Sub-Micron Feature Patterning of Thermoplastics using Multi-Scale BMG Tooling

2011 ◽  
Vol 1300 ◽  
Author(s):  
Dermot J. Stratton ◽  
Cormac Byrne ◽  
James Mulcahy ◽  
David J. Browne

ABSTRACTOne potential application for Bulk Metallic Glasses (BMGs) is in dies with micro- and nano-sized features. Three basic characteristic sets inherent to BMGs make them ideal materials for micro/nano-tooling applications: (1) excellent compressive strength, wear and corrosion resistance; (2) amorphous structure which presents no microstructural length scale limitation to cutting and forming operations; (3) the presence of a glass transition temperature above which they can be easily formed. There are many potential applications for multi-scale BMG tooling, including in production of microfluidic and other precision biomedical devices. In the current work, discs were cut from 5 mm diameter cylindrical specimens of Zr44Cu40Al8Ag8 BMG produced via arc melting and casting into water-cooled copper molds. The cylindrical specimens were then thermoplastically formed into thin coin-like disc samples. The thin disc-shaped plates were then ground and polished to create a smooth flat surface. Sub-micron-sized features were patterned into the plates via a focused ion beam. We demonstrated that such feature sizes are not achievable in conventional crystalline metallic tool materials. The patterned BMG tools were then set in a compression press where the platen temperature was precisely controlled and a series of load-controlled embossing trials were carried out in which the features of the BMG tooling were replicated in poly(methyl methacrylate) (PMMA) sheet. An exercise in mapping out the size limitation of such a multi-scale embossing operation is reported.

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Orkun Furat ◽  
Lukas Petrich ◽  
Donal P. Finegan ◽  
David Diercks ◽  
Francois Usseglio-Viretta ◽  
...  

AbstractAccurately capturing the architecture of single lithium-ion electrode particles is necessary for understanding their performance limitations and degradation mechanisms through multi-physics modeling. Information is drawn from multimodal microscopy techniques to artificially generate LiNi0.5Mn0.3Co0.2O2 particles with full sub-particle grain detail. Statistical representations of particle architectures are derived from X-ray nano-computed tomography data supporting an ‘outer shell’ model, and sub-particle grain representations are derived from focused-ion beam electron backscatter diffraction data supporting a ‘grain’ model. A random field model used to characterize and generate the outer shells, and a random tessellation model used to characterize and generate grain architectures, are combined to form a multi-scale model for the generation of virtual electrode particles with full-grain detail. This work demonstrates the possibility of generating representative single electrode particle architectures for modeling and characterization that can guide synthesis approaches of particle architectures with enhanced performance.


2000 ◽  
Vol 6 (S2) ◽  
pp. 530-531
Author(s):  
M.G. Burke ◽  
P.T. Duda ◽  
G. Botton ◽  
M. W. Phaneuf

Focused Ion Beam (FIB) micromachining techniques have gained significant attention over the past few years as a promising method for the preparation of a variety of metallic and nonmetallic materials for subsequent characterization using transmission electron microscopy (TEM) The advantage of the FIB in terms of site specificity and speed for the preparation of uniform electron transparent sections has opened a wide range of potential applications in materials characterization. The ability to image the sample in the FIB can also provide important microstructural data for materials analysis. In this study, both conventionally electropolished and FIB-ed specimens were prepared in order to characterize the microstructure of a commercially-produced tube of Alloy 600 (approximately Ni-15 Cr-10 Fe- 0.05 C). The electropolished samples were prepared using a solution of 20% HClO4 - 80% CH3OH at ∼-40°C. The FIB sections were obtained from a cross-section of the tube that had been mechanically thinned to ∼100 μm. The section was thinned in a Micrion 2500 FIB system with a Ga ion beam at 50 kV accelerating voltage.


2019 ◽  
Vol 2019 ◽  
pp. 1-8 ◽  
Author(s):  
Nan Nan ◽  
Jingxin Wang

A review on the recent advances of the three-dimensional (3D) characterization of carbon-based materials was conducted by focused ion beam-scanning electron microscope (FIB-SEM) tomography. Current studies and further potential applications of the FIB-SEM 3D tomography technique for carbon-based materials were discussed. The goal of this paper is to highlight the advances of FIB-SEM 3D reconstruction to reveal the high and accurate resolution of internal structures of carbon-based materials and provide suggestions for the adoption and improvement of the FIB-SEM tomography system for a broad carbon-based research to achieve the best examination performances and enhance the development of innovative carbon-based materials.


2002 ◽  
Vol 761 ◽  
Author(s):  
Biao Li ◽  
Huimin Xie ◽  
Xin Zhang

ABSTRACTThe accurate determination of residual stress/strain in thin films is especially important in the emerging field of MicroElectroMechanical Systems (MEMS). In this article, a focused ion beam (FIB) moiré method is proposed and demonstrated to measure the strain in MEMS structures. This technique is based on the advantages of the FIB system in nano-fabrication, imaging, in-situ deposition, and fine adjustment. Nano-grating lines with 70 nm width and 140 nm spacing are directly written on the top of the MEMS structures by ion milling without the requirement of an etch mask. The FIB moiré pattern is formed by the interference between a prepared specimen grating and FIB raster scan lines. The strain of the MEMS structures is derived by calculating the average spacing of moiré fringes. Since the local strain of a MEMS structure itself can be monitored during the process, the FIB moiré technique has many potential applications in the mechanical metrology of MEMS. As an example, the strain distribution along the sticking MEMS structures, and the contribution of surface oxidization and mass loading to the cantilever strain is determined by this FIB moiré technique.


2020 ◽  
Author(s):  
Gong-Her Wu ◽  
Patrick G. Mitchell ◽  
Jesus G. Galaz-Montoya ◽  
Corey W. Hecksel ◽  
Emily M. Sontag ◽  
...  

SUMMARYThree-dimensional (3D) visualization of vitrified cells can uncover structures of subcellular complexes without chemical fixation or staining. Here, we present a pipeline integrating three imaging modalities to visualize the same specimen at cryogenic temperature at different scales: cryo-fluorescence confocal microscopy, volume cryo-focused ion beam scanning electron microscopy, and transmission cryo-electron tomography. Our proof-of-concept benchmark revealed the 3D distribution of organelles and subcellular structures in whole heat-shocked yeast cells, including the ultrastructure of protein inclusions that recruit fluorescently-labelled chaperone Hsp104. Since our workflow efficiently integrates imaging at three different scales and can be applied to other types of cells, it could be used for large-scale phenotypic studies of frozen-hydrated specimens in a variety of healthy and diseased conditions with and without treatments.


2020 ◽  
Vol 4 (1) ◽  
pp. 14 ◽  
Author(s):  
Tomoko G. Oyama ◽  
Atsushi Kimura ◽  
Naotsugu Nagasawa ◽  
Kotaro Oyama ◽  
Mitsumasa Taguchi

Biodevices with engineered micro- and nanostructures are strongly needed for advancements in medical technology such as regenerative medicine, drug discovery, diagnostic reagents, and drug delivery to secure high quality of life. The authors produced functional biocompatible plastics and hydrogels with physical and chemical properties and surface microscopic shapes that can be freely controlled in three dimensions during the production process using the superior properties of quantum beams. Nanostructures on a biocompatible poly(L-lactic acid) surface were fabricated using a focused ion beam. Soft hydrogels based on polysaccharides were micro-fabricated using a focused proton beam. Gelatin hydrogels were fabricated using γ-rays and electron beam, and their microstructures and stiffnesses were controlled for biological applications. HeLa cells proliferated three-dimensionally on the radiation-crosslinked gelatin hydrogels and, furthermore, their shapes can be controlled by the micro-fabricated surface of the hydrogel. Long-lasting hydrophilic concave structures were fabricated on the surface of silicone by radiation-induced crosslinking and oxidation. The demonstrated advanced biodevices have potential applications in three-dimensional cell culture, gene expression control, stem cell differentiation induction/suppression, cell aggregation into arbitrary shapes, tissue culture, and individual diagnosis in the medical field.


1986 ◽  
Vol 75 ◽  
Author(s):  
L. R. Harriott ◽  
K. D. Cummings ◽  
M. E. Gross ◽  
W. L. Brown ◽  
J. Linnros ◽  
...  

AbstractFine conducting features have been produced on Si and SiO2 substrates by irradiation of spin-on palladium acetate, [Pd(O2CCH3)2]3 films with a submicron focused ion beam. The exposures were made with a 20 keV Ga+, focused to a 0.2 micrometer spot. Electrical conductivity measuremnents were made on the resultant features as a function of ion dose for linewidths of one and ten micrometers. The sheet conductivity in the two cases was comparable and increased dramatically in the dose range between 2×1014 and 5×1014 ions/cm2. The conductivity of the exposed lines was further increased after heating in a hydrogen atmosphere. Measurements of carbon and oxygen content indicate that even at the highest ion doses a significant amount of organic material remains. Results are compared to those for 2 MeV He+ and Ne+ broad beam exposures. Potential applications are also discussed.


2013 ◽  
Vol 661 ◽  
pp. 66-69
Author(s):  
Xiao Xiao Jiang ◽  
Feng Wen Wang ◽  
Zhen He Ma ◽  
Qiong Chan Gu ◽  
Jiang Tao Lv ◽  
...  

Optical components at the nanoscale are crucial for developing photonics and integrated optics. Device with ultrasmall dimensions is of particular importance for nanoscience and electronic technology. Among all the manufacturing tools, the focused ion beam is a critical candidate for machining and processing optical devices at the nanoscale. Here, we experimentally demonstrate the fabrication of nanodevices with arbitrary shapes and different potential applications using focused ion beam techniques.


2010 ◽  
Vol 2010 ◽  
pp. 1-12 ◽  
Author(s):  
Shaoli Zhu ◽  
Wei Zhou

Noble metal, especially gold (Au) and silver (Ag) nanoparticles exhibit unique and tunable optical properties on account of their surface plasmon resonance (SPR). In this paper, we mainly discussed the theory background of the enhanced optical properties of noble metal nanoparticles. Mie theory, transfer matrix method, discrete dipole approximation (DDA) method, and finite-difference time domain (FDTD) method applied brute-force computational methods for different nanoparticles optical properties. Some important nanostructure fabrication technologies such as nanosphere lithography (NSL) and focused ion beam (FIB) are also introduced in this paper. Moreover, these fabricated nanostructures are used in the plasmonic sensing fields. The binding signal between the antibody and antigen, amyloid-derived diffusible ligands (ADDLs)-potential Alzheimer's disease (AD) biomarkers, and staphylococcal enterotixn B (SEB) in nano-Moore per liter (nM) concentration level are detected by our designed nanobiosensor. They have many potential applications in the biosensor, environment protection, food security, and medicine safety for health, and so forth, fields.


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