Material Aspects of A-Sin:H Based 2D Direct X-Ray Sensor Array
ABSTRACTThe possibility of creating an 2D X-ray sensor array on the base of a-SiN:H thin films without switching elements and an X-ray conversion layer is presented in this report. The behavior of a-SiN:H Thin-Film Diode under X-ray irradiation, its limitations, and ways of increasing long-term stability and sensitivity of the sensor are discussed.
Keyword(s):
2020 ◽
Vol 8
(39)
◽
pp. 20658-20665
◽
Keyword(s):
2020 ◽
Vol 8
(34)
◽
pp. 17420-17428
◽