Flash-lamp-crystallized polycrystalline silicon films with high hydrogen concentration formed from Cat-CVD a-Si films
Keyword(s):
Si Films
◽
2011 ◽
Vol 11
(3)
◽
pp. 604-607
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2011 ◽
Vol 50
(4S)
◽
pp. 04DP01
◽
2010 ◽
Vol 49
(4)
◽
pp. 04DP04
◽
Keyword(s):
2012 ◽
Vol 51
(10S)
◽
pp. 10NB15
◽
2009 ◽
Keyword(s):
2013 ◽
Vol 52
(4S)
◽
pp. 04CR11
◽
Keyword(s):