Arf Excimer Laser and Xe2· Excimer Lamp Induced Photochemical Fluorination of Polyimide Film

1998 ◽  
Vol 544 ◽  
Author(s):  
T. Ikegame ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
Chemical Composition ◽  
Excimer Laser ◽  
Water Repellency ◽  
Polyimide Film ◽  
Dangling Bond ◽  
Weak Point ◽  
Excimer Lamp ◽  
Chemically Modified ◽  
Arf Excimer Laser

AbstractOnly one weak point of all aromatic group polyimide surface was changed to water repellency. Polyimide surface was photo-chemically modified to be fluorinate with ArF excimer laser and Xe2 · excimer lamp irradiation. To promote the photo- chemical reaction, Xe2· excimer lamp was employed to produce CFn. radical from CF4 gas. Simultaneously, ArF excimer laser was irradiated on the polyimide surface to dissociate C-H bond. Dangling bond of C was reacted with CF, radical and produced C-CF, on the polyimide surface. By this modification, polyimide surface was changed to water repellency. As a result, polyimide surface was photo-chemically modified to fluorinate with CF4 gas pressure of 100Torr, the Xe2 excimer lamp of 7mW/cm2, and the ArF excimer laser of 30mJ/cm2, 10Hz and 3000shots, the contact angle with water was 134 degrees. And chemical composition of the photo-modified polyimide surface was inspected by ATR-FTIR spectra measurement.

High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

1996 ◽  
Vol 451 ◽  
Author(s):  
T. Shimizu ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
High Resolution ◽  
Laser Beam ◽  
Thin Layer ◽  
Functional Groups ◽  
Excimer Laser ◽  
Laser Fluence ◽  
Large Area ◽  
Three Solutions ◽  
Arf Excimer Laser

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.

Inner Pore of Porous Fluoropolymer to Hydrophilic by using UV Light and H20 Vapor

1998 ◽  
Vol 544 ◽  
Author(s):  
Shinsuke Ito ◽  
Masataka Murahara
Keyword(s):  
Contact Angle ◽  
Excimer Laser ◽  
Water Permeability ◽  
Uv Light ◽  
Ethanol Solution ◽  
Oh Radicals ◽  
Arf Excimer Laser ◽  
Inner Pore

AbstractInner pores of porous PTFE was modified photochemically by using ArF excimer laser for improvement of water permeability. In this study, two modification methods are described. One is using ethanol solution, and another is H20 vapor as a reaction gas. These reaction sources were employed for modification of inner pores. In the case of using ethanol solution, the modified sample indicates both hydrophilication and oleophilication. On the contrary, the hydrophilic groups are substituted into the inner pore with H20 vapor. The hydrophilication of modified samples were evaluated by the measurement of contact angle with water and water permeability. The substituted OH radicals were inspected by ATR-FTIR measurement.

ArF Laser Induced Photochemical Substitution of OH Radicals into Teflon Surface Using Al(OH)3 Solution

1992 ◽  
Vol 279 ◽  
Author(s):  
M. Okoshi ◽  
H. Kashiura ◽  
T. Miyokawa ◽  
K. Toyoda ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
Excimer Laser ◽  
Laser Light ◽  
Water Solution ◽  
Sample Surface ◽  
Oh Radicals ◽  
Xps Analysis ◽  
Air Atmosphere ◽  
Arf Excimer Laser ◽  
Teflon Film

ABSTRACTOH radicals were photochemically substituted for fluorine atoms in the teflon surface by using an ArF excimer laser light and an Al(OH)3 solution. This method is simple and can be performed in air atmosphere. In the process, the teflon film was placed on the Al(OH)3 which were dissolved in NaOH water solution; the ArF excimer laser light was irradiated the sample surface and the solution. By irradiating the laser, the surface was defluorinated by the aluminium atoms photodissociated from the Al(OH)3 solution, and the dangling bonds which were formed in the defluorinated surface combined with the OH radicals also photodissociated. The hydrophilic property of the photomodified surface was evaluated by the measurement of the contact angle with water. The defluorination and the OH radicals substitution were inspected by the XPS analysis and the ATR-FTIR measurement.

Comparison with Amino Group and Hydrophilic Group for Protein Afftnity by Excimer Laser Induced Functional Groups Substitution Onto Pet Film

2002 ◽  
Vol 735 ◽  
Author(s):  
Hitoshi Omuro ◽  
Masato Nakagawa ◽  
Hiroaki Fukuda ◽  
Masataka Murahara
Keyword(s):  
Contact Angle ◽  
Functional Groups ◽  
Excimer Laser ◽  
Bonding Strength ◽  
Functional Group ◽  
Laser Light ◽  
Artificial Ligament ◽  
Untreated Sample ◽  
Ammonia Gas ◽  
Arf Excimer Laser

ABSTRACTPET has been widely used for medical materials such as an artificial ligament. However, the affinity of tissues is no good. To compensate this, the mesh formed PET has clinically been used for artificial ligament intruding tissue into mesh. However, this method has not shown sufficient affinity with the tissue; that is, the initial adapting strength of the material and tissue is weak. · The artificial ligament must be biocompatible to contact blood and tissue. The foregoing artificial ligament, however, doesn't satisfy the biocompatibility. ·Thus, we have modified the PET surface into hydrophilic by substituting NH2 or OH functional groups. Firstly, an ArF excimer laser light was irradiated the PET with water on top. The OH functional group was substituted on the PET surface by this photochemical reaction. Secondly, the ArF excimer laser light was irradiated the PET in ammonia gas ambient. In this photochemical reaction, the NH2 functional group was substituted on the PET surface.· In this study, the untreated sample had the contact angle with water of 80 degrees and the bonding strength with protein of only 1.0kg/cm2. The contact angle of the modified sample improved to 40 degrees and the bonding strength, to 23kg/cm2. When treated in ammonia gas, the contact angle also improved to 40 degrees; however, the bonding strength was almost the same as that of the untreated sample.It was confirmed that the affinity of the PET for water and protein could be controlled by increasing or decreasing the substitution concentration of OH and NH2 functional groups on the surface.

Patterned ZnS Thin-Film Growth using KrCl Excimer Lamp on the Zn Nuclei

1999 ◽  
Vol 585 ◽  
Author(s):  
M. Toda ◽  
H. Lizuka ◽  
M. Murahara
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Film Growth ◽  
Thin Film Growth ◽  
Single Shot ◽  
Si Substrate ◽  
Excimer Lamp ◽  
Arf Excimer Laser

AbstractPatterned Zn nuclei were formed by exposure with a single shot of an ArF excimer laser through a patterned photo mask onto a Si substrate which adsorbed DMZ (dimethylezinc). A ZnS thin film was then grown only onto the patterned Zn nuclei by KrCl excimer lamp irradiation of the substrate which was sealed in the chamber along with DMZ and H2S.

Electrowetting–induced photochemical surface modification onto fluorocarbon

2005 ◽  
Vol 890 ◽  
Author(s):  
Hiroyuki Anai ◽  
Yuji Sato ◽  
Masataka Murahara
Keyword(s):  
Contact Angle ◽  
Surface Modification ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
High Voltage ◽  
Sample Surface ◽  
Hydrophilic Property ◽  
Voltage Application ◽  
Arf Excimer Laser ◽  
The Moment

ABSTRACTThe PTFE was modified into hydrophilic with 1/100 of the shots number required to obtain the same contact angle with water by the laser irradiation alone, when irradiating an ArF excimer laser on the sample surface at the moment of applying a 6 kV to the water placed on the PTFE surface to decrease the contact angle with water.A plasma treatment method is widely used for plastic surface modification, but the hydrophilic property generated by this method fades away soon. On the other hand, we have previously reported that the ArF excimer laser light was applied on a sample surface in the presence of water to substitute hydrophilic groups, which was modified to have a long–lasting hydrophilic property. This method, however, needed 3000 to 10000 shots of the laser irradiation, and it is less economical compared with the plasma processing that requires only one–minute irradiation. There is an electro–wetting method, in which the contact angle with water decreases temporarily when a high voltage is applied between the water and the sample, but the contact angle is restored to its original position when stopping the voltage application.Thus, we demonstrated the surface modification of PTFE maintaining the hydrophilic property for a long period with only 100 shots, by irradiating the ArF excimer laser on the sample at the moment when the wettability became high by the electro–wetting method. Water was placed in the gap between the silica glass and the PTFE to create a thin liquid layer with capillary phenomenon. A high voltage (6 kV) of direct current (DC) or alternating current (AC) was applied on the gap, and the ArF excimer laser was vertically irradiated on the sample surface. The water was photo–dissociated to produce H and OH. At the same time, the C—F bond of the PTFE was also photo–dissociated, and the F atom bonded to the H atom to produce HF. The OH group united with the dangling bond of C, which resulted in modifying the PTFE surface to be hydrophilic.To evaluate the wettability of the modified sample, the contact angle with water was measured. Improving the contact angle with water from 110 degrees for the untreated sample to 50 degrees for the treated sample had needed 10000 shots at the laser fluence of 5 mJ/cm2. By combined high voltage application and ArF excimer laser irradiation treatments, however, the 50–degree contact angle was yielded with 500 shots, 1/20 of 10000, when applying the DC of 6 kV, and with 100 shots only, 1/100 of 10000, when applying the AC of 6 kV. Moreover, the modified sample was observed for a change in contact angle with passage of time. The contact angle was 60 degrees after applying the high voltage, and 110 degrees when stopped. On the other hand, the sample modified by combined the high voltage application and ArF excimer laser irradiation maintained the 50–degree contact angle for one month after stopping the voltage application.

Use of an Excimer Lamp for Photochemical Resistless Etching of Thermal Silicon Oxide Substrate

1995 ◽  
Vol 397 ◽  
Author(s):  
N. Kamata ◽  
M. Murahara
Keyword(s):  
Excimer Laser ◽  
Decomposition Method ◽  
Silicon Oxide ◽  
Etching Depth ◽  
Excimer Lamp ◽  
Oxide Substrate ◽  
Arf Excimer Laser ◽  
Krf Excimer Laser ◽  
Decomposition Efficiency

ABSTRACTPhotochemical resistless etching was carried out by using a Xe2* excimer lamp and a KrF excimer laser. The decomposition method with Xe2* excimer lamp increases the decomposition efficiency by 100 times than that of using ArF excimer laser and etchant gas, CHClF2. Xe2* excimer lamp irradiation allowed decomposition of CHClF2 gas to produce CF2 radical with a small quantity of gas. The CF2 radical was polymerized to form fluorocarbon layer on the SiO2 substrate. Simultaneously, circuit patterned KrF excimer laser was vertically irradiated the fluorocarbon layer on the substrate for resistless etching. The etching depth was about 1,000Â.

Photochemical Micro-pattern Substitution of Functional Groups for Protein Attachment Control

2006 ◽  
Vol 950 ◽  
Author(s):  
Masataka Murahara ◽  
Yuji Sato
Keyword(s):  
Absorption Coefficient ◽  
Excimer Laser ◽  
Area Ratio ◽  
Water Contact ◽  
Oh Groups ◽  
Excimer Lamp ◽  
Micro Pattern ◽  
Pmma Surface ◽  
Modified Surface ◽  
Arf Excimer Laser

ABSTRACTHydrophilic and hydrophobic groups were selectively incorporated on the poly(methyl methacrylate) [PMMA] surface using a Xe2 excimer lamp and ArF excimer laser. With this new technique, a protein adsorption on the PMMA surface can be controlled.PMMA was firstly irradiated with a Xe2 excimer lamp in the presence of perfluoropolyether [PFPE] liquid layer to incorporate CF3 groups, and secondly, the PMMA surface was irradiated by an ArF excimer laser through a patterned reticle in the presence of water to incorporate OH groups or NH2 groups in an ammonia gas ambience. The area ratio of hydrophilic and hydrophobic of the modifying sample was made to 1:3, 1:1, and 3:1. The results showed that the fibrin absorption on the sample with hydrophilic and hydrophobic micro domains depended on the area ratio of the hydrophilic and hydrophobic. The absorption coefficient of the amide band remarkably decreased with increase in water contact angle. Furthermore, it was confirmed that the absorption coefficient of fibrin decreased as the interval of CF3 and OH or NH2 groups was narrowed from 250 to 20 μm, and the fibrin sticking on the modified surface with the 20 μm hydrophilic and hydrophobic micro domains was reduced to one-twenty of that on the untreated sample.

scholarly journals Surface modification of PMMA polymer and its composites with PC61BM fullerene derivative using an atmospheric pressure microwave argon plasma sheet

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Andrzej Sikora ◽  
Dariusz Czylkowski ◽  
Bartosz Hrycak ◽  
Magdalena Moczała-Dusanowska ◽  
Marcin Łapiński ◽  
...  
Keyword(s):  
Contact Angle ◽  
Surface Modification ◽  
Chemical Composition ◽  
Water Contact Angle ◽  
Plasma Sheet ◽  
Atmospheric Pressure ◽  
Argon Plasma ◽  
Fullerene Derivative ◽  
Water Contact ◽  
Pmma Polymer

AbstractThis paper presents the results of experimental investigations of the plasma surface modification of a poly(methyl methacrylate) (PMMA) polymer and PMMA composites with a [6,6]-phenyl-C61-butyric acid methyl ester fullerene derivative (PC61BM). An atmospheric pressure microwave (2.45 GHz) argon plasma sheet was used. The experimental parameters were: an argon (Ar) flow rate (up to 20 NL/min), microwave power (up to 530 W), number of plasma scans (up to 3) and, the kind of treated material. In order to assess the plasma effect, the possible changes in the wettability, roughness, chemical composition, and mechanical properties of the plasma-treated samples’ surfaces were evaluated by water contact angle goniometry (WCA), atomic force microscopy (AFM), attenuated total reflectance Fourier transform infrared spectroscopy (ATR-FTIR) and X-ray photoelectron spectroscopy (XPS). The best result concerning the water contact angle reduction was from 83° to 29.7° for the PMMA material. The ageing studies of the PMMA plasma-modified surface showed long term (100 h) improved wettability. As a result of plasma treating, changes in the samples surface roughness parameters were observed, however their dependence on the number of plasma scans is irregular. The ATR-FTIR spectra of the PMMA plasma-treated surfaces showed only slight changes in comparison with the spectra of an untreated sample. The more significant differences were demonstrated by XPS measurements indicating the surface chemical composition changes after plasma treatment and revealing the oxygen to carbon ratio increase from 0.1 to 0.4.

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