59.3: Bridged-grain (BG) Eximer Laser Annealing (ELA) Polycrystalline Silicon Thin Film Transistors (TFTs)

Shuyun Zhao; Zhiguo Meng; Wei Zhou; Man Wong; Hoi Sing Kwok

doi:10.1889/1.3621473

59.3: Bridged-grain (BG) Eximer Laser Annealing (ELA) Polycrystalline Silicon Thin Film Transistors (TFTs)

SID Symposium Digest of Technical Papers ◽

10.1889/1.3621473 ◽

2011 ◽

Vol 42 (1) ◽

pp. 870-873 ◽

Cited By ~ 1

Author(s):

Shuyun Zhao ◽

Zhiguo Meng ◽

Wei Zhou ◽

Man Wong ◽

Hoi Sing Kwok

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Eximer Laser

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Impact of AC Stress in Low Temperature Polycrystalline Silicon Thin Film Transistors Produced with Different Excimer Laser Annealing Energies

IEEE Electron Device Letters ◽

10.1109/led.2021.3073200 ◽

2021 ◽

pp. 1-1

Author(s):

Yu-Zhe Zheng ◽

Chia-Chuan Wu ◽

Po-Hsun Chen ◽

Ting-Chang Chang ◽

Kuan-Ju Zhou ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing

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Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors

Journal of Applied Physics ◽

10.1063/1.371409 ◽

1999 ◽

Vol 86 (8) ◽

pp. 4600-4606 ◽

Cited By ~ 70

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

M. Miyasaka ◽

F. V. Farmakis ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Structural And Electrical Properties

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Erratum: “Effect of excimer laser annealing on the structural and electrical properties of polycrystalline silicon thin-film transistors” [J. Appl. Phys. 86, 4600 (1999)]

Journal of Applied Physics ◽

10.1063/1.372060 ◽

2000 ◽

Vol 87 (3) ◽

pp. 1588-1588 ◽

Cited By ~ 2

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

M. Miyasaka ◽

F. V. Farmakis ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

Structural And Electrical Properties

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Polycrystalline Silicon Thin Film Transistors Fabricated by Employing Selective Self Ion-Implantation and Excimer Laser Annealing

Journal of the Korean Physical Society ◽

10.3938/jkps.37.870 ◽

2000 ◽

Vol 37 (6) ◽

pp. 870 ◽

Cited By ~ 1

Author(s):

Lee Min-Cheol ◽

Jeon Jae-Hong ◽

Jung Sang-Hoon ◽

Han Min-Koo

Keyword(s):

Thin Film ◽

Ion Implantation ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing

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Forming of SiO2 film by spin-on glass and CO2 laser annealing for gate insulator of polycrystalline silicon thin film transistors

2013 IEEE International Meeting for Future of Electron Devices, Kansai ◽

10.1109/imfedk.2013.6602271 ◽

2013 ◽

Author(s):

Daisuke Hishitani ◽

Masahiro Horita ◽

Yasuaki Ishikawa ◽

Hiroshi Ikenoue ◽

Yosuke Watanabe ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Gate Insulator ◽

Silicon Thin Film

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High-Performance Polycrystalline Silicon Thin-Film Transistors Fabricated by High-Temperature Process with Excimer Laser Annealing

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.3293 ◽

2004 ◽

Vol 43 (6A) ◽

pp. 3293-3296 ◽

Cited By ~ 16

Author(s):

Hiroaki Jiroku ◽

Mitsutoshi Miyasaka ◽

Satoshi Inoue ◽

Yoshifumi Tsunekawa ◽

Tatsuya Shimoda

Keyword(s):

Thin Film ◽

High Temperature ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Laser Annealing ◽

Silicon Thin Film ◽

Excimer Laser Annealing ◽

High Temperature Process

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Threshold voltage of excimer-laser-annealed polycrystalline silicon thin-film transistors

Applied Physics Letters ◽

10.1063/1.126370 ◽

2000 ◽

Vol 76 (17) ◽

pp. 2442-2444 ◽

Cited By ~ 15

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

F. V. Farmakis ◽

J. Brini ◽

G. Kamarinos ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Threshold Voltage ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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Driving Method Compensating for the Hysteresis of Polycrystalline Silicon Thin-Film Transistors for Active-Matrix Organic Light-Emitting Diode Displays

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.052402 ◽

2009 ◽

Vol 48 (5) ◽

pp. 052402 ◽

Cited By ~ 4

Author(s):

Myoung-Hoon Jung ◽

Ohyun Kim ◽

Byeong-Koo Kim ◽

Hoon-Ju Chung

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Light Emitting Diode ◽

Silicon Thin Film ◽

Active Matrix ◽

Light Emitting ◽

Organic Light Emitting Diode ◽

Organic Light

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Dynamic-Gate-Stress-Induced Degradation in Bridged-Grain Polycrystalline Silicon Thin-Film Transistors

IEEE Transactions on Electron Devices ◽

10.1109/ted.2016.2601218 ◽

2016 ◽

Vol 63 (10) ◽

pp. 3964-3970 ◽

Cited By ~ 4

Author(s):

Meng Zhang ◽

Zhihe Xia ◽

Wei Zhou ◽

Rongsheng Chen ◽

Man Wong ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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Two‐step annealed polycrystalline silicon thin‐film transistors

Journal of Applied Physics ◽

10.1063/1.363002 ◽

1996 ◽

Vol 80 (3) ◽

pp. 1883-1890 ◽

Cited By ~ 15

Author(s):

Kwon‐Young Choi ◽

Min‐Koo Han

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Thin Film

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