High-Rate Deposition of a-Si:H Films in 55 kHz Glow Discharge: Growth Mechanisms and Film Structure

1997 ◽  
Vol 467 ◽  
Author(s):  
B. G. Budaguan ◽  
A. A. Aivazov ◽  
A. YU Sazonov ◽  
A. A. Popov ◽  
A. E. Berdnikov
Keyword(s):  
Optical Emission ◽  
Film Structure ◽  
Half Period ◽  
High Rate ◽  
Growth Mechanisms ◽  
Plasma Parameters ◽  
Ionic Flux ◽  
Force Microscopy ◽  
Positive Ions ◽  
Wide Range

ABSTRACTThe 55 kHz GD technique allowed the high-rate deposition of a-Si:H films (up to 30 A/s) with good electronic properties in spite of inhomogeneous structure. In this work, we investigated the growth mechanisms and the correlation between plasma parameters and film structure. The electrical parameters of discharge, the properties of plasma and of the films were investigated with using of wide range of methods (optical emission spectroscopy, mass-spectrometry, IR-spectroscopy, atomic force microscopy).The films were deposited in an industrial reactor of diode type with both non-grounded electrodes used as substrate holders. The deposition mechanism in this case includes the alternation of growth phases when the negatively charged particles reach the anode (at a moment) during the first half-period of an oscillation of electric field, and the improvement of growing surface under the influence of the bombardment by positive ions during the second half-period. It is shown that the increase of the power increases the ionic flux leading to the increase of the size of structural inhomogeneities. The pressure influences the energy of positive ions, and, therefore, the hydrogen content and its bonding form on the growing surface.

High Rate Deposition of Microcrystalline Silicon Using Resonance Plasma Source (HELIX) – Plasma Properties and Deposition Results

1999 ◽  
Vol 557 ◽  
Author(s):  
H. Grtiger ◽  
R. Terasa ◽  
A. Haiduk ◽  
A. Kottwitz
Keyword(s):  
Optical Emission ◽  
Plasma Source ◽  
High Rate ◽  
Plasma Discharges ◽  
Microcrystalline Silicon ◽  
Plasma Properties ◽  
Ion Energy ◽  
Positive Ions ◽  
Silane Concentration ◽  
Resonance Plasma

AbstractMicrocrystalline silicon layers have been deposited by PECVD using a resonance plasma source (Helix) operating at frequencies of 46, 68, 113 and 163 MHz. The plasma discharges in hydrogen and various hydrogen/silane mixtures were investigated by optical emission spectroscopy (OES) and mass spectroscopy (MS). Growth rate, crystalline fraction and hydrogen content of the layers were studied for different gas compositions, excitation frequencies and plasma powers.Plasma monitoring revealed preferably the formation of positive ions. The density of positive hydrogen ions increased steadily 15 times by raising the frequency from 46 MHz to 163 MHz, whereas the ion energy was reduced from 75 eV to 23 eV and the radiation from hydrogen decreased to 50 %. Growth rates up to 1.5 μm/h have been achieved for microcrystalline layers at 230 °C deposition temperature. The content of hydrogen was below 15 at.%. Raman spectroscopy measurements reveal that 20 to 70 % of the silicon was crystalline depending on the silane concentration.

High Rate Dry Etching of GaN, AIN and InN in ECR Cl2/CH4/H2/Ar Plasmas

1995 ◽  
Vol 380 ◽  
Author(s):  
C. B. Vartuli ◽  
S. J. Pearton ◽  
C. R. Abernathy ◽  
R. J. Shul ◽  
S. P. Kilcoyne ◽  
...  
Keyword(s):  
Surface Morphology ◽  
Microwave Power ◽  
Etch Rate ◽  
Surface Composition ◽  
Plasma Chemistry ◽  
High Rate ◽  
Rf Power ◽  
Plasma Parameters ◽  
Wide Range ◽  
Etch Rates

ABSTRACTEtch rates for binary nitrides in ECR Cl2/CH4/H2/Ar are reported as a function of temperature, rf-bias, microwave power, pressure and relative gas proportions. GaN etch rates remain relatively constant from 30 to 125 °C and then increase to a maximum of 2340 Å-min−1 at 170 °C. The AIN etch rate decreases throughout the temperature range studied with a maximum of 960 Å-min−1 at 30 °C. When CH4 is removed from the plasma chemistry, the GaN and InN etch rates are slightly lower, with less dramatic changes with temperature. The surface composition of the III–V nitrides remains unchanged over the temperatures studied. The GaN and InN rates increase significantly with rf power, and the fastest rates for all three binaries are obtained at 2 mTorr. Surface morphology is smooth for GaN over a wide range of conditions, whereas InN surfaces are more sensitive to plasma parameters.

Generalized Heterodyne Configurations for Photo-induced Force Microscopy

2019 ◽  
Author(s):  
Le Wang ◽  
Devon Jakob ◽  
Haomin Wang ◽  
Alexis Apostolos ◽  
Marcos M. Pires ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Repetition Rate ◽  
Modulation Frequency ◽  
High Harmonic ◽  
Chemical Imaging ◽  
Heterodyne Detection ◽  
Force Microscopy ◽  
Wide Range ◽  
The Difference ◽  
Afm Cantilever

<div>Infrared chemical microscopy through mechanical probing of light-matter interactions by atomic force microscopy (AFM) bypasses the diffraction limit. One increasingly popular technique is photo-induced force microscopy (PiFM), which utilizes the mechanical heterodyne signal detection between cantilever mechanical resonant oscillations and the photo induced force from light-matter interaction. So far, photo induced force microscopy has been operated in only one heterodyne configuration. In this article, we generalize heterodyne configurations of photoinduced force microscopy by introducing two new schemes: harmonic heterodyne detection and sequential heterodyne detection. In harmonic heterodyne detection, the laser repetition rate matches integer fractions of the difference between the two mechanical resonant modes of the AFM cantilever. The high harmonic of the beating from the photothermal expansion mixes with the AFM cantilever oscillation to provide PiFM signal. In sequential heterodyne detection, the combination of the repetition rate of laser pulses and polarization modulation frequency matches the difference between two AFM mechanical modes, leading to detectable PiFM signals. These two generalized heterodyne configurations for photo induced force microscopy deliver new avenues for chemical imaging and broadband spectroscopy at ~10 nm spatial resolution. They are suitable for a wide range of heterogeneous materials across various disciplines: from structured polymer film, polaritonic boron nitride materials, to isolated bacterial peptidoglycan cell walls. The generalized heterodyne configurations introduce flexibility for the implementation of PiFM and related tapping mode AFM-IR, and provide possibilities for additional modulation channel in PiFM for targeted signal extraction with nanoscale spatial resolution.</div>

Advances in sample digestion using microwave-ultraviolet radiations: phosphorus and sulfur determination in animal feed

2020 ◽  
Vol 16 ◽  
Author(s):  
Diogo L. R. Novo ◽  
Priscila T. Scaglioni ◽  
Rodrigo M. Pereira ◽  
Filipe S. Rondan ◽  
Gilberto S. Coelho Junior ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Animal Feed ◽  
Optical Emission ◽  
Emission Spectrometry ◽  
Official Method ◽  
Dissolved Carbon ◽  
Inductively Coupled ◽  
Relative Standard ◽  
Wide Range ◽  
Sulfur Determination

Background: Conventional analytical methods for phosphorus and sulfur determination in several matrices present normally analytical challenges regarding inaccuracy, detectability and waste generation. Objective: The main objective is proposing a green and feasible analytical method for phosphorus and sulfur determination in animal feed. Methods: Synergic effect between microwave and ultraviolet radiations during sample preparation was evaluated for the first time for the animal feed digestion associated with further phosphorus and sulfur determination by ion chromatography with conductivity detection. Dissolved carbon and residual acidity in final digests were used for the proposed method assessment. Phosphorus and sulfur values were compared with those obtained using conventional microwave-assisted wet digestion in closed vessels associated with inductively coupled plasma optical emission spectrometry and with those obtained using Association of Official Analytical Chemists International official method. Recovery tests and certified reference material analysis were performed. Animal feeds were analyzed using the proposed method. Results: Sample masses of 500 mg were efficiently digested using only 2 mol L -1 HNO3. The results obtained by the proposed method was not differing significantly (p > 0.05) from those obtained by the conventional and official methods. Suitable recoveries (from 94 to 99%), agreement with certified values (101 and 104%) and relative standard deviations (< 8%) were achieved. Phosphorus and sulfur content in commercial products varied in a wide range (P: 5,873 to 28,387 mg kg-1 and S: 2,165 to 4,501 mg kg-1 ). Conclusion: The proposed method is a green, safe, accurate, precise and sensitive alternative for animal feed quality control.

scholarly journals Dry Etching Performance and Gas-Phase Parameters of C6F12O + Ar Plasma in Comparison with CF4 + Ar

Materials ◽  
2021 ◽  
Vol 14 (7) ◽  
pp. 1595
Author(s):  
Nomin Lim ◽  
Yeon Sik Choi ◽  
Alexander Efremov ◽  
Kwang-Ho Kwon
Keyword(s):  
Gas Phase ◽  
Photoelectron Spectroscopy ◽  
Reactive Ion Etching ◽  
Research Work ◽  
Optical Emission ◽  
Plasma Parameters ◽  
Ion Etching ◽  
Ar Plasma ◽  
Ar Gas ◽  
Etching Selectivity

This research work deals with the comparative study of C6F12O + Ar and CF4 + Ar gas chemistries in respect to Si and SiO2 reactive-ion etching processes in a low power regime. Despite uncertain applicability of C6F12O as the fluorine-containing etchant gas, it is interesting because of the liquid (at room temperature) nature and weaker environmental impact (lower global warming potential). The combination of several experimental techniques (double Langmuir probe, optical emission spectroscopy, X-ray photoelectron spectroscopy) allowed one (a) to compare performances of given gas systems in respect to the reactive-ion etching of Si and SiO2; and (b) to associate the features of corresponding etching kinetics with those for gas-phase plasma parameters. It was found that both gas systems exhibit (a) similar changes in ion energy flux and F atom flux with variations on input RF power and gas pressure; (b) quite close polymerization abilities; and (c) identical behaviors of Si and SiO2 etching rates, as determined by the neutral-flux-limited regime of ion-assisted chemical reaction. Principal features of C6F12O + Ar plasma are only lower absolute etching rates (mainly due to the lower density and flux of F atoms) as well as some limitations in SiO2/Si etching selectivity.

Sustaining Research-Based Practices in Reading

1999 ◽  
Vol 20 (5) ◽  
pp. 263-287 ◽  
Author(s):  
Janette K. Klingner ◽  
Sharon Vaughn ◽  
Marie Tejero Hughes ◽  
Maria Elena Arguelles
Keyword(s):  
Instructional Practices ◽  
High Rate ◽  
Strategic Reading ◽  
School Year ◽  
Wide Range ◽  
Sustained Use ◽  
Development Experience ◽  
Collaborative Strategic Reading ◽  
Research Based Practices ◽  
Over Time

This study examined the extent to which the reading instructional practices learned by a cohort of teachers who participated in an intensive, yearlong professional development experience during the 1994-1995 school year have been sustained and modified over time. Teachers learned three multileveled practices—partner reading, collaborative strategic reading, and making words—that promote gains in reading for students from a wide range of achievement levels. Teachers were observed and interviewed 3 years later to determine the extent to which they continued to implement the practices, the ways in which they modified them, and factors that influenced their sustained use of the practices. With the exception of one teacher, all the teachers sustained one or more of the three practices at a high rate.

Studies of Nanomechanical Properties of Pulsed Laser Deposited NbN films on Si Using Nanoindentation

2012 ◽  
Vol 1424 ◽  
Author(s):  
M. A. Mamun ◽  
A. H. Farha ◽  
Y. Ufuktepe ◽  
H. E. Elsayed-Ali ◽  
A. A. Elmustafa
Keyword(s):  
Thin Films ◽  
Pulsed Laser ◽  
Niobium Nitride ◽  
X Ray Diffraction ◽  
Si Substrate ◽  
Force Microscopy ◽  
Atomic Force ◽  
Wide Range ◽  
Pile Up ◽  
Average Modulus

ABSTRACTNanomechanical and structural properties of pulsed laser deposited niobium nitride thin films were investigated using X-ray diffraction, atomic force microscopy, and nanoindentation. NbN film reveals cubic δ-NbN structure with the corresponding diffraction peaks from the (111), (200), and (220) planes. The NbN thin films depict highly granular structure, with a wide range of grain sizes that range from 15-40 nm with an average surface roughness of 6 nm. The average modulus of the film is 420±60 GPa, whereas for the substrate the average modulus is 180 GPa, which is considered higher than the average modulus for Si reported in the literature due to pile-up. The hardness of the film increases from an average of 12 GPa for deep indents (Si substrate) measured using XP CSM and load control (LC) modes to an average of 25 GPa measured using the DCM II head in CSM and LC modules. The average hardness of the Si substrate is 12 GPa.

The spacecraft wake as a tool to detect cold ions: Turning a problem into a feature

2021 ◽  
Author(s):  
Mats André ◽  
Anders I. Eriksson ◽  
Yuri V. Khotyaintsev ◽  
Sergio Toledo-Redondo
Keyword(s):  
Electric Field ◽  
Plasma Parameters ◽  
Double Probe ◽  
Positive Ions ◽  
Collisionless Plasmas ◽  
Mass Outflow ◽  
Wake Effects ◽  
In Situ Observations ◽  
Positively Charged

&lt;p&gt;Wakes behind scientific spacecraft caused by supersonic drifting ions is common in collisionless plasmas. Such wakes change the local plasma conditions and disturb in situ observations of the geophysical plasma parameters. We concentrate on observations of the electric field with double-probe instruments. Sometimes the wake effects are caused by the spacecraft body, are minor and easy to detect, and can be compensated for in a reasonable way. We show an example from the Cluster spacecraft in the solar wind. Sometimes the effects are caused by an electrostatic structure around a positively charged spacecraft causing an enhanced wake and major effects on the local plasma. Here observations of the geophysical electric field with the double-probe technique becomes impossible. Rather, the wake can be used to detect the presence of cold positive ions. Together with other instruments, also the cold ion flux can be estimated. We discuss such examples from the Cluster spacecraft in the magnetospheric lobes. For an intermediate range of parameters, when the drift energy of the ions is comparable to the equivalent charge of the spacecraft, also the charged wire booms of a double-probe instrument must be taken into account to extract useful information from the observations. We show an example from the MMS spacecraft near the magnetopause. With understanding of the physics causing wakes behind spacecraft, the local effects can sometimes be compensated for. When this is not possible, sometimes entirely new geophysical parameters can be estimated. An example is the flux of cold positive ions, constituting a major part of the mass outflow from planet Earth, using electric and magnetic field instruments on a spacecraft charged due to photoionization&lt;/p&gt;&lt;p&gt;&amp;#160;&lt;/p&gt;

MAIN FEATURES AND TRENDS OF DEVELOPMENT OF THE SERVICE MARKET

2017 ◽  
Author(s):  
Larysa Getman ◽  
Keyword(s):  
Customer Loyalty ◽  
Consumer Choice ◽  
Information Technologies ◽  
Service Sector ◽  
Supply And Demand ◽  
High Rate ◽  
Barriers To Entry ◽  
Relevant Market ◽  
Service Market ◽  
Wide Range

The article discusses approaches to the interpretation of the concept of a service, its specific differences from a physical product and the main features as an object of purchase and sale in the relevant market. Based on the analysis and systematization of existing scientific views, the main features of the service market and the features of the interaction of supply and demand in the service sector are revealed. The practice of functioning of the service market demonstrates the high dynamics of market processes, a pronounced segmentation of demand for services, a high degree of differentiation of services, a high rate of capital turnover and the important role of non-price barriers to entry into the market. The essence and value of the customer's customer loyalty for successful commercial activities and increasing the competitiveness of the manufacturer-supplier of the service has been investigated. Loyalty becomes an indicator of business performance and its ability to innovate. A customer-oriented business philosophy, where a wide range of factors of influence on the formation of customer loyalty is taken into account and used, will allow the company to count on long-term relationships with the consumer and will attract new customers through his positive experience. The possibilities and features of the application of competitive strategies by firms in the field of service activities were analyzed. The main trends in the development of the services market in the current stage, namely the processes of its digitalization, have been investigated. The buyer today is interested not only in price and quality, but also in good service. If a company meets customer service demand through the introduction of chat bots, self- service terminals, mobile applications, etc., then this contributes to the formation of a positive customer experience, which ultimately increases sales. The features and advantages of using information technologies both in business activities and in the implementation of consumer choice have been determined.

SFM and TOF-SIMS Study of Novel Self-Organization phenomena in mixed LB monolayers

2002 ◽  
Vol 738 ◽  
Author(s):  
B. Pignataro ◽  
L. Sardone ◽  
A. Licciardello ◽  
G. Marletta
Keyword(s):  
Secondary Ion Mass Spectrometry ◽  
Scanning Force Microscopy ◽  
Lateral Force ◽  
Self Organization ◽  
High Mass ◽  
Molar Ratio ◽  
Force Microscopy ◽  
Tof Sims ◽  
Wide Range ◽  
Scanning Force

ABSTRACTMixed monolayers of dimyristoylphosphatidylcholine (DMPC) and quercetin palmitate (QP) in a molar ratio of 25/75 have been transferred on mica and oxygen plasma cleaned silicon by the Langmuir-Blodgett (LB) technique at different subphase temperatures. Scanning Force Microscopy (SFM) in height, phase and lateral force modes has been employed to investigate the structural and mechanical features at nanoscopic level of these samples. Although the two molecules show a wide range of miscibility at 37 °C, they give rise to phase separation at 10 °C. This last system provides a new example of nanometric scale self-organization. In particular spiral shaped domains rising from the wrapping-up of nanoscopic fiber-like structures have been observed. The high resolution achieved by the use of the dynamic scanning force microscopy operating in the net attractive regime allow to visualize characteristic nanoscopic rupture points along the supramolecular fibers. High mass resolution Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS) spectra showed DMPC- as well as QP-related peaks. The ToF-SIMS spectra from the nanostructured samples (10 °C) have been compared with those from the homogeneous ones (37 °C). The phase separated samples provides interesting secondary ions that highlight the QP supramolecular condensation within the fiber-like structures.

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