Development of the water window imaging x-ray microscope utilizing normal incidence multilayer optics

1991 ◽  
Vol 30 (8) ◽  
pp. 1086 ◽  
Author(s):  
Richard B. Hoover
Keyword(s):  
Normal Incidence ◽  
X Ray ◽  
Water Window

Normal-incidence condenser mirror arrangement for compact water-window x-ray microscopy

1999 ◽  
Author(s):  
Hans M. Hertz ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Goeran A. Johansson ◽  
Thomas Wilhein ◽  
...  
Keyword(s):  
Normal Incidence ◽  
X Ray ◽  
Water Window

145% near-normal incidence reflectance of Cr Sc x-ray multilayer mirrors for the water window

2003 ◽  
Vol 28 (24) ◽  
pp. 2494 ◽  
Author(s):  
Fredrik Eriksson ◽  
Göran A. Johansson ◽  
Hans M. Hertz ◽  
Eric M. Gullikson ◽  
Ulrich Kreissig ◽  
...  
Keyword(s):  
Normal Incidence ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Water Window

Improving the soft X-ray reflectivity of Cr/Ti multilayers by co-deposition of B4C

2020 ◽  
Vol 27 (6) ◽  
pp. 1614-1617
Author(s):  
Jingtao Zhu ◽  
Jiayi Zhang ◽  
Haochuan Li ◽  
Yuchun Tu ◽  
Jinwen Chen ◽  
...  
Keyword(s):  
Photoelectron Spectroscopy ◽  
Normal Incidence ◽  
X Rays ◽  
Interface Quality ◽  
X Ray ◽  
Water Window ◽  
Section Electron ◽  
Biology Research ◽  
Section Electron Microscopy

The `water window', covering 2.4–4.4 nm, is an important wavelength range particularly essential to biology research. Cr/Ti multilayers are one of the promising reflecting elements in this region because the near-normal-incidence reflectivity is theoretically as high as 64% at 2.73 nm. However, due to multilayer imperfections, the reported reflectivity is lower than 3% for near-normal incidence. Here, B and C were intentionally incorporated into ultra-thin Cr/Ti soft X-ray multilayers by co-deposition of B4C at the interfaces. The effect on the multilayer structure and composition has been investigated using X-ray reflectometry, X-ray photoelectron spectroscopy, and cross-section electron microscopy. It is shown that B and C are mainly bonded to Ti sites, forming a nonstoichiometric TiB x C y composition, which hinders the interface diffusion, supresses the crystallization of the Cr/Ti multilayer and dramatically improves the interface quality of Cr/TiB x C y multilayers. As a result, the near-normal-incidence reflectivity of soft X-rays increases from 4.48% to 15.75% at a wavelength of 2.73 nm.

scholarly journals Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements

2016 ◽  
Vol 49 (6) ◽  
pp. 2161-2171 ◽  
Author(s):  
Anton Haase ◽  
Saša Bajt ◽  
Philipp Hönicke ◽  
Victor Soltwisch ◽  
Frank Scholze
Keyword(s):  
Analytical Techniques ◽  
Normal Incidence ◽  
Interface Roughness ◽  
Particle Swarm Optimizer ◽  
Individual Layer ◽  
Multilayer Systems ◽  
X Ray ◽  
Water Window ◽  
Fluorescence Measurements

Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of these multilayer systems with 400 bilayers of Cr and Sc, each with individual layer thicknesses <1 nm, is attainable by the combination of several analytical techniques. EUV and X-ray reflectance measurements, resonant EUV reflectance across the ScLedge, and X-ray standing wave fluorescence measurements were used. The parameters of the multilayer model were determinedviaa particle-swarm optimizer and validated using a Markov chain Monte Carlo maximum-likelihood approach. For the determination of the interface roughness, diffuse scattering measurements were conducted.

Multilayer optics for XUV spectral region: technology fabrication and applications

Open Physics ◽  
2003 ◽  
Vol 1 (1) ◽  
Author(s):  
S. Andreev ◽  
A. Akhsakhalyan ◽  
M. Bibishkin ◽  
N. Chkhalo ◽  
S. Gaponov ◽  
...  
Keyword(s):  
Spectral Region ◽  
Ultra Violet ◽  
Normal Incidence ◽  
Temperature Plasma ◽  
Optical Elements ◽  
X Ray ◽  
Water Window ◽  
Scientific Instrumentation ◽  
Euv Lithography ◽  
Short Period

AbstractWe present research investigations in the field of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scientific instrumentation. We discuss normal incidence multilayer optics in the spectral region of “water window”, multilayer optics for collimation and focusing of hard X-ray, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography (ψ-13nm) and short period multilayer optics.

X-ray Gabor holography

1995 ◽  
Vol 53 ◽  
pp. 612-613
Author(s):  
Steve Lindaas ◽  
Chris Jacobsen ◽  
Alex Kalinovsky ◽  
Malcolm Howells
Keyword(s):  
Surface Relief ◽  
Biological Imaging ◽  
Specimen Preparation ◽  
X Rays ◽  
X Ray ◽  
Water Window ◽  
Biological Objects ◽  
Transmission Imaging ◽  
Atomic Force ◽  
Electron Microscopes

Soft x-ray microscopy offers an approach to transmission imaging of wet, micron-thick biological objects at a resolution superior to that of optical microscopes and with less specimen preparation/manipulation than electron microscopes. Gabor holography has unique characteristics which make it particularly well suited for certain investigations: it requires no prefocussing, it is compatible with flash x-ray sources, and it is able to use the whole footprint of multimode sources. Our method serves to refine this technique in anticipation of the development of suitable flash sources (such as x-ray lasers) and to develop cryo capabilities with which to reduce specimen damage. Our primary emphasis has been on biological imaging so we use x-rays in the water window (between the Oxygen-K and Carbon-K absorption edges) with which we record holograms in vacuum or in air.The hologram is recorded on a high resolution recording medium; our work employs the photoresist poly(methylmethacrylate) (PMMA). Following resist “development” (solvent etching), a surface relief pattern is produced which an atomic force microscope is aptly suited to image.

SOFT X-RAY IMAGES OF THE SOLAR CORONA USING NORMAL INCIDENCE OPTICS

1988 ◽  
Vol 49 (C1) ◽  
pp. C1-115-C1-118 ◽  
Author(s):  
M. E. BRUNER ◽  
B. M. HAISCH ◽  
W. A. BROWN ◽  
L. W. ACTON ◽  
J. H. UNDERWOOD
Keyword(s):  
Solar Corona ◽  
Normal Incidence ◽  
X Ray

Anin situatomic force microscope for normal-incidence nanofocus X-ray experiments

2016 ◽  
Vol 23 (5) ◽  
pp. 1110-1117 ◽  
Author(s):  
M. V. Vitorino ◽  
Y. Fuchs ◽  
T. Dane ◽  
M. S. Rodrigues ◽  
M. Rosenthal ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Force Microscope ◽  
High Speed ◽  
Normal Incidence ◽  
Organic Thin Film ◽  
X Ray ◽  
Atomic Force ◽  
Synchrotron Beamlines

A compact high-speed X-ray atomic force microscope has been developed forin situuse in normal-incidence X-ray experiments on synchrotron beamlines, allowing for simultaneous characterization of samples in direct space with nanometric lateral resolution while employing nanofocused X-ray beams. In the present work the instrument is used to observe radiation damage effects produced by an intense X-ray nanobeam on a semiconducting organic thin film. The formation of micrometric holes induced by the beam occurring on a timescale of seconds is characterized.

The structure of the surface phase: a new normal-incidence X-ray standing wave study

2000 ◽  
Vol 453 (1-3) ◽  
pp. 183-190 ◽  
Author(s):  
G.J. Jackson ◽  
S.M. Driver ◽  
D.P. Woodruff ◽  
B.C.C. Cowie ◽  
R.G. Jones
Keyword(s):  
Standing Wave ◽  
Normal Incidence ◽  
Surface Phase ◽  
New Normal ◽  
X Ray
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