An In-Situ Spectroscopic Ellipsometry Study of the Electron Cyclotron Resonance Plasma Oxidation of Silicon and Interfacial

Mapping Intimacies ◽

10.21236/ada242833 ◽

1991 ◽

Author(s):

Y. Z. Hu ◽

J. Joseph ◽

E. A. Irene

Keyword(s):

Spectroscopic Ellipsometry ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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In situ investigation of the passivation of Si and Ge by electron cyclotron resonance plasma enhanced chemical vapor deposition of SiO2

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589211 ◽

1996 ◽

Vol 14 (3) ◽

pp. 1687 ◽

Cited By ~ 9

Author(s):

Y. Wang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

In Situ Investigation ◽

Resonance Plasma

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Induction of octacalcium phosphate by surface modification of TiO2 film prepared by electron cyclotron resonance plasma oxidation

Interface Oral Health Science 2007 ◽

10.1007/978-4-431-76690-2_69 ◽

2008 ◽

pp. 317-321

Author(s):

Yusuke Orii ◽

Hiroshi Masumoto ◽

Takashi Goto ◽

Yoshitomo Honda ◽

Takahisa Anada ◽

...

Keyword(s):

Surface Modification ◽

Tio2 Film ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Octacalcium Phosphate ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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New in situ electron beam patterning process for GaAs using an electron-cyclotron-resonance plasma-oxidized mask and Cl2 gas etching

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586032 ◽

1992 ◽

Vol 10 (6) ◽

pp. 2711 ◽

Cited By ~ 2

Author(s):

N. Takado

Keyword(s):

Electron Beam ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Electron Beam Patterning ◽

Resonance Plasma

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A kinetics study of the electron cyclotron resonance plasma oxidation of silicon

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586421 ◽

1992 ◽

Vol 10 (2) ◽

pp. 611 ◽

Cited By ~ 44

Author(s):

J. Joseph

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Kinetics Study ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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$\bf TiO_{2}$ Thin Films Formed by Electron Cyclotron Resonance Plasma Oxidation at High Temperature and Their Application to Capacitor Dielectrics

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.l1248 ◽

1994 ◽

Vol 33 (Part 2, No. 9A) ◽

pp. L1248-L1250 ◽

Cited By ~ 18

Author(s):

Yoshio Abe ◽

Takuya Fukuda

Keyword(s):

Thin Films ◽

High Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Applications of in situ ellipsometry to microwave electron cyclotron resonance plasma processes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578426 ◽

1993 ◽

Vol 11 (4) ◽

pp. 1786-1791 ◽

Cited By ~ 14

Author(s):

Y. Z. Hu ◽

J. Joseph ◽

E. A. Irene

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Laser reflectometry applied to the in-situ etching control in an electron cyclotron resonance plasma system

1999 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference ◽

10.1109/imoc.1999.866256 ◽

2003 ◽

Author(s):

S.N.M. Mestanza ◽

J.A. Diniz ◽

N.C. Frateschi

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma System ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma ◽

Laser Reflectometry

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Electron cyclotron resonance plasma oxidation studies of InP

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587035 ◽

1994 ◽

Vol 12 (2) ◽

pp. 540 ◽

Cited By ~ 4

Author(s):

Y. Z. Hu

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electrical Properties of Germanium Oxynitride and Its Interface with Germanium Prepared by Electron-Cyclotron-Resonance Plasma Oxidation and Nitridation

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.7351 ◽

2006 ◽

Vol 45 (9B) ◽

pp. 7351-7353 ◽

Cited By ~ 9

Author(s):

Yukio Fukuda ◽

Koji Kato ◽

Hiroshi Toyota ◽

Toshiro Ono ◽

Yoshitaka Nagasato ◽

...

Keyword(s):

Electrical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Plasma Oxidation ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Electron cyclotron resonance plasma ion beam effects on the formation of SiC on Si(001) characterized by in-situ photoemission

Thin Solid Films ◽

10.1016/0040-6090(94)90447-2 ◽

1994 ◽

Vol 241 (1-2) ◽

pp. 305-309 ◽

Cited By ~ 1

Author(s):

M. Diani ◽

D. Aubel ◽

J.L. Bischoff ◽

L. Kubler ◽

D. Bolmont

Keyword(s):

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ion Beam ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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