Robust, Reliable, Radio Frequency (RF) Microelectromechanical Systems (MEMS) Capacitive Switches

2005 ◽  
Author(s):  
Charles L. Goldsmith
Author(s):  
O. Burak Ozdoganlar ◽  
David S. Epp ◽  
Christopher W. Dyck

Ohmic and capacitive switches constitute an important segment of radio frequency microelectromechanical systems (RF-MEMS) components. The main function of these switches is to provide very rapid opening and closing of electrical contacts. To fulfill this requirement, the structural dynamics and coupled-physics response of candidate switch designs must be thoroughly understood. This paper presents a set of dynamic experimentation of two RF-MEMS ohmic switches with different geometries to determine their natural frequencies, mode shapes, and damping characteristics at pressures spanning from vacuum to atmospheric. The experimental facility used for the tests is also described in detail.


2020 ◽  
Vol 31 (2) ◽  
pp. 025003
Author(s):  
Wenli Liu ◽  
Zeji Chen ◽  
Xiao Kan ◽  
Tianyun Wang ◽  
Qianqian Jia ◽  
...  

Sensors ◽  
2020 ◽  
Vol 20 (8) ◽  
pp. 2271 ◽  
Author(s):  
Markel Rico-González ◽  
Asier Los Arcos ◽  
Daniel Rojas-Valverde ◽  
Filipe M. Clemente ◽  
José Pino-Ortega

Electronic performance and tracking systems (EPTS) and microelectromechanical systems (MEMS) allow the measurement of training load (TL) and collective behavior in team sports so that match performance can be optimized. Despite the frequent use of radio-frequency (RF) technology (i.e., global positioning navigation systems (GNSS/global positioning systems (GPS)) and, local position systems (LPS)) and MEMS in sports research, there is no protocol that must be followed, nor are there any set guidelines for evaluating the quality of the data collection process in studies. Thus, this study aims to suggest a survey based on previously used protocols to evaluate the quality of data recorded by RF technology and MEMS in team sports. A quality check sheet was proposed considering 13 general criteria items. Four additional items for GNSS/GPS, eight additional items for LPS, and five items for MEMS were suggested. This information for evaluating the quality of the data collection process should be reported in the methods sections of future studies.


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