Cesium-Enhanced R. F. Magnetron Deposition of Carbon Nitride and Diamond-Like Carbon Films

1997 ◽  
Vol 498 ◽  
Author(s):  
I. H. Murzin ◽  
M. A. Hussain ◽  
G. S. Tompa
Keyword(s):  
Carbon Nitride ◽  
Low Voltage ◽  
Carbon Films ◽  
Ion Source ◽  
Diamond Like Carbon ◽  
Carbon Ions ◽  
Nitrogen Gas ◽  
Carbon Target ◽  
Ion Extraction ◽  
Surface Work

ABSTRACTWe report the design, manufacturing, and testing of a new cesium enhanced negative carbon ion source that can be useful to synthesize hard and/or electron emitting carbon nitride and diamond-like carbon (DLC) thin films. The design of the source includes a conventional magnetron-sputtering gun, low voltage ion extraction lenses, and a cesium oven to provide cesium vapor for formation of a fractional mono layer of Cs on the carbon target. Cs reduces the surface work function of the carbon target and enhances the emission of negative carbon ions. Argon and argon-nitrogen gas mixtures were used to ignite and sustain the plasma in the chamber. We compare the properties of carbon nitride and DLC films deposited with and without cesium. Nitrogen composition in the Ar-N2 gas mixture was observed to be an important process parameter affecting mechanical properties of the film. The effect of the Cs oven temperature on deposition rate and current absorbed at the substrate was also investigated for RF powers from 0 to 150 W.

SYNTHESIS OF DIAMOND-LIKE CARBON FILMS USING A BI-MODAL SPUTTER DEPOSITION WITH Xe IONS

2007 ◽  
Vol 14 (04) ◽  
pp. 735-738 ◽  
Author(s):  
MAKSYM RYBACHUK ◽  
JOHN M. BELL
Keyword(s):  
Ion Beam ◽  
Incident Beam ◽  
Carbon Films ◽  
Ion Source ◽  
Diamond Like Carbon ◽  
Additional Energy ◽  
Carbon Target ◽  
Alternative Approach ◽  
Ion Energies ◽  
Grazing Angles

An alternative approach to a sputtering process was examined where a single incident beam of Xe ions was used to simultaneously sputter a carbon target and bombard a growing film. The hypothesis that by positioning a substrate at grazing angles to the central axis of the ion beam, the additional energy provided will be beneficial to the formation of sp3 bonding. Amorphous carbon (a- C ) and diamond-like carbon (DLC) films were synthesized by sputtering a graphite target from a Kaufmann-type ion source. Experimental results revealed that when a substrate was placed at grazing angles due to a secondary resputtering process, it was not possible to fabricate DLCs but only sp2-rich polymeric a- C . For DLC synthesis the optimal angles of the target and the substrate to the ion flux were found to be 30° and 0°, respectively, and the ion energies of 0.8–1 keV.

scholarly journals Energy distribution of the compact microwave ion source for extremely low voltage ion extraction

2002 ◽  
Vol 73 (2) ◽  
pp. 758-760 ◽  
Author(s):  
Y. Gotoh ◽  
K. Nakajima ◽  
T. Hagiwara ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Energy Distribution ◽  
Low Voltage ◽  
Ion Source ◽  
Ion Extraction ◽  
Microwave Ion Source

scholarly journals Deposition of Dlc Via Intense Ion Beam Ablation

1993 ◽  
Vol 316 ◽  
Author(s):  
Gregory P. Johnston ◽  
Prabhat Tiwari ◽  
Donald J. Rej ◽  
Harold A. Davis ◽  
William J. Waganaar ◽  
...  
Keyword(s):  
Pulse Width ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Carbon Ions ◽  
Graphite Target ◽  
Deposition Rates ◽  
Micron Size ◽  
Electrical Resistivities ◽  
Electron Energy Loss

ABSTRACTDiamond-like carbon films were prepared by high intensity pulsed ion beam ablation of graphite targets. A 350 keV, 35 kA, 400 ns pulse width beam, consisting primarily of carbon ions and protons, was focused onto a graphite target at a fluence of 15-45 J/cm2. Films were deposited onto substrates positioned in an angular array from normal to the target to 90° off normal. Deposition rates up to 30 nm per pulse, corresponding to an instantaneous deposition rate greater than 1 mm/sec, have been observed. Electrical resistivities between 1 and 1000 ohm·cm were measured for these films. XRD scans showed that no crystalline structure developed in the films. SEM revealed that the bulk of the films contain material with feature sizes on the order of 100 nm, but micron size particles were deposited as well. Both Raman and electron energy loss spectroscopy indicated significant amounts of sp3 bonded carbon present in most of the films.

Diamond‐like carbon films prepared with a laser ion source

1988 ◽  
Vol 53 (3) ◽  
pp. 187-188 ◽  
Author(s):  
S. S. Wagal ◽  
E. M. Juengerman ◽  
C. B. Collins
Keyword(s):  
Carbon Films ◽  
Ion Source ◽  
Diamond Like Carbon ◽  
Laser Ion Source

Ion beam energy effects on structure and properties of diamond like carbon films deposited by closed drift ion source

Vacuum ◽  
2010 ◽  
Vol 84 (9) ◽  
pp. 1133-1137 ◽  
Author(s):  
Š. Meškinis ◽  
V. Kopustinskas ◽  
A. Tamulevičienė ◽  
S. Tamulevičius ◽  
G. Niaura ◽  
...  
Keyword(s):  
Beam Energy ◽  
Ion Beam ◽  
Carbon Films ◽  
Ion Source ◽  
Diamond Like Carbon ◽  
Structure And Properties

Phosphorus doping and defect studies of diamond-like carbon films by pulsed laser deposition using camphoric carbon target

2001 ◽  
Vol 10 (3-7) ◽  
pp. 984-988 ◽  
Author(s):  
Sharif Mohammad Mominuzzaman ◽  
Hiroshi Ebisu ◽  
Tetsuo Soga ◽  
Takashi Jimbo ◽  
Masayoshi Umeno
Keyword(s):  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Carbon Films ◽  
Laser Deposition ◽  
Diamond Like Carbon ◽  
Phosphorus Doping ◽  
Carbon Target

Low voltage electrodeposition of diamond-like carbon films

2003 ◽  
Vol 57 (22-23) ◽  
pp. 3479-3485 ◽  
Author(s):  
S. Gupta ◽  
R.K. Roy ◽  
B. Deb ◽  
S. Kundu ◽  
A.K. Pal
Keyword(s):  
Low Voltage ◽  
Carbon Films ◽  
Diamond Like Carbon
Sign in / Sign up

Export Citation Format

Share Document