Modeling and Measurement of the Dynamic Performance of an OHMIC Contact-Type RF MEMS Switch

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300214 ◽

2007 ◽

Cited By ~ 4

Author(s):

Z. J. Guo ◽

N. E. McGruer ◽

G. G. Adams

Keyword(s):

Ohmic Contact ◽

Rf Mems ◽

Dynamic Performance ◽

Rf Mems Switch ◽

Contact Type ◽

Mems Switch

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Modeling, simulation and measurement of the dynamic performance of an ohmic contact, electrostatically actuated RF MEMS switch

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/17/9/019 ◽

2007 ◽

Vol 17 (9) ◽

pp. 1899-1909 ◽

Cited By ~ 60

Author(s):

Z J Guo ◽

N E McGruer ◽

G G Adams

Keyword(s):

Ohmic Contact ◽

Rf Mems ◽

Dynamic Performance ◽

Rf Mems Switch ◽

Electrostatically Actuated ◽

Mems Switch ◽

Modeling Simulation

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An ohmic contact type RF-MEMS switch having Au-Au/CNTs contacts

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems.2017.8017026 ◽

2017 ◽

Cited By ~ 2

Author(s):

Tomoaki Kageyama ◽

Koichi Shinozaki ◽

Lan Zhang ◽

Jian Lu ◽

Hideki Takaki ◽

...

Keyword(s):

Ohmic Contact ◽

Rf Mems ◽

Rf Mems Switch ◽

Contact Type ◽

Mems Switch

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A non-contact type RF MEMS switch to remove stiction problem

2011 3rd International Conference on Electronics Computer Technology ◽

10.1109/icectech.2011.5941845 ◽

2011 ◽

Cited By ~ 1

Author(s):

V. M. PandhariPande ◽

K. KumaraSwamy ◽

I. Vijaya Lakshmi ◽

V. Anurag

Keyword(s):

Rf Mems ◽

Rf Mems Switch ◽

Contact Type ◽

Mems Switch

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Fabrication and measurements of direct contact type RF MEMS switch

IEICE Electronics Express ◽

10.1587/elex.4.319 ◽

2007 ◽

Vol 4 (10) ◽

pp. 319-325 ◽

Cited By ~ 7

Author(s):

Jae-Hyoung Park

Keyword(s):

Direct Contact ◽

Rf Mems ◽

Rf Mems Switch ◽

Contact Type ◽

Mems Switch

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A stiff and flat membrane operated DC contact type RF MEMS switch with low actuation voltage

Sensors and Actuators A Physical ◽

10.1016/j.sna.2009.04.002 ◽

2009 ◽

Vol 153 (1) ◽

pp. 114-119 ◽

Cited By ~ 12

Author(s):

Jongseok Kim ◽

Sangwook Kwon ◽

Heemoon Jeong ◽

Youngtack Hong ◽

Sanghun Lee ◽

...

Keyword(s):

Rf Mems ◽

Actuation Voltage ◽

Rf Mems Switch ◽

Contact Type ◽

Mems Switch ◽

Flat Membrane

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Nonlinearity Modeling of Contact-type RF MEMS Switch Based on Passive Intermodulation Analysis

2019 IEEE MTT-S International Microwave Symposium (IMS) ◽

10.1109/mwsym.2019.8701041 ◽

2019 ◽

Cited By ~ 1

Author(s):

Yulong Zhang ◽

Zhuhao Gong ◽

Zewen Liu

Keyword(s):

Rf Mems ◽

Rf Mems Switch ◽

Contact Type ◽

Mems Switch ◽

Passive Intermodulation

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Design and Optimization of a Shunt RF MEMS Switch with a Hybrid Contact Type

Springer Proceedings in Physics - International Youth Conference on Electronics, Telecommunications and Information Technologies ◽

10.1007/978-3-030-81119-8_30 ◽

2022 ◽

pp. 281-299

Author(s):

Alexey Tkachenko ◽

Igor Lysenko ◽

Mark Denisenko ◽

Olga Ezhova

Keyword(s):

Rf Mems ◽

Rf Mems Switch ◽

Design And Optimization ◽

Contact Type ◽

Mems Switch

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Analyzing the effect of metals on the dynamic performance of RF MEMS Switch

2014 International Conference on Electronics and Communication Systems (ICECS) ◽

10.1109/ecs.2014.6892558 ◽

2014 ◽

Cited By ~ 1

Author(s):

Amey S. Revandkar ◽

Ajitkumar R. Khachane ◽

Gajanan D. Nagare

Keyword(s):

Rf Mems ◽

Dynamic Performance ◽

Rf Mems Switch ◽

Mems Switch

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Design of a 20 GHz Low Loss Ohmic Contact RF MEMS Switch

2007 IEEE/MTT-S International Microwave Symposium ◽

10.1109/mwsym.2007.380448 ◽

2007 ◽

Cited By ~ 11

Author(s):

David A. Goins ◽

Richard D. Nelson ◽

John S. McKillop

Keyword(s):

Ohmic Contact ◽

Rf Mems ◽

Low Loss ◽

Rf Mems Switch ◽

Mems Switch

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Lifetime effects of drive voltage for a commercially-available ohmic-contact RF MEMS switch

2013 IEEE MTT-S International Microwave Symposium Digest (MTT) ◽

10.1109/mwsym.2013.6697645 ◽

2013 ◽

Cited By ~ 1

Author(s):

Adam Fruehling ◽

Wei Yang ◽

Dimitrios Peroulis

Keyword(s):

Ohmic Contact ◽

Rf Mems ◽

Rf Mems Switch ◽

Drive Voltage ◽

Mems Switch ◽

Lifetime Effects

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