scholarly journals Dipole Wakefield Suppression In High Phase Advance Detuned Linear Accelerators for the JLC/NLC Designed to Minimise Electrical Breakdown and Cumulative BBU

2001 ◽  
Author(s):  
Roger M Jones
Keyword(s):  
Electrical Breakdown ◽  
Phase Advance ◽  
Linear Accelerators ◽  
High Phase

Scanning Electron Microscope Induced Electrical Breakdown of Tungsten Windows in Integrated Circuit Processing

2004 ◽  
Author(s):  
David M. Shuttleworth ◽  
Mary Drummond Roby
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Contact Resistance ◽  
Integrated Circuit ◽  
Electrical Breakdown ◽  
Scanning Electron ◽  
Integrated Circuit Processing

Abstract Interaction of inline SEM inspections with tungsten window-1 integrity were investigated. Multiple SEMs were utilized and various points in the processing were inspected. It was found that in certain circumstances inline SEM inspection induced increased window-1 contact resistance in both source/drain and gate contacts, up to and including electrical opens for the source/drain contacts.

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