Characterization of Thin Titanium and Titanium Nitride Layers Using Sims

1998 ◽  
Vol 514 ◽  
Author(s):  
Andrei V. Li-Fatou ◽  
Mauro R. Sardela ◽  
Chunsheng Tian

ABSTRACTTitanium (Ti) and titanium nitride (TiN) films are widely used as barrier stack to prevent junction spiking. It is also an important material for an anti-reflection coating (ARC) on aluminum (Al) films to facilitate lithography processes during multilevel metallization for the manufacture of integrated circuits on silicon-based (Si) semiconductor devices. Secondary Ion Mass Spectrometry (SIMS) is proven to be very powerful analytical technique for the semiconductor materials. However, quantitative analysis of very thin structures using SIMS constitutes an ultimate challenge since a large fraction of the profile is located in the transient region where a stable concentration of primary beam species has not been established.This paper reports a SIMS technique for advanced characterization of very thin titanium and titanium nitride layers. Improvements in depth resolution were achieved by reducing the angle of incidence and the impact energy maintaining enhanced ionization yield associated with oxygen bombardment. Significant improvements in characterization of the film surface were developed by using oxygen flooding technique. Optimized oxygen pressure was used to achieve a stable ion yield due to the complete surface oxidation of titanium and titanium nitride layers during the analysis. The method was employed in the SIMS characterization of multiple Ti/TiN films deposited on silicon substrate. The example presents dramatic enhancement in depth resolution due to minimized matrix related ion yield variations at the interfaces.

Author(s):  
Weiqi Xu ◽  
Chun Chen ◽  
Yanmei Qiu ◽  
Conghui Xie ◽  
Yunle Chen ◽  
...  

Organic aerosol (OA), a large fraction of fine particles, has a large impact on climate radiative forcing and human health, and the impact depends strongly on size distributions. Here we...


2020 ◽  
Author(s):  
Jose Antonio Manrique-Martinez ◽  
Marco Veneranda ◽  
Guillermo Lopez-Reyes ◽  
Aurelio Sanz-Arranz ◽  
Jesus Saiz ◽  
...  

<p>Raman Spectroscopy is an analytical technique that will be deployed on Mars in the following years and could be part of other payloads for planetary exploration missions in the future. Its ability for identification of mineral phases and its interest in Mars has been deeply discussed in bibliography [1]. Perseverance rover, to be launched in 2020, and ExoMars rover, to be launched in 2022, will carry three Raman instruments, different in concept and capabilities. SHERLOC (mounted on Perseverance’s arm) is a UV Raman instrument mainly focused in the direct detection of biomarkers, SuperCam (mounted on Perseverance’s mast) is a standoff, multi-technique, instrument that performs Raman and LIBS at distances of several meters from the rover. Finally, RLS, mounted in Rosalind Franklin Rover, in the Pasteur analytical laboratory, is a continuous wave, 532 nm excitation source Raman instrument. While the first one is focused in detection limits of organics, RLS is intended to investigate mineralogy and possible biomarkers, while SuperCam, due to its standoff and time resolved design, is a different concept to que other two Raman instruments, as it is also capable of fusing data from different techniques.</p> <p> </p> <p>Carbonates are minerals of great interest for astrobiology, and, as suggested by CRISM data, the landing site selected for the NASA/Mars 2020 rover mission (Jezero crater) presents a variety of Fe-Ca-Mg carbonate units [2]. For Oxia Planum, Rosalind Franklin’s landing site, although no carbonates have been detected in that area by orbiter data, Earth analogues suggest that small amounts of carbonates might be found in the clay rich area. On Earth, top bench Raman spectrometers can be effectively used to discriminate carbonates and to determine the Mg/Fe concentration ratio of mineral species from dolomite (CaMg(CO<sub>3</sub>)<sub>2</sub>) - ankerite (CaFe(CO<sub>3</sub>)<sub>2</sub>) and magnesite (MgCO<sub>3</sub>) - siderite (FeCO<sub>3</sub>) solid solutions series [3]. The previously mentioned instruments might present limitations derived from the design constrains of space exploration. Resolution, far from ideal, and low intensity of the signal, are two of the main factors that could affect the possible calculations done with data from the three Raman instruments. SuperCam is a special case, as it is able to obtain data from several techniques from the same spot of the sample, and that might help to overcome those difficulties.</p> <p> </p> <p>In this work a complete set of Ca-Mg-Fe carbonates is analysed by different Raman instruments, including automated contact instruments and combined standoff developments. The initial characterization of the samples is done with XRD, as gold standard. Then, a characterization of all those carbonates based only on Raman data sets was done, aiming to evaluate the impact of resolution in the classification power of Raman-based calculations. A detailed vibrational mode analysis was carried out for interpreting the structural modifications induced by cationic substitution. Here, after a detailed interpretation it was found that Raman active internal modes are less sensitive to the carbonate chemistry than the external modes (i.e. the 155cm-1 and 286cm-1 respectively).</p> <p> </p> <p>Same collection of carbonates is analysed using standoff Raman-LIBS combination. In this case we will evaluate how having the complementary information of the elemental composition improves the results obtained by standoff Raman spectroscopy [4], as LIBS is more sensitive to the possible changes in the cations in the samples. Using these data sets, a combination of univariate and multivariate calculations are done to evaluate their classification capacity. As commented before, LIBS can classify better these minerals thanks to its lower detection limit and a better functionality in standoff configuration. However, the effect from other phases, different from carbonates, might disturb the LIBS calculations, reason why having an assessment of all the phases in play by Raman spectroscopy is of great interest, supporting the idea of the power of technique combination.</p> <p>1    F. Rull, S. Maurice, I. Hutchinson et al. Astrobiology, Vol. 17 (2017), No. 6-7</p> <p>2    B.H.N. Horgan, R.B. Anderson, G. Dromart, E.S. Amador, M.S. Rice Icarus, <strong>339 </strong>(2020) 113526.</p> <p>3    P. Kristova, L. Hopkinson, K. Rutt, H. Hunter, G. Cressey, American Mineralogist, <strong>98</strong> (2013) 401-409.</p> <p>4    J.A. Manrique-Martinez et al. Journal of Raman Spectroscopy (2020) 1-16.</p>


2021 ◽  
Vol 9 ◽  
Author(s):  
Franciele Carlesso ◽  
Luis E. A. Vieira ◽  
Luiz A. Berni ◽  
Graziela da S. Savonov

Absolute radiometers are based on electrical substitution radiometers, which compare optical and electrical power. The same physical principle applies to standard reference detectors operating at cryogenic temperatures and room temperature radiometers for total solar irradiance (TSI) measurements. Both types rely on the cavity with an internal low-reflectance coating to absorb incident radiation similar to a black body. The cavity shape design requires an analysis of the coating reflection properties. Like many materials, ultra-black Ni-P exhibits a mixture of diffuse and specular reflection that depends on the angle of incidence of light in the pores. We employed ray-tracing software to study the impact of the geometry on the absorptivity and distribution of the scattered rays. We describe the scattering model of the black coating in terms of the bidirectional reflectance distribution function. Also, we examined the difficulties of Ni-P electroless deposition and blackening inside the cavity. The measured absorptance of the cavity showed some discrepancies of the simulated absorptance mostly probably due to Ni-P non-uniformity coating.


Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Zhandong Li ◽  
Dmitry Kurouski

Abstract Illumination of noble metal nanostructures by electromagnetic radiation induces coherent oscillations of conductive electrons on their surfaces. These coherent oscillations of electrons, also known as localized surface plasmon resonances (LSPR), are the underlying physical cause of the electromagnetic enhancement of Raman scattering from analytes located in a close proximity to the metal surface. This physical phenomenon is broadly known as surface-enhanced Raman scattering (SERS). LSPR can decay via direct interband, phonon-assisted intraband, and geometry-assisted transitions forming hot carriers, highly energetic species that are responsible for a large variety of chemical transformations. This review critically discusses the most recent progress in mechanistic elucidation of hot carrier-driven chemistry and catalytic processes at the nanoscale. The review provides a brief description of tip-enhanced Raman spectroscopy (TERS), modern analytical technique that possesses single-molecule sensitivity and angstrom spatial resolution, showing the advantage of this technique for spatiotemporal characterization of plasmon-driven reactions. The review also discusses experimental and theoretical findings that reported novel plasmon-driven reactivity which can be used to catalyze redox, coupling, elimination and scissoring reactions. Lastly, the review discusses the impact of the most recently reported findings on both plasmonic catalysis and TERS imaging.


1989 ◽  
Vol 162 ◽  
Author(s):  
R. S. Hockett ◽  
James Knowles

ABSTRACTIntentionally contaminated DC and microwave plasma deposited diamond films were used to evaluate the characterization capability of SIMS, TXRF and RBS for heavy metal measurements. The results showed SIMS is the preferred analytical technique for heavy metal impurities in the diamond films, and TXRF for the top surface analysis of the substrate and pre-processed substrate. In addition TXRF may provide a quick, non-destructive qualitative characterization of the diamond film surface and bulk. The RBS can provide qualitative and quantitative information if the impurity levels are high enough (above 1013 atoms/cm2).


2007 ◽  
Vol 554 ◽  
pp. 219-224 ◽  
Author(s):  
G. Deniz ◽  
Şaduman Şen ◽  
Uğur Şen

In this work, some surface properties of AISI M2 steel were improved by a thermoreactive deposition process. Gas nitriding was realized on AISI M2 steel at 550°C for 2 h in an ammoniac atmosphere and then, titanizing treatment performed on pre-nitrided steel in the powder mixture consisting of ferro-titanium, ammonium chloride and alumina at 1000°C for 1-4 h. Structural characterization of titanium nitride layer formed on the surface of AISI M2 steel was carried out by using optical microscopy, scanning electron microscopy, electron microprobe and Xray diffraction (XRD) analysis. The hardness measurements of titanium nitride layer were conducted under 10 g loads by using Vickers microhardness indenter. Structural analysis studies showed that titanium nitride layers formed on the AISI M2 steel samples were smooth, compact and homogeneous. XRD analysis show that the coating layer formed on the steel samples includes TiN, Fe6Mo7N2, C0.7N0.3Ti, C0.3N0.7Ti and V2N phases. The hardness of titanium nitride layers formed on the steel samples is between 2040±186 and 2418±291 HV0.01. The thickness of titanium nitride layer formed on the steel samples ranged from 3.86±0.43 9m to 6.13±0.47 9m, depending on treatment time.


2008 ◽  
Vol 47-50 ◽  
pp. 1093-1096
Author(s):  
Wen Song Lin ◽  
Jing Chen ◽  
Ji Zhou

Iron-doped titanium nitride films deposed on glass substrates were prepared by magnetron sputtering technique. X-ray diffraction (XRD) was employed to analyze the phases existed in the films. Investigations have shown that as-deposited films were XRD-amorphous, and the TiN phase was formed in the film after additional annealing. It was found that iron-doped TiN films preserved the same crystal structure as TiN. The ferromagnetic properties of iron doped TiN films have been measured using vibrating sample magnetometer (VSM), and the electric resistances of the films were also determined by IR four-probe methods. The experiment results proved that the iron-doped TiN films possessed ferromagnetic property with low electric resistance at room temperature. It was investigated that the saturation magnetization was about 2.21×108 A/m, the coercivity about 23 kA/m, and the electric resisitivity 1.401×10-6 3•m for typical Fe-doped-TiN-films sample.


1998 ◽  
Vol 125 (2) ◽  
pp. 129-136 ◽  
Author(s):  
G. Wiener ◽  
S.J. Kidd ◽  
C.A.H. Mutsaers ◽  
R.A.M. Wolters ◽  
P.K. de Bokx

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