scholarly journals Discharge Characteristics and Optical Emission Spectroscopy of Electron Beam Excited Plasma(EBEP)-assisted Anodic Vacuum Arc and its Application to Deposition of TiO2 Films.

Shinku ◽  
2000 ◽  
Vol 43 (9) ◽  
pp. 891-896 ◽  
Author(s):  
Kazuyuki TOKI ◽  
Yasushi SHIMIZU ◽  
Tomonobu HATA
Keyword(s):  
Electron Beam ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Vacuum Arc ◽  
Tio2 Films ◽  
Discharge Characteristics

Comparison endpoint study of process plasma and secondary electron beam exciter optical emission spectroscopy

2012 ◽  
Vol 30 (6) ◽  
pp. 061303 ◽  
Author(s):  
P. L. Stephan Thamban ◽  
Stuart Yun ◽  
Gabriel Padron-Wells ◽  
Jimmy W. Hosch ◽  
Matthew J. Goeckner
Keyword(s):  
Electron Beam ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Secondary Electron ◽  
Optical Emission

Optical emission spectroscopy measurements of electron beam-generated plasma in argon

2011 ◽  
Author(s):  
Evgeniya H. Lock ◽  
David R. Boris ◽  
Scott G. Walton ◽  
Richard F. Fernsler ◽  
James Franek ◽  
...  
Keyword(s):  
Electron Beam ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission

Diagnostics of pulsed vacuum arc discharges by optical emission spectroscopy and electrostatic double-probe measurements

Vacuum ◽  
2006 ◽  
Vol 81 (4) ◽  
pp. 411-416 ◽  
Author(s):  
L.A. García ◽  
E. Restrepo ◽  
H. Jiménez ◽  
H.A. Castillo ◽  
R. Ospina ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Vacuum Arc ◽  
Double Probe ◽  
Arc Discharges ◽  
Probe Measurements
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