Effects of inductively coupled plasma oxidation on the properties of polycrystalline silicon films and thin film transistors

1999 ◽  
Vol 74 (18) ◽  
pp. 2693-2695 ◽  
Author(s):  
Yong Woo Choi ◽  
Sang Won Park ◽  
Byung Tae Ahn
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Inductively Coupled Plasma ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Plasma Oxidation ◽  
Inductively Coupled ◽  
Polycrystalline Silicon Films

High‐performance thin‐film transistors from optimized polycrystalline silicon films

1987 ◽  
Vol 50 (26) ◽  
pp. 1894-1896 ◽  
Author(s):  
D. B. Meakin ◽  
P. A. Coxon ◽  
P. Migliorato ◽  
J. Stoemenos ◽  
N. A. Economou
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

2000 ◽  
Vol 39 (Part 2, No. 1A/B) ◽  
pp. L19-L21 ◽  
Author(s):  
Huang-Chung Cheng ◽  
Chun-Yao Huang ◽  
Fang-Shing Wang ◽  
Kuen-Hsien Lin ◽  
Fu-Gow Tarntair
Keyword(s):  
Thin Film ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Solution-based metal induced crystallized polycrystalline silicon films and thin-film transistors

2007 ◽  
Vol 18 (S1) ◽  
pp. 117-121 ◽  
Author(s):  
Shuyun Zhao ◽  
Zhiguo Meng ◽  
Chunya Wu ◽  
Shaozhen Xiong ◽  
Man Wong ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Electrical and noise properties of thin-film transistors on very thin excimer laser annealed polycrystalline silicon films

1999 ◽  
Vol 74 (24) ◽  
pp. 3684-3686 ◽  
Author(s):  
C. T. Angelis ◽  
C. A. Dimitriadis ◽  
F. V. Farmakis ◽  
G. Kamarinos ◽  
J. Brini ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films
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