scholarly journals An Electrostatically-Actuated Microvalve for Semiconductor Gas Flow Control

Author(s):  
J.K. Robertson ◽  
K.D. Wise
Author(s):  
Tatjana Dankovic ◽  
Alan Feinerman

We present an electrostatically operated normally opened microvalve for gas flow control. The valve is made of thermoplastic materials and uses a new fabrication method. The voltage required to close the 0.9 mm wide microvalve was ∼350 V for fluid (air) pressure ∼1kPa. A new technique [1] has been developed to fabricate valves, micromixer [2, 3] and other microfluidic structures, by patterned welding of compliant thermoplastic films using Universal Laser System CO2 laser. The normally opened valve is electrostatically actuated by applying the voltage on its metalized thermoplastic surfaces. There is no movable membrane or cantilever which closes the fluid path as reported in many other electrostatic microvalves. The walls of the channel collapse toward each other when sufficient voltage is applied, thus effectively closing the fluid path. The material used is 1.4 μm thick Mylar™ sheets (DuPont) coated on one side with ∼10nm of gold.


1999 ◽  
Vol 96 (6) ◽  
pp. 715-720
Author(s):  
G. Danloy ◽  
J. Mignon ◽  
L. Bonte
Keyword(s):  

2003 ◽  
Vol 105 (3) ◽  
pp. 237-246 ◽  
Author(s):  
Lena Klintberg ◽  
Mikael Karlsson ◽  
Lars Stenmark ◽  
Greger Thornell

1980 ◽  
Vol 67 (4) ◽  
pp. 1413-1413
Author(s):  
George J. Kay ◽  
Alan Keskimen

1971 ◽  
Vol 93 (3) ◽  
pp. 200-205
Author(s):  
Seth R. Goldstein ◽  
Andrew C. Harvey

Two passive gas flow controllers are presented which provide compensation for variations in ambient temperature and supply pressure. One technique, which provides first-order error compensation, utilizes a choked orifice having its area linearily varied in proportion to a diaphragm deflection. Compensation is achieved by applying upstream pressure to one side of the diaphragm, and by applying a trapped gas pressure proportional to absolute temperature on the other side of the diaphragm. General design relationships are presented, and a prototype unit constructed to control a minute flow rate of high-pressure oxygen is described. A second flow control technique is presented which provides the required nonlinear temperature compensation for flow supplied through a constant-area choked orifice. This is achieved by utilizing a compliant volume of trapped gas to generate a pressure proportional to the square root of absolute temperature. This pressure is used to control the pressure upstream of the choked orifice, thus providing constant flow.


Author(s):  
Kevin Boyd ◽  
Adam Monkowski ◽  
Jialing Chen ◽  
Tao Ding ◽  
Ray Malone ◽  
...  

Author(s):  
M. Zheng ◽  
G. T. Reader

Exhaust purification for lean-burn internal combustion engines has been impaired by the relatively low temperature of the exhaust that makes conventional passive aftertreatment schemes less energy-efficient in oxidation/regeneration. To tackle such adversaries, an active-flow control scheme, reversal-flow control, is outlined and analyzed in this paper. Preliminary energy-efficiency analyses are performed with different gas flow rate, flow reversal frequency, and monolith-solid properties. Simulation results indicate that through active thermal management the supplemental energy consumption can be drastically reduced, which is also supported by previous empirical studies.


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