scholarly journals Dipole wakefield suppression in high phase advance detuned linear accelerators for the JLC/NLC designed to minimise electrical breakdown and cumulative BBU

2002 ◽  
Author(s):  
R.M. Jones ◽  
N.M. Kroll ◽  
T. Higo ◽  
Z. Li ◽  
R.H. Miller ◽  
...  
Keyword(s):  
Electrical Breakdown ◽  
Phase Advance ◽  
Linear Accelerators ◽  
High Phase

Scanning Electron Microscope Induced Electrical Breakdown of Tungsten Windows in Integrated Circuit Processing

2004 ◽  
Author(s):  
David M. Shuttleworth ◽  
Mary Drummond Roby
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Contact Resistance ◽  
Integrated Circuit ◽  
Electrical Breakdown ◽  
Scanning Electron ◽  
Integrated Circuit Processing

Abstract Interaction of inline SEM inspections with tungsten window-1 integrity were investigated. Multiple SEMs were utilized and various points in the processing were inspected. It was found that in certain circumstances inline SEM inspection induced increased window-1 contact resistance in both source/drain and gate contacts, up to and including electrical opens for the source/drain contacts.

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