Improved quality of flash-lamp-crystallized polycrystalline silicon films by using low defect density Cat-CVD a-Si films
2017 ◽
Vol 108
(10)
◽
pp. 827-831
Keyword(s):
Si Films
◽
2004 ◽
Vol 265
(1-2)
◽
pp. 168-173
◽
2011 ◽
Vol 11
(3)
◽
pp. 604-607
◽
2011 ◽
Vol 50
(4S)
◽
pp. 04DP01
◽
2010 ◽
Vol 49
(4)
◽
pp. 04DP04
◽
Keyword(s):
2012 ◽
Vol 51
(10S)
◽
pp. 10NB15
◽
2009 ◽
Keyword(s):