Semiconductor Electronics. Characterization of Semiconductor Materials at Sub-Micron Scale Using Scanning Capacitance Microscopy.
2002 ◽
Vol 51
(9)
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pp. 995-998
Keyword(s):
2011 ◽
Vol 26
(6)
◽
pp. 060301
◽
Keyword(s):
2011 ◽
pp. 287-307
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