Interface Properties of the Two Step Oxide Layers by UV Light Excited Ozone Silicon Oxidation and Chemical Vapor Deposition (CVD)-SiO2 Film
Keyword(s):
Uv Light
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2002 ◽
Vol 8
(2)
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pp. 298-301
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1983 ◽
Vol 1
(3)
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pp. 656
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2019 ◽
1992 ◽
Vol 31
(Part 1, No. 2A)
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pp. 348-354
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Keyword(s):
1994 ◽
Vol 12
(3)
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pp. 746-750
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Keyword(s):
1992 ◽
Vol 31
(Part 2, No. 5B)
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pp. L608-L611
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2016 ◽
Vol 89
(9)
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pp. 1402-1408
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Keyword(s):