Improved quality of flash-lamp-crystallized polycrystalline silicon films by using low defect density Cat-CVD a-Si films

Author(s):  
Takaki Nozawa ◽  
Keisuke Ohdaira
2004 ◽  
Vol 265 (1-2) ◽  
pp. 168-173 ◽  
Author(s):  
Axel Straub ◽  
Per I. Widenborg ◽  
Alistair Sproul ◽  
Yidan Huang ◽  
Nils-Peter Harder ◽  
...  

2010 ◽  
Vol 49 (4) ◽  
pp. 04DP04 ◽  
Author(s):  
Keisuke Ohdaira ◽  
Tomoko Fujiwara ◽  
Yohei Endo ◽  
Kazuhiro Shiba ◽  
Hiroyuki Takemoto ◽  
...  

2012 ◽  
Vol 51 (10S) ◽  
pp. 10NB15 ◽  
Author(s):  
Keisuke Ohdaira ◽  
Keisuke Sawada ◽  
Noritaka Usami ◽  
Sergey Varlamov ◽  
Hideki Matsumura

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