.1117/1.jnp.12.026001 ◽

2018 ◽

Vol 12 (02) ◽

pp. 1 ◽

Cited By ~ 1

Author(s):

M. Joseph Roberts ◽

Mark Moran ◽

Linda F. Johnson ◽

Will Freeman

Keyword(s):

Aluminum Nitride ◽

Aluminum Oxide ◽

Maskless Lithography ◽

Cmos Compatible

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Dynamic Q-enhancement in aluminum nitride contour-mode resonators

Applied Physics Letters ◽

10.1063/1.5115437 ◽

2019 ◽

Vol 115 (17) ◽

pp. 173504 ◽

Cited By ~ 1

Author(s):

Changting Xu ◽

Abhay Kochhar ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Contour Mode

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Thick aluminum nitride contour-mode resonators mitigate thermoelastic damping

2016 IEEE International Frequency Control Symposium (IFCS) ◽

10.1109/fcs.2016.7546790 ◽

2016 ◽

Cited By ~ 2

Author(s):

Cristian Cassella ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Thermoelastic Damping ◽

Contour Mode

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Monolithic integration of phase change materials and aluminum nitride contour-mode MEMS resonators for highly reconfigurable radio frequency systems

10.17760/d20194504 ◽

2015 ◽

Author(s):

Gwendolyn Eve Hummel

Keyword(s):

Aluminum Nitride ◽

Radio Frequency ◽

Phase Change ◽

Phase Change Materials ◽

Monolithic Integration ◽

Mems Resonators ◽

Reconfigurable Radio ◽

Contour Mode ◽

Radio Frequency Systems

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Vector network analyzer measurements of frequency fluctuations in aluminum nitride contour-mode resonators

2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) ◽

10.1109/eftf-ifc.2013.6702257 ◽

2013 ◽

Cited By ~ 3

Author(s):

Nicholas Miller ◽

Gianluca Piazza

Keyword(s):

Aluminum Nitride ◽

Vector Network Analyzer ◽

Network Analyzer ◽

Frequency Fluctuations ◽

Contour Mode

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Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.04.032 ◽

2007 ◽

Vol 134 (1) ◽

pp. 152-160 ◽

Cited By ~ 20

Author(s):

Philip J. Stephanou ◽

Gianluca Piazza ◽

Carolyn D. White ◽

Muthu B.J. Wijesundara ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Contour Mode

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Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.12.003 ◽

2007 ◽

Vol 136 (2) ◽

pp. 638-645 ◽

Cited By ~ 29

Author(s):

Gianluca Piazza ◽

Albert P. Pisano

Keyword(s):

Aluminum Nitride ◽

Contour Mode

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