Laser-induced fluorescence diagnostics for xenon Hall thrusters

1996 ◽  
Author(s):  
R. Cedolin ◽  
W. Hargus ◽  
R. Hanson ◽  
M. Cappelli
Keyword(s):  
Laser Induced Fluorescence ◽  
Hall Thrusters ◽  
Fluorescence Diagnostics

scholarly journals Laser-induced fluorescence diagnostics of basal cell carcinomas of the skin following topical ALA application

1996 ◽  
Author(s):  
Claes af Klinteberg ◽  
Annika M. Nilsson ◽  
Ingrid Wang-Nordman ◽  
Stefan Andersson-Engels ◽  
Sune Svanberg ◽  
...  
Keyword(s):  
Basal Cell ◽  
Laser Induced Fluorescence ◽  
Basal Cell Carcinomas ◽  
Fluorescence Diagnostics

Laser-Induced Fluorescence Diagnostics of CF4/O2/H2 Plasma Etching

1982 ◽  
Vol 17 ◽  
Author(s):  
S. Pang ◽  
S. R. J. Brueck
Keyword(s):  
Plasma Etching ◽  
Laser Induced Fluorescence ◽  
Etching Process ◽  
Gas Composition ◽  
Rf Power ◽  
Fluorescence Diagnostics ◽  
Power Frequency ◽  
Etch Rates

ABSTRACTLaser-induced fluorescence experiments have been carried out during CF4/O2/H2 plasma etching of Si and SiO2. Measurements of relative CF2 radical concentrations as a function of rf power, frequency, pressure, and gas composition are reported. The results are correlated with etch rates of Si and SiO2. The balance between CF2 and F concentrations is shown to influence the etching process strongly.

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