PVD Growth of FCC Metal Films On Single Crystal Si And Ge Substrates

1999 ◽  
Vol 562 ◽  
Author(s):  
K. H. Westmacott ◽  
S. Hinderberger ◽  
T. Radetic ◽  
U. Dahmen

ABSTRACTEpitaxial films of the fcc metals Al, Au, Ag and Ni were grown by physical vapor deposition on Si and Ge (111), (110) and (100) substrates at different deposition temperatures. The epitaxial relationships and morphological features of these films were characterized by transmission electron microscopy and diffraction in plan view and cross section. Ag formed single crystal films on all substrates at all temperatures. Au and Al could be grown as bicrystals, and under some conditions, Al and Ni grew as tricrystal films. The morphological effects of diffusion at the metal/substrate interface are ascribed to diffusion induced grain boundary migration.

1999 ◽  
Vol 577 ◽  
Author(s):  
K.H. Westmacott ◽  
S. Hinderberger ◽  
T. Radetic and U. Dahmen

ABSTRACTEpitaxial films of the fcc metals Al, Au, Ag and Ni were grown by physical vapor deposition on Si and Ge (111), (110) and (100) substrates at different deposition temperatures. The epitaxial relationships and morphological features of these films were characterized by transmission electron microscopy and diffraction in plan view and cross section. Ag formed single crystal films on all substrates at all temperatures. Au and Al could be grown as bicrystals, and under some conditions, Al and Ni grew as tricrystal films. The morphological effects of diffusion at the metal/substrate interface are ascribed to diffusion induced grain boundary migration.


Author(s):  
Frank E. Wawner ◽  
Kenneth R. Lawless

Thin single crystal films of high purity titanium were needed in our laboratory for investigations of the early stages of the oxidation of titanium. Experiments were carried out to determine the feasibility of preparing single crystal titanium films of different orientations by evaporation onto the (100), (110) and (111) surfaces of rocksalt. The structures of these films were investigated by transmission electron microscopy and electron diffraction.


1994 ◽  
Vol 343 ◽  
Author(s):  
Sundar Ramamurthy ◽  
Paul G. Kotula ◽  
C. Barry Carter

ABSTRACTPulsed-laser deposition has been used to grow thin films of the rock-salt and spinel structured oxides NiO, CoO and C03O4 on single-crystal substrates of α-Al2O3, MgO and C-Z1O2. The resultant microstructures were characterized in plan-view by transmission electron microscopy and by low-voltage scanning electron microscopy. In all the depositions, the parameters could be controlled to grow predominantly single-crystal films. In the NiO/(0001)α-Al2O3 and CoO/(100)c-ZrO2 systems, {111}-oriented films were observed which were found to be twinned close to 60° and 90° about <111> respectively. Growth of cobalt oxide films on (100) MgO at 800°C and 15 mTorr of oxygen produced {100}-oriented domains of C03O4 meeting at antiphase boundaries. These observations and other recent studies re-emphasize the role of substrate crystallography in governing the orientation relationships in the overlayer.


Author(s):  
L. E. Murr ◽  
G. Wong

Palladium single-crystal films have been prepared by Matthews in ultra-high vacuum by evaporation onto (001) NaCl substrates cleaved in-situ, and maintained at ∼ 350° C. Murr has also produced large-grained and single-crystal Pd films by high-rate evaporation onto (001) NaCl air-cleaved substrates at 350°C. In the present work, very large (∼ 3cm2), continuous single-crystal films of Pd have been prepared by flash evaporation onto air-cleaved (001) NaCl substrates at temperatures at or below 250°C. Evaporation rates estimated to be ≧ 2000 Å/sec, were obtained by effectively short-circuiting 1 mil tungsten evaporation boats in a self-regulating system which maintained an optimum load current of approximately 90 amperes; corresponding to a current density through the boat of ∼ 4 × 104 amperes/cm2.


2001 ◽  
Vol 27 (6) ◽  
pp. 451-453 ◽  
Author(s):  
S. S. Kucherenko ◽  
V. P. Pashchenko ◽  
P. I. Polyakov ◽  
S. I. Khartsev ◽  
V. A. Shtaba

Sign in / Sign up

Export Citation Format

Share Document