Multilayer optics for XUV spectral region: technology fabrication and applications

Open Physics ◽  
2003 ◽  
Vol 1 (1) ◽  
Author(s):  
S. Andreev ◽  
A. Akhsakhalyan ◽  
M. Bibishkin ◽  
N. Chkhalo ◽  
S. Gaponov ◽  
...  
Keyword(s):  
Spectral Region ◽  
Ultra Violet ◽  
Normal Incidence ◽  
Temperature Plasma ◽  
Optical Elements ◽  
X Ray ◽  
Water Window ◽  
Scientific Instrumentation ◽  
Euv Lithography ◽  
Short Period

AbstractWe present research investigations in the field of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scientific instrumentation. We discuss normal incidence multilayer optics in the spectral region of “water window”, multilayer optics for collimation and focusing of hard X-ray, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography (ψ-13nm) and short period multilayer optics.

Normal-incidence condenser mirror arrangement for compact water-window x-ray microscopy

1999 ◽  
Author(s):  
Hans M. Hertz ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Goeran A. Johansson ◽  
Thomas Wilhein ◽  
...  
Keyword(s):  
Normal Incidence ◽  
X Ray ◽  
Water Window

145% near-normal incidence reflectance of Cr Sc x-ray multilayer mirrors for the water window

2003 ◽  
Vol 28 (24) ◽  
pp. 2494 ◽  
Author(s):  
Fredrik Eriksson ◽  
Göran A. Johansson ◽  
Hans M. Hertz ◽  
Eric M. Gullikson ◽  
Ulrich Kreissig ◽  
...  
Keyword(s):  
Normal Incidence ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Water Window

Improving the soft X-ray reflectivity of Cr/Ti multilayers by co-deposition of B4C

2020 ◽  
Vol 27 (6) ◽  
pp. 1614-1617
Author(s):  
Jingtao Zhu ◽  
Jiayi Zhang ◽  
Haochuan Li ◽  
Yuchun Tu ◽  
Jinwen Chen ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Normal Incidence ◽  
X Rays ◽  
Interface Quality ◽  
X Ray ◽  
Water Window ◽  
Section Electron ◽  
Biology Research ◽  
Section Electron Microscopy

The `water window', covering 2.4–4.4 nm, is an important wavelength range particularly essential to biology research. Cr/Ti multilayers are one of the promising reflecting elements in this region because the near-normal-incidence reflectivity is theoretically as high as 64% at 2.73 nm. However, due to multilayer imperfections, the reported reflectivity is lower than 3% for near-normal incidence. Here, B and C were intentionally incorporated into ultra-thin Cr/Ti soft X-ray multilayers by co-deposition of B4C at the interfaces. The effect on the multilayer structure and composition has been investigated using X-ray reflectometry, X-ray photoelectron spectroscopy, and cross-section electron microscopy. It is shown that B and C are mainly bonded to Ti sites, forming a nonstoichiometric TiB x C y composition, which hinders the interface diffusion, supresses the crystallization of the Cr/Ti multilayer and dramatically improves the interface quality of Cr/TiB x C y multilayers. As a result, the near-normal-incidence reflectivity of soft X-rays increases from 4.48% to 15.75% at a wavelength of 2.73 nm.

The Use of Ti, Si, C, Be and LiF in Soft X-Ray Optics

1988 ◽  
Vol 102 ◽  
pp. 303
Author(s):  
A.V. Vinogradov
Keyword(s):  
Normal Incidence ◽  
Grazing Incidence ◽  
X Rays ◽  
Optical Elements ◽  
Ray Optics ◽  
X Ray

SummaryTi, Si, C, Be and LiF have been studied as coatings for normal incidence (multilayers) and grazing incidence (steering many-fold reflection mirrors) optical elements. The multilayers have been tested with soft (130+250 Å and hard (1.54 Å) X-rays. From these measurements the multilayer parameters have been deduced.The carbon and lithium fluorine steering mirrors showed the reflection of 10+60% for the turning angles of 30 and 45 degrees and two wavelengths of 44.7 Å and 67.6 Å. The perspectives of other materials are also discussed.

Narrow band X-ray emission in the water-window spectral region from a laser heated gold copper mix-Z plasma

2006 ◽  
Vol 86 (3) ◽  
pp. 519-522 ◽  
Author(s):  
J.A. Chakera ◽  
S.R. Kumbhare ◽  
P.A. Naik ◽  
P.D. Gupta
Keyword(s):  
Spectral Region ◽  
Narrow Band ◽  
X Ray ◽  
Water Window ◽  
Laser Heated

Temporal behavior of unresolved transition array emission in water window soft x-ray spectral region from multiply charged ions

2015 ◽  
Vol 107 (12) ◽  
pp. 121101 ◽  
Author(s):  
Thanh-Hung Dinh ◽  
Yuhei Suzuki ◽  
Goki Arai ◽  
Bowen Li ◽  
Padraig Dunne ◽  
...  
Keyword(s):  
Spectral Region ◽  
Temporal Behavior ◽  
Multiply Charged Ions ◽  
X Ray ◽  
Water Window ◽  
Multiply Charged ◽  
Charged Ions ◽  
Transition Array

scholarly journals Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements

2016 ◽  
Vol 49 (6) ◽  
pp. 2161-2171 ◽  
Author(s):  
Anton Haase ◽  
Saša Bajt ◽  
Philipp Hönicke ◽  
Victor Soltwisch ◽  
Frank Scholze
Keyword(s):  
Analytical Techniques ◽  
Normal Incidence ◽  
Interface Roughness ◽  
Particle Swarm Optimizer ◽  
Individual Layer ◽  
Multilayer Systems ◽  
X Ray ◽  
Water Window ◽  
Fluorescence Measurements

Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance measurements, resonant EUV reflectance across the ScLedge, and X-ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determinedviaa particle-swarm optimizer and validated using a Markov chain Monte Carlo maximum-likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted.

Spectral and temporal behavior of multiply ionized high-Z plasmas in the water window soft x-ray spectral region

2015 ◽  
Author(s):  
Thanh-Hung Dinh ◽  
Yuhei Suzuki ◽  
Goki Arai ◽  
Masaharu Nishikino ◽  
Noboru Hasegawa ◽  
...  
Keyword(s):  
Spectral Region ◽  
Temporal Behavior ◽  
X Ray ◽  
Water Window
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