Thin Multi-Layered Photoreceptor Deposited From Disilane
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Type A
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ABSTRACTA thin multi-layered photoreceptor drum has been fabricated, using glow-discharge decomposition of disilane. The photoreceptor is thin(10 μm), but it is charged up sufficiently. The photoreceptor has three layers; the p-type a-Si:H (blocking layer), the intrinsic B-doped a-Si:H (photoconductive layer) and a-SiC:H (passivation layer). Disilane is highly reactive. The intrinsic B-doped a-Si:H was prepared from a slightly gaseous mixture of B2H6 (3 ppm). The amorphous-SiC:H passivation layer deposited from Si2H6 and C3H8 was developed to achieve sufficient surface potential and to improve the environmental characteristics.
1981 ◽
Vol 42
(C4)
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pp. C4-567-C4-570
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1984 ◽
Vol 66
(1-2)
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pp. 31-37
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1965 ◽
Vol 112
(5)
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pp. 528
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2018 ◽
Vol 29
(11)
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pp. 9321-9325
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1997 ◽
Vol 45
(4)
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pp. 413-421
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1983 ◽
Vol 59-60
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pp. 493-496
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