Confinement Effects in Nanoscale Anodic Alumina Structures on Silicon

2004 ◽  
Vol 854 ◽  
Author(s):  
Patrick J. Griffin ◽  
Robert W. Carpick ◽  
Donald S. Stone
Keyword(s):  
Electron Beam Lithography ◽  
Anodic Aluminum Oxide ◽  
Nanometer Scale ◽  
Porous Structures ◽  
Confinement Effects ◽  
Anodized Aluminum ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Optical Applications ◽  
Semiconducting Substrate

ABSTRACTAnodic aluminum oxide (AAO) has long been considered a viable material for templated growth of nanomaterials for electronic, magnetic and optical applications due to the ability to form self-organized, high aspect-ratio nanochannels. More recently these porous materials have been incorporated with silicon to create a template for nanostructured materials on a semiconducting substrate. However, there has been no investigation into how pore growth is affected by confining the pre-anodized aluminum dimensions to the nanometer scale. We have used electron beam lithography to pattern 200 nm thick aluminum structures on Si with lateral features ranging from 100 nm to several microns in size. Structures consisting of 1 – 10 individual pores 10 – 15 nm in diameter are routinely fabricated. Confinement effects in the narrowest features assist in pore ordering in the porous structures without the use of pre-patterning or a two step anodization.

Fabrication of Low Cost Anodic Aluminum Oxide (AAO) Tubular Membrane and their Application for Hemodialysis

2012 ◽  
Vol 550-553 ◽  
pp. 2040-2045 ◽  
Author(s):  
Ajab Khan Kasi ◽  
Jafar Khan Kasi ◽  
Mahadi Hasan ◽  
Nitin Afzulpurkar ◽  
Sirapat Pratontep ◽  
...  
Keyword(s):  
Anodic Aluminum Oxide ◽  
Pore Diameter ◽  
Low Cost ◽  
Membrane Thickness ◽  
Low Grade ◽  
Fluid Filtration ◽  
Tubular Membrane ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Impurity Defects

This paper reports the fabrication of AAO tubular membrane using 99.35% and 99.56% pure Al and their potential application for hemodialysis. Here we discussed the effect of impurity on membrane structure. We found that the self organized structure of AAO nanochannels minimizes impurity defects in membrane. If micro size impurity blocks the generation of nanochannels then the neighboring nanochannels bend and make branches to fulfill that gap. We observed that if impurity size is less than the AAO membrane thickness then it does not produce any micro size hole. In low grade Al the periodic hexagonal order was disturbed however there was no big difference in pore diameter. It was observed that such type of membrane do not have any leakage and it can be used for fluid filtration. The fabricated tubular membrane was used for hemodialysis successfully. The hemodialysis results show that AAO tubular membrane can be used for both diffusive and convective filtration

Effect of a Bubble Gas on the Formation of Self-Organized Pore Arrays in Anodic Aluminum Oxide

2009 ◽  
Vol 54 (6) ◽  
pp. 2415-2419 ◽  
Author(s):  
VanChiem Chu ◽  
Huiting Li ◽  
Hidong Kim ◽  
JaeM. Seo
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum ◽  
Self Organized

Fabrication of Self-Organized Porous Anodic Alumina Film in Malonic Acid

2014 ◽  
Vol 941-944 ◽  
pp. 1271-1274
Author(s):  
Di Ma ◽  
Shu Bai Li ◽  
Long Gui Xu ◽  
Xin Yan Dong ◽  
Xiu Ying Hu
Keyword(s):  
Aluminum Oxide ◽  
Malonic Acid ◽  
Anodic Aluminum Oxide ◽  
Pore Diameter ◽  
Porous Anodic Aluminum Oxide ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Ordered Array ◽  
The One ◽  
Imagej Software

The surface of porous anodic aluminum oxide (AAO) film anodizing in malonic acid, which is characterized by Scanning Electron Microscope (SEM) and ImageJ software. There are disorderly tiny pores or stripes on the first once anodizing surface. Pore diameter, pore density and porosity are decided by the first anodizing process. With anodizing step increased, pore diameter of the membrane decreased. Two-step anodization improves the order of PAA membrane greatly, which is processed on the basic of the ordered array pits at the aluminum that is observed after removing membrane of the one-step anodization. According to the experiments, porous anodic aluminum oxide (PAA) was prepared in 1.0 mol/L malonic acid, its pore diameter increased and porosity decreased with anodizing voltage increased.

scholarly journals Fabrication and characterization of highly ordered nanotubes of anodic aluminum oxide

2021 ◽  
pp. 9-13
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Pore Diameter ◽  
Nanometer Scale ◽  
Force Microscopy ◽  
Anodic Aluminum ◽  
Interpore Distance ◽  
Adhesion Sites ◽  
Atomic Force

Investigated the electrochemical synthesis and characterized of a nanometer scale porous anodic aluminum oxide (AAO) membrane with a mean pore diameter about of 80-100 nm. The anodizing process done by varying the anodizing temperature from 20 °C to 25 °C. The membranes exhibit interesting properties such as controllable pore diameters, periodicity and density distribution. These properties can preselect by adjusting the controlling parameters of a temperature-controlled two-step anodization process. The surface features of the nanometer scale membrane such as pore density, pore diameter and interpore distance were quantified using scanning electron microscopy (SEM) and atomic force microscopy (AFM). SEM and AFM investigations revealed the presence of focal adhesion sites over the surface of the porous membranes. The positive outcomes of the study, indicates that AAO membranes can used for applications in the future.

scholarly journals Growth of Anodic Aluminum Oxide Templates and the Application in Fabrication of the BiSbTe-Based Thermoelectric Nanowires

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Chin-Guo Kuo ◽  
Yuan-Tai Hsieh ◽  
Cheng-Fu Yang ◽  
Ching-Ho Huang ◽  
Chia-Ying Yen
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Honeycomb Structure ◽  
Electrochemical Anodization ◽  
Nanotube Arrays ◽  
Constant Voltage ◽  
Deposition Parameter ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Anodic Aluminum Oxide Templates

A two-step electrochemical anodization was used to form the anodic aluminum oxide (AAO) thin films with nanotube arrays of self-organized honeycomb structure. Al foil was anodized in 10% sulfuric acid (H2SO4) and 3% oxalic acid (H2C2O4) at 25°C at constant voltage of 40 V for 60 min for two times. Ethylene glycol (C2H6O2) was used as a solution and 0.3 M potassium iodide (KI) was used to improve the solution’s conductivity. Different electrolyte concentrations of Bi(NO3)3-5H2O, SbCl3, and TeCl4were added into KI-C2H6O2solution and the cyclic voltammetry experiment was used to find the reduced voltages of Bi3+, Sb3+, and Te4+ions. The potentiostatic deposition and pulse electrodeposition (PED) processes were used to deposit the (Bi,Sb)2−xTe3+x-based materials. Field-emission scanning electron microscope and energy dispersive spectrometers were used to analyze the compositions of the deposited (Bi,Sb)2−xTe3+x-based materials. After finding the optimal deposition parameter of the PED process the AAO nanotube arrays were used as the templates to deposit the (Bi,Sb)2−xTe3+x-based thermoelectric nanowires.

scholarly journals XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes

2012 ◽  
Vol 1411 ◽  
Author(s):  
Wei Guan ◽  
Jay Ghatak ◽  
Nianhua Peng ◽  
Yong Peng ◽  
Chris Jeynes ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Oxide Surface ◽  
In Situ Tem ◽  
Cross Sectional ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Ideal Tool

ABSTRACTPenetration of a nanochannel mask by 190keV Co+ ions is tested for the purpose of achieving laterally modulated ion implantation into a SiO2 thin film on a Si substrate. A 2D-nanoporous membrane of anodic aluminum oxide (AAO) is chosen as the mask. Criteria and challenges for designing the mask are presented. Implantation experiments through a mask with pore diameter of 125 nm and inter-pore distance of 260 nm are carried out. Cross-sectional TEM (XTEM) is shown as an ideal tool to assess depth distribution and lateral distribution of implanted ions at the same time, complemented by Rutherford backscattering spectroscopy. Using energy dispersive x-ray spectroscopy linescans, a Co distribution with lateral modulation is found at 120 nm below the oxide surface. First experiments in converting the atomic distribution of Co to discrete nanoparticles by in-situ TEM annealing are presented.

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