Low Stress Under Bump Metallizations for Direct Chip Attach

1998 ◽  
Vol 555 ◽  
Author(s):  
P. Su ◽  
T. M. Korhonen ◽  
S. J. Hong ◽  
M. A. Korhonen ◽  
C. Y. Li

AbstractIn order to use a flip chip method for bonding the Si chip directly to an organic substrate, compatible under bump metallization (UBM) must be available. Conventional schemes with a copper-based solderable layer are not well compatible with the high-tin solders (such as eutectic Pb-Sn) used with organic substrates. This is due to the rapid reaction between Sn and Cu which depletes the UBM of copper. Ni-based schemes exhibit slower reaction with the solder and have been identified by the semiconductor industry as preferable replacements to Cu-based UBM's. However, Ni-containing metallurgies are often associated with high stresses, which results in poor practical adhesion between the silicon chip and the metallization, leading to interfacial failure during fabrication or service. In this research, several nickel-containing UBM schemes are studied experimentally. Stress measurements are made for each metallization before patterning of UBM pads. An optimal Ni concentration for the UBM is suggested based on the results from this study.

Author(s):  
Andrew J. Komrowski ◽  
N. S. Somcio ◽  
Daniel J. D. Sullivan ◽  
Charles R. Silvis ◽  
Luis Curiel ◽  
...  

Abstract The use of flip chip technology inside component packaging, so called flip chip in package (FCIP), is an increasingly common package type in the semiconductor industry because of high pin-counts, performance and reliability. Sample preparation methods and flows which enable physical failure analysis (PFA) of FCIP are thus in demand to characterize defects in die with these package types. As interconnect metallization schemes become more dense and complex, access to the backside silicon of a functional device also becomes important for fault isolation test purposes. To address these requirements, a detailed PFA flow is described which chronicles the sample preparation methods necessary to isolate a physical defect in the die of an organic-substrate FCIP.


2011 ◽  
Vol 2011 (1) ◽  
pp. 000828-000836
Author(s):  
Yasumitsu Orii ◽  
Kazushige Toriyama ◽  
Sayuri Kohara ◽  
Hirokazu Noma ◽  
Keishi Okamoto ◽  
...  

The electromigration behavior of 80μm bump pitch C2 (Chip Connection) interconnection is studied and discussed. C2 is a peripheral ultra fine pitch flip chip interconnection technique with solder capped Cu pillar bumps formed on Al pads that are commonly used in wirebonding technique. It allows us an easy control of the space between dies and substrates simply by varying the Cu pillar height. Since the control of the collapse of the solder bumps is not necessary, the technology is called the “C2 (Chip Connection)”. C2 bumps are connected to OSP surface treated Cu substrate pads on an organic substrate by reflow with no-clean process, hence the C2 is a low cost ultra fine pitch flip chip interconnection technology. The reliability tests on the C2 interconnection including thermal cycle tests and thermal humidity bias tests have been performed previously. However the reliability against electromigration for such small flip chip interconnections is yet more to investigate. The electromigration tests were performed on 80μm bump pitch C2 flip chip interconnections. The interconnections with two different solder materials were tested: Sn-2.5Ag and Sn100%. The effect of Ni layers electroplated onto the Cu pillar bumps on electromigration phenomena is also studied. From the cross-sectional analyses of the C2 joints after the tests, it was found that the presence of intermetallic compound (IMC) layers reduces the atomic migration of Cu atoms into Sn solder. The analyses also showed that the Ni layers are effective in reducing the migration of Cu atoms into solder. In the C2 joints, the under bump metals (UBMs) are formed by sputtered Ti/Cu layers. The electro-plated Cu pillar height is 45μm and the solder height is 25μm for 80μm bump pitch. The die size is 7.3-mm-square and the organic substrate is 20-mm-square with a 4 layer-laminated prepreg with thickness of 310μm. The electromigration test conditions ranged from 7 to 10 kA/cm2 with temperature ranging from 125 to 170°C. Intermetallic compounds (IMCs) were formed prior to the test by aging process of 2,000hours at 150°C. We have studied the effect of IMC layers on electromigration induced phenomena in C2 flip chip interconnections on organic substrates. The study showed that the IMC layers in the C2 joints formed by aging process can act as barrier layers to prevent Cu atoms from diffusing into Sn solder. Our results showed potential for achieving electromigration resistant joints by IMC layer formation. The FEM simulation results show that the current densities in the Cu pillar and the solder decrease with increasing Cu pillar height. However an increase in Cu pillar height also leads to an increase in low-k stress. It is important to design the Cu pillar structure considering both the electromigration performance and the low-k stress reduction.


2007 ◽  
Vol 129 (4) ◽  
pp. 460-468 ◽  
Author(s):  
Karan Kacker ◽  
Thomas Sokol ◽  
Wansuk Yun ◽  
Madhavan Swaminathan ◽  
Suresh K. Sitaraman

Demand for off-chip bandwidth has continued to increase. It is projected by the Semiconductor Industry Association in their International Technology Roadmap for Semiconductors that by the year 2015, the chip-to-substrate area-array input-output interconnects will require a pitch of 80 μm. Compliant off-chip interconnects show great potential to address these needs. G-Helix is a lithography-based electroplated compliant interconnect that can be fabricated at the wafer level. G-Helix interconnects exhibit excellent compliance in all three orthogonal directions, and can accommodate the coefficient of thermal expansion (CTE) mismatch between the silicon die and the organic substrate without requiring an underfill. Also, these compliant interconnects are less likely to crack or delaminate the low-k dielectric material in current and future integrated circuits. The interconnects are potentially cost effective because they can be fabricated in batch at the wafer level and using conventional wafer fabrication infrastructure. In this paper, we present an integrative approach, which uses interconnects with varying compliance and thus varying electrical performance from the center to the edge of the die. Using such a varying geometry from the center to the edge of the die, the system performance can be tailored by balancing electrical requirements against thermomechanical reliability concerns. The test vehicle design to assess the reliability and electrical performance of the interconnects is also presented. Preliminary fabrication results for the integrative approach are presented and show the viability of the fabrication procedure. The results from reliability experiments of helix interconnects assembled on an organic substrate are also presented. Initial results from the thermal cycling experiments are promising. Results from mechanical characterization experiments are also presented and show that the out-of-plane compliance exceeds target values recommended by industry experts. Finally, through finite element analysis simulations, it is demonstrated that the die stresses induced by the compliant interconnects are an order of magnitude lower than the die stresses in flip chip on board (FCOB) assemblies, and hence the compliant interconnects are not likely to crack or delaminate low-k dielectric material.


1994 ◽  
Vol 30 (6) ◽  
pp. 237-246 ◽  
Author(s):  
A. Carucci ◽  
M. Majone ◽  
R. Ramadori ◽  
S. Rossetti

This paper describes a lab-scale experimentation carried out to study enhanced biological phosphate removal (EBPR) in a sequencing batch reactor (SBR). The synthetic feed used was based on peptone and glucose as organic substrate to simulate the readily biodegradable fraction of a municipal wastewater (Wentzel et al., 1991). The experimental work was divided into two runs, each characterized by different operating conditions. The phosphorus removal efficiency was considerably higher in the absence of competition for organic substrate between P-accumulating and denitrifying bacteria. The activated sludge consisted mainly of peculiar microorganisms recently described by Cech and Hartman (1990) and called “G bacteria”. The results obtained seem to be inconsistent with the general assumption that the G bacteria are characterized by anaerobic substrate uptake not connected with any polyphosphate metabolism. Supplementary anaerobic batch tests utilizing glucose, peptone and acetate as organic substrates show that the role of acetate in the biochemical mechanisms promoting EBPR may not be so essential as it has been assumed till now.


2021 ◽  
Vol 332 ◽  
pp. 07001
Author(s):  
Thanh Tran ◽  
Van Thi ◽  
Tran Thi Bich Phuong ◽  
Loc Huu Ho ◽  
Le Thi Anh Hong

In recent years, jackfruit production in Vietnam has been growing very strongly in both quantity and quality. However, most of the jackfruit is harvested and processed for meat, the rest is the jackfruit peels, and fibers are discarded, which will affect environmental sanitation. The study aims to enhance the value of jackfruit by taking advantage of nutrient ingredients in the peel and fiber of jackfruit to blend into organic fertilizer. Initial results show that the compost substrate samples mixed with rice husk ash and coir and the organic substrate sample mixed with coconut fiber had the best quality. Tested nutritional ingredients include including humidity is 76.1%, total organic carbon content is 27.3%, fulvic acid is 0.9%, humid acid is 0.9%, total nitrogen is 0.85%, total phosphorus is 0.57% after 35 days of incubation. Their quality meets the national standards of QCVN 01-189: 2019/BNNPTNT on fertilizer quality. After testing all three samples of organic substrates on the green mustard with germination rate (%), a number of branches, and total fresh weight (g), the results showed that test plants are grown with the compost from the shell - jackfruit fiber mixed with coconut fiber developed better than the control sample.


2020 ◽  
Vol 2020 (1) ◽  
pp. 000078-000084
Author(s):  
Hao Zhuang ◽  
Robert Bauer ◽  
Markus Dinkel

Abstract In the power semiconductor industry, there is continuous development towards higher maximum current capability of devices while device dimensions shrink. This leads to an increase in current density which the devices have to handle, and raises the question if electromigration (EM) is a critical issue here. Generally, an EM failure can be described by the Black’s equation with temperature and current density as the main influencing factors. Normally, the current that the power packages need to handle lies in the range of 100 A. However, it should be noted that power devices exhibit asymmetric sizes of drain and source contacts. This may lead to higher current density at the source leads (area ratio drain/source: ~8x for QFN 5×6). Nevertheless, the source lead area is still much larger than that of the flip chip bumps (i.e., 28 times larger compared to a 100 μm micro-bump). This typically enhances the safety of the power device with respect to EM. However, with regard to future development towards higher maximum current capability, we intended to investigate further on the EM of power devices. In the present work, we focused on the PQFN 5×6 package to study the EM behavior of a power device soldered on a Printed Circuit Board (PCB). We employed the highest current (120 A) and temperature (150 °C) that the stress test system could handle to study EM in accelerated mode. First fails occurred after ~1200 h, which was much earlier than expected from previous flip-chip investigations. In addition, we found separation gaps in the solder joint between drain contact and PCB, which experienced the lowest current density in the whole test. Contradictorily, we observed only minor solder degradation at the source interface, regardless of the higher current density there. Nevertheless, the separating metal interfaces still correlated well with the current direction. Thermal simulations revealed that due to the self-heating of the device by the high current applied, both the drain and source leads were exposed to much higher temperatures (Tmax = 168 °C) than the PCB board which was kept under temperature control at 150 °C. This temperature difference resulted in a thermal gradient between the device and PCB which, in turn, triggered thermal migration (TM) in addition to EM. As TM for the drain contact occurred in the same direction as EM, it enhanced the degradation effect and therefore led to a shorter time-to-failure at the drain. In contrast to this, such an enhanced effect did not occur at the source side. As a result, we observed higher solder degradation at the drain side, which we did confirm by switching the current direction in the test. To minimize the TM effect, a special EM test vehicle, which used a Cu plate instead of the MOSFET chip, was designed and fabricated. Thermal simulation verified that the device operated at similar temperatures as the PCB board. Using this setup, it was possible to study EM in an accelerated mode and, thus, investigate the pure EM behavior of the power device.


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