Diagnostics of pulsed vacuum arc discharges by optical emission spectroscopy and electrostatic double-probe measurements

Vacuum ◽  
2006 ◽  
Vol 81 (4) ◽  
pp. 411-416 ◽  
Author(s):  
L.A. García ◽  
E. Restrepo ◽  
H. Jiménez ◽  
H.A. Castillo ◽  
R. Ospina ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Vacuum Arc ◽  
Double Probe ◽  
Arc Discharges ◽  
Probe Measurements

scholarly journals Methods Employed in Optical Emission Spectroscopy Analysis: a Review

2015 ◽  
Vol 11 (21) ◽  
pp. 239-267 ◽  
Author(s):  
D M Devia ◽  
L V Rodriguez-Restrepo ◽  
E Restrepo-Parra
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Emission Spectra ◽  
Optical Emission ◽  
Spectroscopy Analysis ◽  
Electronic Temperature ◽  
Arc Discharges ◽  
Plasma Techniques ◽  
Fundamental Physical ◽  
Physical Principles

In this work, different methods employed for the analysis of emission spectra are presented. The proposal is to calculate the excitation temperature (Texc), electronic temperature (Te) and electron density (ne) for several plasma techniques used in the growth of thin films. Some of these tecnniques include magnetron sputtering and arc discharges. Initially, some fundamental physical principles that support the Optical Emission Spec-troscopy (OES) technique are described; then, some rules to consider during the spectral analysis to avoid ambiguities are listed. Finally, some of the more frequently used spectroscopic methods for determining the physical properties of plasma are described.

Investigation of laser‐produced plasma multistructuring by floating probe measurements and optical emission spectroscopy

2020 ◽  
Vol 17 (11) ◽  
pp. 2000136
Author(s):  
Stefan A. Irimiciuc ◽  
Sergii Chertopalov ◽  
Valentin Craciun ◽  
Michal Novotný ◽  
Jan Lancok
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Laser Produced Plasma ◽  
Probe Measurements
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