Strain and Texture in Al-Interconnect Wires Weasured by X-Xay Microbeam Diffraction

1999 ◽  
Vol 563 ◽  
Author(s):  
Nobumichi Tamura ◽  
J.-S. Chung ◽  
G. E. Ice ◽  
B. C. Larson ◽  
J. D. Budai ◽  
...  
Keyword(s):  
Local Strain ◽  
Beam Line ◽  
Strain Measurements ◽  
X Ray ◽  
Intergranular Strain ◽  
White Beam ◽  
Individual Grains ◽  
Photon Source

AbstractThe local strain and texture in Al interconnect wires have been investigated using white and monochromatic x-ray microbeams on the MHATTCAT undulator beam line at the Advanced Photon Source. Intergrain and intragrain orientations were obtained with ∼0.01° sensitivity using white beam measurements on wide Al pads (∼100 μm) and thin (2 μm) Al wires. Orientation changes of up to 1°were found within individual grains of the (111) textured Al interconnects. Deviatoric strain measurements indicate small intragranular strain variations, but intergranular strain variations were found to be quite large.

X-Ray Diffraction as a Probe for Elastic Strain: Micro- and Nanoscale Investigation of Thin Metal Films

2004 ◽  
Vol 840 ◽  
Author(s):  
R. Spolenak
Keyword(s):  
Local Strain ◽  
Metal Films ◽  
X Rays ◽  
X Ray Diffraction ◽  
Large Area ◽  
Strain Measurements ◽  
X Ray ◽  
The Past ◽  
Time Space ◽  
Peak Broadening

ABSTRACTIn the past years the concept of measuring strain by x-rays has changed significantly. The combination of 3rd generation synchrotron sources, advanced focusing techniques and large area detectors has made it possible to probe volumes smaller than a cubic micron. This devolopment has made it possible to probe microstrains directly without having to rely on highly sophisticated models to evaluate peak broadening effects. This paper will provide a review of the state of art of local strain measurements by x-rays, discuss their limitations, provide an outlook of where the field may be going within the next years and address the most important issues to be solved. Examples will be given for the current limits in terms of resolution in time, space, strain and intensity.

Submicron Resolution X-Ray Strain Measurements On Patterned Films: Some Hows And Whys

1996 ◽  
Vol 428 ◽  
Author(s):  
M. A. Marcus ◽  
A. A. Macdowell ◽  
E. D. Isaacs ◽  
K. Evans-Lutterodt ◽  
G. E. Ice
Keyword(s):  
Mechanical Behavior ◽  
Strain Tensor ◽  
Energy Measurement ◽  
X Ray Diffraction ◽  
Strain Measurements ◽  
X Ray ◽  
Crystal Perfection ◽  
Patterned Films ◽  
Individual Grains ◽  
Interconnect Technology

AbstractAs interconnect technology moves deeper into the submicron realm, the physics governing the mechanical behavior, hence the reliability of metal lines changes. Events at the level of individual grains become more important. One would like to be able to measure the strain and orientation of single grains, and the distribution of strain across a grain. Such data may help us understand such effects as sunken grains, the erratic occurrence of stress voiding and Blechlength effects in electromigration. To get this information, techniques involving X-ray diffraction with submicron beams are being developed. These experiments involve detecting Laue spots from selected areas and energy-analyzing them to find the strain tensor. Motivations for such measurements, the specifications for a useful instrument, some designs now being developed and the intrinsic limitations of these approaches will be discussed. Design issues in the choice of focussing optics and energy measurement will be highlighted with calculations of how the Laue spots would look for different conditions of crystal perfection.

scholarly journals A fast white-beam shutter for hard x-ray topography at beamline 1-BM of the Advanced Photon Source

2014 ◽  
Vol 493 ◽  
pp. 012007 ◽  
Author(s):  
Naresh Kujala ◽  
Mark Erdmann ◽  
Kurt Goetze ◽  
Joseph Sullivan ◽  
Xianrong Huang ◽  
...  
Keyword(s):  
X Ray ◽  
White Beam ◽  
Photon Source

scholarly journals Precision white‐beam slit design for high power‐density x‐ray undulator beamlines at the Advanced Photon Source

1995 ◽  
Vol 66 (2) ◽  
pp. 1789-1791 ◽  
Author(s):  
D. Shu ◽  
C. Brite ◽  
T. Nian ◽  
W. Yun ◽  
D. R. Haeffner ◽  
...  
Keyword(s):  
Power Density ◽  
High Power ◽  
High Power Density ◽  
X Ray ◽  
White Beam ◽  
Photon Source

Can synchrotron micro-X-ray fluorescence spectroscopy be used to map the distribution of cadmium in soil particles?

Soil Research ◽  
2007 ◽  
Vol 45 (8) ◽  
pp. 624 ◽  
Author(s):  
Paul J. Milham ◽  
Timothy E. Payne ◽  
Barry Lai ◽  
Rachael L. Trautman ◽  
Zhonghou Cai ◽  
...  
Keyword(s):  
Fluorescence Spectroscopy ◽  
Agricultural Soils ◽  
Primary Source ◽  
Beam Line ◽  
Health Concern ◽  
X Ray ◽  
Cd Distribution ◽  
Elemental Associations ◽  
Farm Soils ◽  
Photon Source

Plants take up cadmium (Cd) from the soil, and the concentration of Cd in some plant products is a health concern. Plant uptake of Cd is poorly predicted by its concentration in soils; consequently, there is interest in the binding and distribution of Cd in soil. Synchrotron micro-X-ray fluorescence spectroscopy (micro-XRFS) is the most sensitive method of observing this distribution. We used beam-line 2-ID-D of the Advanced Photon Source (APS), Argonne, to test whether this technique could map the Cd distribution in 5 soils from Greater Sydney that contained 0.3–6.4 mg Cd/kg. A subsample of one soil was spiked to contain ~100 mg Cd/kg. Cadmium was readily mapped in the Cd-enriched subsample, whereas in the unamended soils, only one Cd-rich particle was found; that is, sensitivity generally limited Cd mapping. We also examined a sample of Nauru phosphorite, which was a primary source of much of the Cd in farm soils on the peri-urban fringe of Greater Sydney. The phosphorite contained ~100 mg Cd/kg and the Cd was relatively uniformly distributed, supporting the findings of an earlier study on an apatite from Africa. The micro-XRFS at beam-line 2-ID-D of the APS can be reconfigured to increase the sensitivity at least 10-fold, which may allow the distribution of Cd and its elemental associations to be mapped in particles of most agricultural soils and facilitate other spectroscopic investigations.

Strain Measurements from Single Grains in Passivated Aluminum Conductor Lines by X-Ray Microdiffraction During Electromigration

2000 ◽  
Vol 612 ◽  
Author(s):  
K. J. Hwang ◽  
G. S. Cargill ◽  
T. Marieb
Keyword(s):  
Current Density ◽  
Strain State ◽  
Local Strain ◽  
Strain Measurements ◽  
X Ray ◽  
Aluminum Metal ◽  
Conductor Line ◽  
A Current

AbstractWe describe a method for determining the local strain state of passivated aluminum metal lines from single grains within 2.6 µm × 7.0 µm × 0.75 µm sized regions along the line. X-ray microbeam diffraction is used to obtain localized measurements of thermal and electromigration-induced strain during 37 hours of electromigration in a passivated 2.6 µm-wide, 300 µm-long pure Al conductor line at a current density of 4.2×105 A/cm2 and temperature of 270°C. Diffraction from single grains is used to measure both the in-plane and normal components of strain and their evolution during electromigration at several positions along the line.

Local Microstructure and Stress in Al(Cu) Thin Film Structures Studied by X-Ray Microdiffraction

2001 ◽  
Vol 673 ◽  
Author(s):  
B.C. Valek ◽  
N. Tamura ◽  
R. Spolenak ◽  
A.A. MacDowell ◽  
R.S. Celestre ◽  
...  
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Local Stress ◽  
Local Strain ◽  
Temperature Cycle ◽  
X Ray ◽  
Cu Thin Film ◽  
Individual Grains ◽  
Interconnect Lines ◽  
Stress Variations

ABSTRACTThe microstructure of materials (grain orientation, grain boundaries, grain size distribution, local strain/stress gradients, defects, …) is very important in defining the electromigration resistance of interconnect lines in modern integrated circuits. Recently, techniques have been developed for using submicrometer focused white and monochromatic x-ray beams at synchrotrons to obtain local orientation and strain information within individual grains of thin film materials. In this work, we use the x-ray microdiffraction beam line (7.3.3) at the Advanced Light Source to map the orientation and local stress variations in passivated Al(Cu) test structures (width: 0.7, 4.1 μm) as well as in Al(Cu) blanket films. The temperature effects on microstructure and stress were studied in those same structures by in-situ orientation and stress mapping during a temperature cycle between 25°C and 345°C. Results show large local variations in the different stress components which significantly depart from their average values obtained by more conventional techniques, yet the average stresses in both cases agree well. Possible reasons for these variations will be discussed.

White Beam Slits and Pink Beam Slits for the Hard X-ray Nanoprobe Beamline at the Advanced Photon Source

2007 ◽  
Author(s):  
C. Benson ◽  
Y. Jaski ◽  
J. Maser ◽  
T. Powers ◽  
O. Schmidt ◽  
...  
Keyword(s):  
X Ray ◽  
White Beam ◽  
Photon Source

An Electron Diffraction Study on Litnerized Potato Starch

1990 ◽  
Vol 48 (1) ◽  
pp. 580-581
Author(s):  
Jean-Claude Jésior ◽  
Roger Vuong ◽  
Henri Chanzy
Keyword(s):  
Electron Microscope ◽  
Electron Diffraction ◽  
Signal To Noise Ratio ◽  
Potato Starch ◽  
Image Intensifier ◽  
Electron Diffraction Study ◽  
Starch Granules ◽  
X Ray ◽  
Individual Grains ◽  
Diamond Knife

Starch is arranged in a crystalline manner within its storage granules and should thus give sharp X-ray diagrams. Unfortunately most of the common starch granules have sizes between 1 and 100μm, making them too small for an X-ray study on individual grains. There is only one instance where an oriented X-ray diagram could be obtained on one sector of an individual giant starch granule. Despite their small size, starch granules are still too thick to be studied by electron diffraction with a transmission electron microscope. The only reported study on starch ultrastructure using electron diffraction on frozen hydrated material was made on small fragments. The present study has been realized on thin sectioned granules previously litnerized to improve the signal to noise ratio.Potato starch was hydrolyzed for 10 days in 2.2N HCl at 35°C, dialyzed against water until neutrality and embedded in Nanoplast. Sectioning was achieved with a commercially available low-angle “35°” diamond knife (Diatome) after a very carefull trimming and a pre-sectioning with a classical “45°” diamond knife. Sections obtained at a final sectioning angle of 42.2° (compared with the usual 55-60°) and at a nominal thickness of 900Å were collected on a Formvar-carbon coated grid. The exact location of the starch granules in their sections was recorded by optical microscopy on a Zeiss Universal polarizing microscope (Fig. 1a). After rehydration at a relative humidity of 95% for 24 hours they were mounted on a Philips cryoholder and quench frozen in liquid nitrogen before being inserted under frozen conditions in a Philips EM 400T electron microscope equipped with a Gatan anticontaminator and a Lhesa image intensifier.

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