Laser Deposition of Cubic Boron Nitride on Electronic Materials

1991 ◽  
Author(s):  
Arul Molian ◽  
Madhav Rao ◽  
P. Molian
Keyword(s):  
Boron Nitride ◽  
Electronic Materials ◽  
Cubic Boron Nitride ◽  
Laser Deposition

Ion‐assisted pulsed laser deposition of cubic boron nitride films

1994 ◽  
Vol 76 (5) ◽  
pp. 3088-3101 ◽  
Author(s):  
T. A. Friedmann ◽  
P. B. Mirkarimi ◽  
D. L. Medlin ◽  
K. F. McCarty ◽  
E. J. Klaus ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Pulsed Laser Deposition ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Boron Nitride Films

Electron Microscopy Study of Cubic Boron Nitride Thin Films Grown by Ion -Assisted Pulsed Laser Deposition

1993 ◽  
Vol 311 ◽  
Author(s):  
D.D. Medlin ◽  
T.T. Friedmann ◽  
P.P. Mirkarimi ◽  
K.K. Mccarty ◽  
M.M. Mills
Keyword(s):  
Boron Nitride ◽  
Pulsed Laser Deposition ◽  
Ion Beam ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Microscopy Study ◽  
Electron Microscopy Study ◽  
Laser Deposition ◽  
Electron Microscopic ◽  
High Fraction

ABSTRACTWe present a microstructural study of boron nitride films grown by ion-assisted pulsed laser deposition. Fourier transform infra-red spectroscopy, electron energy loss spectroscopy, and electron diffraction measurements indicate that within the irradiated region of the substrate, the film consists of high fraction of cBN with a small amount of the turbostratic phase; outside of the irradiated region, only the turbostratic phase is detected. Conventional and high resolution electron microscopic observations of the boron nitride microstructure indicate that the cBN is in the form of twinned crystallites, up to 30 nm in diameter. We also observe particulates, formed by the laser pulse, that reduce the yield of cBN in the irradiated regions by shadowing local areas from the ion beam.

Microstructure of cubic boron nitride thin films grown by ion‐assisted pulsed laser deposition

1994 ◽  
Vol 76 (1) ◽  
pp. 295-303 ◽  
Author(s):  
D. L. Medlin ◽  
T. A. Friedmann ◽  
P. B. Mirkarimi ◽  
P. Rez ◽  
M. J. Mills ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Pulsed Laser Deposition ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Laser Deposition

Growth of cubic boron nitride thin films by a field-ionization source-assisted pulsed laser deposition

1995 ◽  
Vol 266 (2) ◽  
pp. 173-175 ◽  
Author(s):  
Huoping Xin ◽  
Yiqing Chen ◽  
Xiaohong Shi ◽  
Huaping Xu ◽  
Chenglu Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Pulsed Laser Deposition ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Field Ionization ◽  
Ionization Source

Effects of Ion Beam Energy on the Formation of Cubic Boron Nitride Thin Films by Pulsed Nd:YAG Laser Deposition

2000 ◽  
Vol 39 (Part 1, No. 7B) ◽  
pp. 4525-4527 ◽  
Author(s):  
Hiroharu Kawasaki ◽  
Kazuya Doi ◽  
Satoshi Hiraishi ◽  
Yoshiaki Suda
Keyword(s):  
Thin Films ◽  
Boron Nitride ◽  
Nd:Yag Laser ◽  
Beam Energy ◽  
Ion Beam ◽  
Cubic Boron Nitride ◽  
Laser Deposition ◽  
Pulsed Nd:Yag Laser

Cubic boron nitride formation on Si (100) substrates at room temperature by pulsed laser deposition

1992 ◽  
Vol 61 (20) ◽  
pp. 2406-2408 ◽  
Author(s):  
T. A. Friedmann ◽  
K. F. McCarty ◽  
E. J. Klaus ◽  
D. Boehme ◽  
W. M. Clift ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Cubic Boron Nitride ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Nitride Formation
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