Fabrication Process of Embedded Silicon Microchannel and Nozzle Structure for Liquid-delivering Atomic Force Microscopy Probe
2013 ◽
Vol 13
(5)
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pp. 3550-3553
Keyword(s):
2016 ◽
Vol 169
(1)
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pp. 124-132
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Keyword(s):
2017 ◽
pp. 437-448
2017 ◽
Vol 50
◽
pp. 344-353
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2019 ◽
Vol 12
(3)
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pp. 4031-4040
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