Fabrication of a Micro-Electromechanical System-Based Acetone Gas Sensor Using CeO2 Nanodot-Decorated WO3 Nanowires

2020 ◽  
Vol 12 (12) ◽  
pp. 14095-14104 ◽  
Author(s):  
Kaiping Yuan ◽  
Cheng-Yu Wang ◽  
Li-Yuan Zhu ◽  
Qi Cao ◽  
Jia-He Yang ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Electromechanical System ◽  
Micro Electromechanical System

A Micro-Electromechanical System Based Hydrogen Gas Sensor

2008 ◽  
Vol 6 (6) ◽  
pp. 1014-1018 ◽  
Author(s):  
E. B. Lee ◽  
C. H. Yeo ◽  
K. Shin ◽  
K. J. Lee ◽  
H. J. Lee ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Hydrogen Gas ◽  
Electromechanical System ◽  
Micro Electromechanical System

A fractal micro-electromechanical system and its pull-in stability

2021 ◽  
pp. 146134842098404
Author(s):  
Dan Tian ◽  
Chun-Hui He
Keyword(s):  
Fractal Model ◽  
Electromechanical System ◽  
Normal Operation ◽  
Fractal Derivative ◽  
Operation Period ◽  
Micro Electromechanical System

Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.

A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise

2019 ◽  
Vol 29 (11) ◽  
pp. 115007
Author(s):  
Jinlong Song ◽  
Renxin Wang ◽  
Guojun Zhang ◽  
Zhenzhen Shang ◽  
Lansheng Zhang ◽  
...  
Keyword(s):  
Electromechanical System ◽  
Vector Hydrophone ◽  
Micro Electromechanical System ◽  
Vibration Noise

Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor

2009 ◽  
Vol 1 (1) ◽  
Author(s):  
Sree Vidhya ◽  
Gideon Praveen Kumar ◽  
Lazar Mathew
Keyword(s):  
System Design ◽  
Dna Hybridization ◽  
Electromechanical System ◽  
Antigen Binding ◽  
Cardiac Marker ◽  
Important Principle ◽  
Micro Electromechanical System ◽  
Geometric Variation ◽  
Proportional Decrease ◽  
Simulation Package

Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation in the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a “T-shaped” cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using INTELLISUITE software (a micro-electromechanical system design and simulation package). The simulations reveal that the T-shaped microcantilever is almost as sensitive as a thin cantilever and has relatively very low buckling effect. Simulations also reveal that with an increase in thickness of the cantilever, there is a proportional decrease in the sensitivity.

Measurement of Solvent Vapor Absorption by Polydimethylsiloxane Using Quartz Crystal Microbalance

2008 ◽  
Author(s):  
W. W. F. Leung ◽  
C. Chao ◽  
C. H. Cheng ◽  
K. F. Lei ◽  
D. Ngan ◽  
...  
Keyword(s):  
Frequency Shift ◽  
Gas Sensor ◽  
Quartz Crystal Microbalance ◽  
Quartz Crystal ◽  
Specific Area ◽  
Small Mass ◽  
Crystal Oscillator ◽  
Solvent Vapor ◽  
Adsorbed Gas ◽  
Micro Electromechanical System

A new micro-electromechanical system (MEMS) gas sensor has been developed using quartz crystal microbalance (QCM) with adsorbent coated in form of nanofibers on the QCM sensor. The nanofibers with fiber diameter typically around 200–300 nm increases the specific surface area to enhance adsorption. The QCM is made to oscillate at its natural resonance frequency. Upon exposure of the gas sensor to a given gas, the adsorbed gas onto the nanofibers adds a small mass which changes the natural frequency of the oscillation. By detecting the frequency shift due to adsorption of a given gas, the presence of the gas is detected, and by measuring the frequency shift, the amount of gas being adsorbed at a given pressure and temperature is quantified via the Sauerbrey equation [1]. A circuit has been developed to read the frequency shift due to the energy dissipation in the QCM coated with Polydimethylsiloxane (PDMS) nanofibers under the environment of several solvent vapors. The developed circuit includes two crystal oscillator circuits, two QCM’s which are respectively 1MHz reference QCM and a coated QCM, RC filter and AND gates. The results of the frequency shift between the reference QCM and the coated QCM were recorded on the oscilloscope so as to investigate the relationships between the frequency shift and the amount of vapor adsorbed for different gases. Ultimately, Volatile Organic Compounds (VOCs) are the target to be monitored and a MEMS based sensor will be developed similar to the present QCM gas sensor discussed herein. This work provides the feasibility study for using nanofiber coating to enhance the adsorbent specific area and a stand-alone QCM sensor for making measurement.

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