Excimer laser photolysis of trimethylaluminum for film growth.
1990 ◽
Vol 18
(9)
◽
pp. 712-723
◽
1991 ◽
Vol 51
(3-4)
◽
pp. 171-176
◽
1984 ◽
Vol 88
(11)
◽
pp. 2201-2204
◽
Keyword(s):
1991 ◽
Vol 87
(2)
◽
pp. 191-202
◽
1979 ◽
Vol 61
(3)
◽
pp. 509-512
◽
Keyword(s):
1983 ◽
Vol 78
(8)
◽
pp. 4875-4886
◽
Keyword(s):