scholarly journals Fabrication and measurements of direct contact type RF MEMS switch

2007 ◽  
Vol 4 (10) ◽  
pp. 319-325 ◽  
Author(s):  
Jae-Hyoung Park
Author(s):  
Brian Jensen ◽  
Zhongde Wang ◽  
Kazuhiro Saitou ◽  
John L. Volakis ◽  
Katsuo Kurabayashi

Improving the power handling capability of direct contact RF MEMS switches requires a knowledge of conditions at the contact. This paper models the temperature rise in a direct contact RF MEMS switch, including the effects of electrical and thermal contact resistance. The maximum temperature in the beam is found to depend strongly on the power dissipation at the contact, with almost no contribution from dissipation due to currents in the rest of the switch. Moreover, the maximum temperature is found to exceed the limit for metal softening for a significant range of values of thermal and electrical contact resistance. Since local contact asperity temperature can be hundreds of degrees higher than the bulk material temperature modeled here, these results underscore the importance of understanding and controlling thermal and electrical contact resistance in the switch.


2009 ◽  
Vol 153 (1) ◽  
pp. 114-119 ◽  
Author(s):  
Jongseok Kim ◽  
Sangwook Kwon ◽  
Heemoon Jeong ◽  
Youngtack Hong ◽  
Sanghun Lee ◽  
...  

2009 ◽  
Vol 18 (1) ◽  
pp. 163-173 ◽  
Author(s):  
Jaehong Park ◽  
E.S. Shim ◽  
Wooyeol Choi ◽  
Youngmin Kim ◽  
Youngwoo Kwon ◽  
...  

2020 ◽  
Vol 12 ◽  
Author(s):  
Pampa Debnath ◽  
Ujjwal Mondal ◽  
Arpan Deyasi

Aim:: Computation of loss factors for one-bit RF MEMS switch over Ku, K and Ka-band for two different insulating substrates. Objective:: Numerical investigation of return loss, insertion loss, isolation loss are computed under both actuated and unactuated states for two different insulating substrates of the 1-bit RF MEMS switch, and corresponding up and down-capacitances are obtained. Methods:: The unique characteristics of a 1-bit RF MEMS switch of providing higher return loss under both actuated and unactuated states and also of isolation loss with negligible insertion loss makes it as a prime candidate for phase shifter application. This is presented in this manuscript with a keen focus on improvement capability by changing transmission line width, and also of overlap area; where dielectric constant of the substrate also plays a vital role. Results:: The present work exhibits very low down-capacitance over the spectrum whereas considerable amount of up-capacitance. Also when overall performance in terms of all loss parameters are considered, switch provides very low insertion loss, good return loss under actuated state and standard isolation loss. Conclusion:: Reduction of transmission line width of about 33% improved the performance of the switch by increasing isolation loss. Isolation loss of -40 dB is obtained at actuated condition in higher microwave spectra for SiO 2 at higher overlap area. Down capacitance of ~ 1dB is obtained which is novel as compared with other published literature. Moreover, a better combination of both return loss, isolation loss and insertion loss are reported in this present work compared with all other published data so far.


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