Fabrication challenges for next-generation devices: Microelectromechanical systems for radio-frequency wireless communications

2003 ◽  
Vol 2 (3) ◽  
pp. 169 ◽  
Author(s):  
David Seeger
2002 ◽  
Vol 40 (3) ◽  
pp. 108-116 ◽  
Author(s):  
R. Berezdivin ◽  
R. Breinig ◽  
R. Topp

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