P-5: Self-Release Nickel Induced Lateral Crystallized (SR-NILC) Low Temperature Polycrystalline Silicon Films and Thin Film Transistors

Shuyun Zhao; Zhaojun Liu; Zhou Wei; Zhiguo Meng; Man Wong; Hoi Sing Kwok

doi:10.1889/1.3256475

P-5: Self-Release Nickel Induced Lateral Crystallized (SR-NILC) Low Temperature Polycrystalline Silicon Films and Thin Film Transistors

SID Symposium Digest of Technical Papers ◽

10.1889/1.3256475 ◽

2009 ◽

Vol 40 (1) ◽

pp. 1096 ◽

Cited By ~ 2

Author(s):

Shuyun Zhao ◽

Zhaojun Liu ◽

Zhou Wei ◽

Zhiguo Meng ◽

Man Wong ◽

...

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Polycrystalline Silicon Films

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High‐performance thin‐film transistors from optimized polycrystalline silicon films

Applied Physics Letters ◽

10.1063/1.97678 ◽

1987 ◽

Vol 50 (26) ◽

pp. 1894-1896 ◽

Cited By ~ 46

Author(s):

D. B. Meakin ◽

P. A. Coxon ◽

P. Migliorato ◽

J. Stoemenos ◽

N. A. Economou

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Silicon Films ◽

Polycrystalline Silicon Films

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Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.l19 ◽

2000 ◽

Vol 39 (Part 2, No. 1A/B) ◽

pp. L19-L21 ◽

Cited By ~ 14

Author(s):

Huang-Chung Cheng ◽

Chun-Yao Huang ◽

Fang-Shing Wang ◽

Kuen-Hsien Lin ◽

Fu-Gow Tarntair

Keyword(s):

Thin Film ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Polycrystalline Silicon Films

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Effects of inductively coupled plasma oxidation on the properties of polycrystalline silicon films and thin film transistors

Applied Physics Letters ◽

10.1063/1.123939 ◽

1999 ◽

Vol 74 (18) ◽

pp. 2693-2695 ◽

Cited By ~ 15

Author(s):

Yong Woo Choi ◽

Sang Won Park ◽

Byung Tae Ahn

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Inductively Coupled Plasma ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Plasma Oxidation ◽

Inductively Coupled ◽

Polycrystalline Silicon Films

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Very low temperature polycrystalline silicon films with very large grains deposited for thin film transistor applications

Applied Surface Science ◽

10.1016/0169-4332(95)00210-3 ◽

1996 ◽

Vol 92 ◽

pp. 99-105 ◽

Cited By ~ 4

Author(s):

K.C. Wang ◽

T.R. Yew ◽

H.L. Hwang

Keyword(s):

Thin Film ◽

Low Temperature ◽

Polycrystalline Silicon ◽

Thin Film Transistor ◽

Silicon Films ◽

Polycrystalline Silicon Films ◽

Very Low Temperature

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Solution-based metal induced crystallized polycrystalline silicon films and thin-film transistors

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-007-9157-0 ◽

2007 ◽

Vol 18 (S1) ◽

pp. 117-121 ◽

Cited By ~ 3

Author(s):

Shuyun Zhao ◽

Zhiguo Meng ◽

Chunya Wu ◽

Shaozhen Xiong ◽

Man Wong ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Polycrystalline Silicon Films

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Electrical and noise properties of thin-film transistors on very thin excimer laser annealed polycrystalline silicon films

CAS '99 Proceedings. 1999 International Semiconductor Conference (Cat. No.99TH8389) ◽

10.1109/smicnd.1999.810456 ◽

2003 ◽

Author(s):

C.A. Dimitriadis ◽

J. Stoemenos ◽

G. Kamarinos

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Polycrystalline Silicon Films

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Thin film transistors and photo diodes fabricated on double-layered polycrystalline silicon films formed by green laser annealing

2011 International Meeting for Future of Electron Devices ◽

10.1109/imfedk.2011.5944837 ◽

2011 ◽

Author(s):

Koji Yamasaki ◽

Emi Machida ◽

Masahiro Horita ◽

Yasuaki Ishikawa ◽

Yukiharu Uraoka

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Laser Annealing ◽

Green Laser ◽

Silicon Films ◽

Polycrystalline Silicon Films

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Electrical and noise properties of thin-film transistors on very thin excimer laser annealed polycrystalline silicon films

Applied Physics Letters ◽

10.1063/1.123221 ◽

1999 ◽

Vol 74 (24) ◽

pp. 3684-3686 ◽

Cited By ~ 4

Author(s):

C. T. Angelis ◽

C. A. Dimitriadis ◽

F. V. Farmakis ◽

G. Kamarinos ◽

J. Brini ◽

...

Keyword(s):

Thin Film ◽

Excimer Laser ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Polycrystalline Silicon Films

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Polycrystalline Silicon Films and Thin-Film Transistors Using Solution-Based Metal-Induced Crystallization

Journal of Display Technology ◽

10.1109/jdt.2006.878769 ◽

2006 ◽

Vol 2 (3) ◽

pp. 265-273 ◽

Cited By ~ 18

Author(s):

Z. Meng ◽

S. Zhao ◽

C. Wu ◽

B. Zhang ◽

M. Wong ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Metal Induced Crystallization ◽

Polycrystalline Silicon Films ◽

Induced Crystallization

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Thin Polycrystalline Silicon Films Annealed at 950°C: Structural and Electrical Properties and Application to Thin Film Transistors

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.51-52.603 ◽

1996 ◽

Vol 51-52 ◽

pp. 603-608 ◽

Cited By ~ 2

Author(s):

A.C. Salaün ◽

B. Fortin ◽

T. Mohammed-Brahim ◽

K. Kis-Sion ◽

L. Haji ◽

...

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Silicon Films ◽

Structural And Electrical Properties ◽

Thin Polycrystalline ◽

Polycrystalline Silicon Films

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