Fine Line Patterning By Focused Ion Beam Induced Decomposition of Palladium Acetate Films

1986 ◽  
Vol 75 ◽  
Author(s):  
L. R. Harriott ◽  
K. D. Cummings ◽  
M. E. Gross ◽  
W. L. Brown ◽  
J. Linnros ◽  
...  
Keyword(s):  
Electrical Conductivity ◽  
Organic Material ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Dose Range ◽  
Hydrogen Atmosphere ◽  
Palladium Acetate ◽  
Broad Beam ◽  
Potential Applications ◽  
Induced Decomposition

AbstractFine conducting features have been produced on Si and SiO2 substrates by irradiation of spin-on palladium acetate, [Pd(O2CCH3)2]3 films with a submicron focused ion beam. The exposures were made with a 20 keV Ga+, focused to a 0.2 micrometer spot. Electrical conductivity measuremnents were made on the resultant features as a function of ion dose for linewidths of one and ten micrometers. The sheet conductivity in the two cases was comparable and increased dramatically in the dose range between 2×1014 and 5×1014 ions/cm2. The conductivity of the exposed lines was further increased after heating in a hydrogen atmosphere. Measurements of carbon and oxygen content indicate that even at the highest ion doses a significant amount of organic material remains. Results are compared to those for 2 MeV He+ and Ne+ broad beam exposures. Potential applications are also discussed.

Assessment of Deformation using the Focused Ion Beam Technique

2000 ◽  
Vol 6 (S2) ◽  
pp. 530-531
Author(s):  
M.G. Burke ◽  
P.T. Duda ◽  
G. Botton ◽  
M. W. Phaneuf
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Site Specificity ◽  
Alloy 600 ◽  
The Past ◽  
Transmission Electron ◽  
Wide Range ◽  
Potential Applications ◽  
Beam Technique ◽  
Significant Attention

Focused Ion Beam (FIB) micromachining techniques have gained significant attention over the past few years as a promising method for the preparation of a variety of metallic and nonmetallic materials for subsequent characterization using transmission electron microscopy (TEM) The advantage of the FIB in terms of site specificity and speed for the preparation of uniform electron transparent sections has opened a wide range of potential applications in materials characterization. The ability to image the sample in the FIB can also provide important microstructural data for materials analysis. In this study, both conventionally electropolished and FIB-ed specimens were prepared in order to characterize the microstructure of a commercially-produced tube of Alloy 600 (approximately Ni-15 Cr-10 Fe- 0.05 C). The electropolished samples were prepared using a solution of 20% HClO4 - 80% CH3OH at ∼-40°C. The FIB sections were obtained from a cross-section of the tube that had been mechanically thinned to ∼100 μm. The section was thinned in a Micrion 2500 FIB system with a Ga ion beam at 50 kV accelerating voltage.

scholarly journals FIB-SEM Three-Dimensional Tomography for Characterization of Carbon-Based Materials

2019 ◽  
Vol 2019 ◽  
pp. 1-8 ◽  
Author(s):  
Nan Nan ◽  
Jingxin Wang
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
3D Tomography ◽  
Tomography System ◽  
Internal Structures ◽  
Potential Applications ◽  
Scanning Electron ◽  
Carbon Based

A review on the recent advances of the three-dimensional (3D) characterization of carbon-based materials was conducted by focused ion beam-scanning electron microscope (FIB-SEM) tomography. Current studies and further potential applications of the FIB-SEM 3D tomography technique for carbon-based materials were discussed. The goal of this paper is to highlight the advances of FIB-SEM 3D reconstruction to reveal the high and accurate resolution of internal structures of carbon-based materials and provide suggestions for the adoption and improvement of the FIB-SEM tomography system for a broad carbon-based research to achieve the best examination performances and enhance the development of innovative carbon-based materials.

Focused Ion Beam Nano-Machined Structures For Strain Analysis By A Moiré Technique

2002 ◽  
Vol 761 ◽  
Author(s):  
Biao Li ◽  
Huimin Xie ◽  
Xin Zhang
Keyword(s):  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Accurate Determination ◽  
Strain Analysis ◽  
Local Strain ◽  
Ion Milling ◽  
Nano Fabrication ◽  
In Situ Deposition ◽  
Potential Applications

ABSTRACTThe accurate determination of residual stress/strain in thin films is especially important in the emerging field of MicroElectroMechanical Systems (MEMS). In this article, a focused ion beam (FIB) moiré method is proposed and demonstrated to measure the strain in MEMS structures. This technique is based on the advantages of the FIB system in nano-fabrication, imaging, in-situ deposition, and fine adjustment. Nano-grating lines with 70 nm width and 140 nm spacing are directly written on the top of the MEMS structures by ion milling without the requirement of an etch mask. The FIB moiré pattern is formed by the interference between a prepared specimen grating and FIB raster scan lines. The strain of the MEMS structures is derived by calculating the average spacing of moiré fringes. Since the local strain of a MEMS structure itself can be monitored during the process, the FIB moiré technique has many potential applications in the mechanical metrology of MEMS. As an example, the strain distribution along the sticking MEMS structures, and the contribution of surface oxidization and mass loading to the cantilever strain is determined by this FIB moiré technique.

FABRICATION AND ELECTRON MICROSCOPY CHARACTERIZATION OF METAL-GATED CARBON NANOTUBE EMITTER ARRAYS

2006 ◽  
Vol 05 (04n05) ◽  
pp. 579-583 ◽  
Author(s):  
JIANFENG WU ◽  
LIFENG DONG ◽  
JEREMY PETTY ◽  
CHIACHING PAN ◽  
JUN JIAO
Keyword(s):  
Carbon Nanotube ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Sol Gel ◽  
Chemical Vapor ◽  
Field Emitter ◽  
Field Emitter Arrays ◽  
Fe Catalyst ◽  
Cnt Field Emitter ◽  
Induced Decomposition

A technique was investigated for the fabrication of triode-type carbon nanotube (CNT) field emitter arrays, where an integrated extraction gate was built between the nanotube cathode and the anode. The gate improves the control capability of emission currents. To fabricate the metal-gated CNT field emitter arrays, well ordered cells were generated by focused ion beam (FIB) milling of platinum ( Pt ) coated silicon ( Si ) substrate and then modified by chemical etching. Two types of catalyst elements iron ( Fe ) and nickel ( Ni ), were used for growing the CNTs inside the cells. The methods for depositing catalysts into the cells include spin coating sol–gel Fe , FIB induced decomposition of ferrocene and sputter coating pure Ni . CNT growth was carried out by a chemical vapor deposition (CVD) process. The results suggest that the CNTs grew from inside the cells where the catalysts were located. In comparison, the CNTs synthesized from the sol–gel Fe catalyst were straighter than those from ferrocene Fe and pure Ni . The density and orientation of the CNTs in each cell are directly related to the type and quantity of the catalysts and are also affected by the size of the cells.

Sub-Micron Selective Photoluminescence in Porous Si by Focused Ion Beam Implantation

1992 ◽  
Vol 281 ◽  
Author(s):  
A. J. Steckl ◽  
J. Xu ◽  
H. C. Mogul ◽  
S. Mogren
Keyword(s):  
Incubation Time ◽  
Focused Ion Beam ◽  
Hole Concentration ◽  
Ion Beam ◽  
Porous Si ◽  
Strong Function ◽  
Si Substrates ◽  
Si Doping ◽  
Broad Beam ◽  
First Time

ABSTRACTThe effect of Si doping on the formation of stain-etched porous Si and its photoluminescent properties was studied. Porous Si is obtained by purely chemical etching of crystalline Si in a solution of HF:HNO3:H2O in the ratio of 1:3:5. We have observed that an incubation time (ti) exists between the insertion of Si into the solution and the onset of porous Si production. This incubation time was found to be a strong function of hole concentration in both n- and p-Si. In p-Si, the ti decreased rapidly with increasing conductivity, whereas for n-Si the opposite (but not as pronounced) trend was found to be the case. For example in (B-doped) p-Si, ti, is only ∼0.5 min for 250 (Ω-cm)−1 but increases to ∼ 5 min for 0.2 (Ω-cm)−1. In (P-doped) n-Si substrates ti was ∼ 8 min for 0.2 (Ω-cm)−1 increasing to ∼ 10 min for 7 (Ω-cm)−1. Photoluminescence (PL) measurements of the porous Si obtained on substrates of various conductivity (p and n) show similar spectra, namely a peak at around 1.94 eV with a full width at half-maximum (FWHM) of about 0.5 eV. Based on the ti difference, we have fabricated localized photoemitting porous Si patterns by Ga+ focused ion beam (FIB) implantation doping and B+ broad beam (BB) implantation doping of n-type Si. Using 30 kV FIB Ga+ implantation, sub-micron photoemitting patterns have been obtained for the first time.

scholarly journals Development of Advanced Biodevices Using Quantum Beam Microfabrication Technology

2020 ◽  
Vol 4 (1) ◽  
pp. 14 ◽  
Author(s):  
Tomoko G. Oyama ◽  
Atsushi Kimura ◽  
Naotsugu Nagasawa ◽  
Kotaro Oyama ◽  
Mitsumasa Taguchi
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Three Dimensional ◽  
Chemical Properties ◽  
Stem Cell Differentiation ◽  
Cell Aggregation ◽  
Three Dimensions ◽  
Gene Expression Control ◽  
Potential Applications ◽  
Microfabrication Technology

Biodevices with engineered micro- and nanostructures are strongly needed for advancements in medical technology such as regenerative medicine, drug discovery, diagnostic reagents, and drug delivery to secure high quality of life. The authors produced functional biocompatible plastics and hydrogels with physical and chemical properties and surface microscopic shapes that can be freely controlled in three dimensions during the production process using the superior properties of quantum beams. Nanostructures on a biocompatible poly(L-lactic acid) surface were fabricated using a focused ion beam. Soft hydrogels based on polysaccharides were micro-fabricated using a focused proton beam. Gelatin hydrogels were fabricated using γ-rays and electron beam, and their microstructures and stiffnesses were controlled for biological applications. HeLa cells proliferated three-dimensionally on the radiation-crosslinked gelatin hydrogels and, furthermore, their shapes can be controlled by the micro-fabricated surface of the hydrogel. Long-lasting hydrophilic concave structures were fabricated on the surface of silicone by radiation-induced crosslinking and oxidation. The demonstrated advanced biodevices have potential applications in three-dimensional cell culture, gene expression control, stem cell differentiation induction/suppression, cell aggregation into arbitrary shapes, tissue culture, and individual diagnosis in the medical field.

scholarly journals TiN-Nanoparticulate-Reinforced ZrO2 for Electrical Discharge Machining

Materials ◽  
2019 ◽  
Vol 12 (17) ◽  
pp. 2789 ◽  
Author(s):  
Ana Lazar ◽  
Tomaž Kosmač ◽  
Janez Zavašnik ◽  
Anže Abram ◽  
Andraž Kocjan
Keyword(s):  
Electron Microscopy ◽  
Electrical Conductivity ◽  
Focused Ion Beam ◽  
Electrical Discharge Machining ◽  
Ion Beam ◽  
Tetragonal Zirconia ◽  
Titania Nanoparticles ◽  
Mechanical Reinforcement ◽  
Electrically Conductive ◽  
Synthesis Routes

This study presents a fabrication route for an electrically conductive ZrO2–TiN ceramic nanocomposite with a nanoscale TiN phase occupying ≤30 vol% to improve the mechanical reinforcement of the zirconia matrix, and at the same time provide electrical conductivity to facilitate electro-discharge machining (EDM). The TiN nanoparticles were incorporated into a 3 mol% yttria-stabilized tetragonal zirconia (Y-TZP) powder, either by admixing a TiN nanopowder (MCP) or by using in-situ synthesis (ISS) via the forced hydrolysis of a titanyl sulphate aqueous solution and the direct nitriding of as-synthesized titania nanoparticles, followed by consolidation and rapid sintering in a spark plasma sintering (SPS) system. The initial phase composition and crystal structure of the as-synthesized powders and the sintered samples were characterized by transmission electron microscopy (TEM) and X-ray difraction (XRD). The influence of the different fabrication routes on the microstructural evolution, electrical and mechanical properties, and affinity for EDM were assessed using TEM, focused ion beam scanning electron microscopy (FIB-SEM, Vickers indentation, electrical conductivity measurements, and profilometry. The MCP synthesis route resulted in finer microstructures that are less prone to microstructural inhomogeneities; however, using the ISS route, it was possible to fabricate electrically conductive Y-TZP nanocomposites containing only 15 vol% of the TiN nanoparticulate phase. Both synthesis routes resulted in an increase of the fracture toughness with an increase of the TiN phase due to the nanoparticulate TiN reinforcement of the Y-TZP ceramic matrix via crack-bridging toughening mechanisms. As both synthesis routes yielded Y-TZP nanocomposites capable of successful EDM machining at a TiN content of ≥30 vol% for the MCP and ≥ 15 vol% TiN for the ISS, a possible mechanism was developed based on the microstructure evolution and grain growth.

Arbitrary Structures Fabricated by Focused Ion Beam Milling

2013 ◽  
Vol 661 ◽  
pp. 66-69
Author(s):  
Xiao Xiao Jiang ◽  
Feng Wen Wang ◽  
Zhen He Ma ◽  
Qiong Chan Gu ◽  
Jiang Tao Lv ◽  
...  
Keyword(s):  
Integrated Optics ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Optical Devices ◽  
Electronic Technology ◽  
Optical Components ◽  
Potential Applications ◽  
Integrated Optics Device ◽  
Focused Ion Beam Milling ◽  
Arbitrary Shapes

Optical components at the nanoscale are crucial for developing photonics and integrated optics. Device with ultrasmall dimensions is of particular importance for nanoscience and electronic technology. Among all the manufacturing tools, the focused ion beam is a critical candidate for machining and processing optical devices at the nanoscale. Here, we experimentally demonstrate the fabrication of nanodevices with arbitrary shapes and different potential applications using focused ion beam techniques.

Sub-Micron Feature Patterning of Thermoplastics using Multi-Scale BMG Tooling

2011 ◽  
Vol 1300 ◽  
Author(s):  
Dermot J. Stratton ◽  
Cormac Byrne ◽  
James Mulcahy ◽  
David J. Browne
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Amorphous Structure ◽  
Multi Scale ◽  
Arc Melting ◽  
Wear And Corrosion ◽  
Size Limitation ◽  
Potential Applications ◽  
Characteristic Sets ◽  
Wear And Corrosion Resistance

ABSTRACTOne potential application for Bulk Metallic Glasses (BMGs) is in dies with micro- and nano-sized features. Three basic characteristic sets inherent to BMGs make them ideal materials for micro/nano-tooling applications: (1) excellent compressive strength, wear and corrosion resistance; (2) amorphous structure which presents no microstructural length scale limitation to cutting and forming operations; (3) the presence of a glass transition temperature above which they can be easily formed. There are many potential applications for multi-scale BMG tooling, including in production of microfluidic and other precision biomedical devices. In the current work, discs were cut from 5 mm diameter cylindrical specimens of Zr44Cu40Al8Ag8 BMG produced via arc melting and casting into water-cooled copper molds. The cylindrical specimens were then thermoplastically formed into thin coin-like disc samples. The thin disc-shaped plates were then ground and polished to create a smooth flat surface. Sub-micron-sized features were patterned into the plates via a focused ion beam. We demonstrated that such feature sizes are not achievable in conventional crystalline metallic tool materials. The patterned BMG tools were then set in a compression press where the platen temperature was precisely controlled and a series of load-controlled embossing trials were carried out in which the features of the BMG tooling were replicated in poly(methyl methacrylate) (PMMA) sheet. An exercise in mapping out the size limitation of such a multi-scale embossing operation is reported.

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