Electrical properties of polycrystalline silicon films formed from amorphous silicon films by flash lamp annealing

2011 ◽  
Vol 11 (3) ◽  
pp. 604-607 ◽  
Author(s):  
Takuya Nishikawa ◽  
Keisuke Ohdaira ◽  
Hideki Matsumura
Keyword(s):  
Electrical Properties ◽  
Amorphous Silicon ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Flash Lamp ◽  
Polycrystalline Silicon Films

Bubbly Silicon: A New Mechanism for Solid Phase Crystallization of Amorphous Silicon

2009 ◽  
Author(s):  
Curtis Anderson ◽  
Lin Cui ◽  
Uwe Kortshagen
Keyword(s):  
Amorphous Silicon ◽  
Polycrystalline Silicon ◽  
Silicon Nanocrystals ◽  
Solid Phase ◽  
Amorphous Film ◽  
Silicon Films ◽  
Amorphous Films ◽  
Solid Phase Crystallization ◽  
Rapid Formation ◽  
Polycrystalline Silicon Films

This paper describes the rapid formation of polycrystalline silicon films through seeding with silicon nanocrystals. The incorporation of seed crystals into amorphous silicon films helps to eliminate the crystallization incubation time observed in non-seeded amorphous silicon films. Furthermore, the formation of several tens of nanometer in diameter voids is observed when cubic silicon nanocrystals with around 30 nm in size are embedded in the amorphous films. These voids move through the amorphous film with high velocity, pulling behind them a crystallized “tail.” This mechanism leads to rapid formation of polycrystalline films.

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