scholarly journals Optimization of X-ray sources from a high-average-power ND:Glass laser-produced plasma for proximity lithography

1996 ◽  
Author(s):  
P Celliers ◽  
L B Da Silva ◽  
C B Dane
Keyword(s):  
Average Power ◽  
High Average Power ◽  
X Ray ◽  
Laser Produced Plasma ◽  
Nd:Glass Laser

High average power, highly brilliant laser-produced plasma source for soft X-ray spectroscopy

2015 ◽  
Vol 86 (3) ◽  
pp. 035116 ◽  
Author(s):  
Ioanna Mantouvalou ◽  
Katharina Witte ◽  
Daniel Grötzsch ◽  
Michael Neitzel ◽  
Sabrina Günther ◽  
...  
Keyword(s):  
Average Power ◽  
Plasma Source ◽  
High Average Power ◽  
X Ray ◽  
Laser Produced Plasma

scholarly journals Optimization of x‐ray sources for proximity lithography produced by a high average power Nd:glass laser

1996 ◽  
Vol 79 (11) ◽  
pp. 8258-8268 ◽  
Author(s):  
P. Celliers ◽  
L. B. Da Silva ◽  
C. B. Dane ◽  
S. Mrowka ◽  
M. Norton ◽  
...  
Keyword(s):  
Average Power ◽  
High Average Power ◽  
X Ray ◽  
Nd:Glass Laser

Compact high-average-power laser-plasma x-ray source by cryogenic target

2001 ◽  
Author(s):  
Takayasu Mochizuki ◽  
Atsushi Shimoura ◽  
Sho Amano ◽  
Shuji Miyamoto
Keyword(s):  
Laser Plasma ◽  
Average Power ◽  
High Average Power ◽  
Power Laser ◽  
X Ray ◽  
Cryogenic Target

PHASE CONJUGATED LASERS APPLIED TO X-RAY GENERATION

1994 ◽  
Vol 03 (02) ◽  
pp. 137-167 ◽  
Author(s):  
L.A. HACKEL ◽  
C.B. DANE ◽  
L.E. ZAPATA ◽  
M.R. HERMANN
Keyword(s):  
Pulse Repetition Frequency ◽  
Average Power ◽  
Experimental Investigations ◽  
High Average Power ◽  
X Ray ◽  
Projection Lithography ◽  
Laser Driver ◽  
Laser Systems ◽  
Frequency Laser ◽  
Ray Projection

Three laser systems that are being developed for use in X-ray generation which incorporate SBS phase conjugate mirrors are described. A 25 J/pulse Nd:glass laser is being developed for commercial proximity print X-ray lithography; a 0.5 J/pulse, 1.3 kHz pulse repetition frequency laser is being built for soft X-ray projection lithography; and a 1 kJ/pulse laser driver for a table top X-ray laser has been designed. The results of prototypical experimental investigations are presented and the basic design principles for high average power phase conjugated laser systems shared by each of these lasers are discussed.

Bright High Average Power Table-top Soft X-Ray Lasers

2012 ◽  
Author(s):  
J. J. Rocca ◽  
B. Reagan ◽  
K. Wernsing ◽  
B. M. Luther ◽  
A. Curtis ◽  
...  
Keyword(s):  
Average Power ◽  
High Average Power ◽  
X Ray

High-average power XeCl laser with x-ray preionization and spiker-sustainer excitation

1994 ◽  
Author(s):  
Frederik A. van Goor ◽  
Wilhelmus J. Witteman ◽  
John C. Timmermans ◽  
J. van Spijker ◽  
Jacob Couperus
Keyword(s):  
Average Power ◽  
Xecl Laser ◽  
High Average Power ◽  
X Ray
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