scholarly journals XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes

2012 ◽  
Vol 1411 ◽  
Author(s):  
Wei Guan ◽  
Jay Ghatak ◽  
Nianhua Peng ◽  
Yong Peng ◽  
Chris Jeynes ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Oxide Surface ◽  
In Situ Tem ◽  
Cross Sectional ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Ideal Tool

ABSTRACTPenetration of a nanochannel mask by 190keV Co+ ions is tested for the purpose of achieving laterally modulated ion implantation into a SiO2 thin film on a Si substrate. A 2D-nanoporous membrane of anodic aluminum oxide (AAO) is chosen as the mask. Criteria and challenges for designing the mask are presented. Implantation experiments through a mask with pore diameter of 125 nm and inter-pore distance of 260 nm are carried out. Cross-sectional TEM (XTEM) is shown as an ideal tool to assess depth distribution and lateral distribution of implanted ions at the same time, complemented by Rutherford backscattering spectroscopy. Using energy dispersive x-ray spectroscopy linescans, a Co distribution with lateral modulation is found at 120 nm below the oxide surface. First experiments in converting the atomic distribution of Co to discrete nanoparticles by in-situ TEM annealing are presented.

Effect of a Bubble Gas on the Formation of Self-Organized Pore Arrays in Anodic Aluminum Oxide

2009 ◽  
Vol 54 (6) ◽  
pp. 2415-2419 ◽  
Author(s):  
VanChiem Chu ◽  
Huiting Li ◽  
Hidong Kim ◽  
JaeM. Seo
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum ◽  
Self Organized

Fabrication of Self-Organized Porous Anodic Alumina Film in Malonic Acid

2014 ◽  
Vol 941-944 ◽  
pp. 1271-1274
Author(s):  
Di Ma ◽  
Shu Bai Li ◽  
Long Gui Xu ◽  
Xin Yan Dong ◽  
Xiu Ying Hu
Keyword(s):  
Aluminum Oxide ◽  
Malonic Acid ◽  
Anodic Aluminum Oxide ◽  
Pore Diameter ◽  
Porous Anodic Aluminum Oxide ◽  
Anodic Aluminum ◽  
Self Organized ◽  
Ordered Array ◽  
The One ◽  
Imagej Software

The surface of porous anodic aluminum oxide (AAO) film anodizing in malonic acid, which is characterized by Scanning Electron Microscope (SEM) and ImageJ software. There are disorderly tiny pores or stripes on the first once anodizing surface. Pore diameter, pore density and porosity are decided by the first anodizing process. With anodizing step increased, pore diameter of the membrane decreased. Two-step anodization improves the order of PAA membrane greatly, which is processed on the basic of the ordered array pits at the aluminum that is observed after removing membrane of the one-step anodization. According to the experiments, porous anodic aluminum oxide (PAA) was prepared in 1.0 mol/L malonic acid, its pore diameter increased and porosity decreased with anodizing voltage increased.

scholarly journals Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

2007 ◽  
Vol 91 (5) ◽  
pp. 053117 ◽  
Author(s):  
Bo Yan ◽  
Hoa T. M. Pham ◽  
Yue Ma ◽  
Yan Zhuang ◽  
Pasqualina M. Sarro
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Oxide Layers ◽  
Anodic Aluminum

In-situ electrochemical doping of nanoporous anodic aluminum oxide with indigo carmine organic dye

2016 ◽  
Vol 598 ◽  
pp. 60-64 ◽  
Author(s):  
Wojciech J. Stępniowski ◽  
Małgorzata Norek ◽  
Bogusław Budner ◽  
Marta Michalska-Domańska ◽  
Agata Nowak-Stępniowska ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Indigo Carmine ◽  
Organic Dye ◽  
Electrochemical Doping ◽  
Anodic Aluminum ◽  
Nanoporous Anodic Aluminum Oxide ◽  
Nanoporous Anodic Aluminum

Rapid and tunable growth of well-ordered hexagonal nanoporous anodic aluminum oxide (AAO) structure by two step high temperature anodization

2021 ◽  
Author(s):  
Kashif Azher ◽  
Maaz Akhtar ◽  
Shao-Fu Chang ◽  
Shih-Hsun Chen
Keyword(s):  
High Temperature ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Pure Aluminum ◽  
Aluminum Substrate ◽  
Nanoporous Structure ◽  
Average Pore ◽  
Cross Sectional ◽  
Anodic Aluminum ◽  
Nano Channel

In this study, we have developed a swift and well-ordered growth of the Anodic Aluminum Oxide (AAO) nanoporous structure by two-step high temperature anodization of pure Aluminum substrate. The pre-anodization surface treatment of the aluminum substrate assists in the formation of well-organized nanoporous structures. The two-step anodization process was performed in 0.3 M of oxalic acid at 20 °C for 40 V and 45 V to obtain tunable pore diameters. The high temperature of the electrolyte solution helps in the rapid growth of the AAO nanoporous structure. The top surface image of AAO shows a well-ordered nanoporous structure with an average pore diameter of 70 nm at 40 V and 100 nm at 45 V. The SEM cross sectional view also illustrates the well-ordered nano channel and the elemental mapping elaborates the presence of aluminum and oxygen. The thickness of the AAO nanoporous structure was determined by using SEM for three anodization time spans (20, 24 and 28 hours), in which an increasing trend was observed. The fabricated AAO has a higher thickness and a well-ordered nanoporous structure that shows it can be used as a template for fabricating nanostructured materials.

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