Improvement of Ultrathin Oxides by Post-Oxidation Annealing

1996 ◽  
Vol 448 ◽  
Author(s):  
Tomoyuki Sakoda ◽  
Mieko Matsumura ◽  
Yasushiro Nishioka
Keyword(s):  
Low Temperature ◽  
Leakage Current ◽  
Gate Oxide ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Oxide Growth ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Ultrathin Oxides ◽  
Voltage Region

AbstractThe low temperature oxidation is effective for the atomically-controlled gate oxide growth. We focused the effects of post-oxidation annealing (POA) and attempted to improve the properties of the low-temperature-grown ultrathin oxides with a thickness of 3nm by POA. POA abruptly reduced the leakage current at a low gate voltage below 1.5V and the interface trap density. The correlation between the interface trap and the leakage current at a low applied voltage region were confirmed. We found that the stressing immunity of the ultrathin oxides grown at a low temperature, 650°C, is drastically improved by POA at 850°C.

Low temperature oxidation of SiGe in ozone: Ultrathin oxides

2000 ◽  
Vol 87 (4) ◽  
pp. 2046-2051 ◽  
Author(s):  
Jon M. Madsen ◽  
Zhenjiang Cui ◽  
Christos G. Takoudis
Keyword(s):  
Low Temperature ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Ultrathin Oxides

Analyzing the interface trap density in SiGe capacitors using an abnormal flat band voltage shift at low temperature

2020 ◽  
Vol 13 (11) ◽  
pp. 111006
Author(s):  
Li-Chuan Sun ◽  
Chih-Yang Lin ◽  
Po-Hsun Chen ◽  
Tsung-Ming Tsai ◽  
Kuan-Ju Zhou ◽  
...  
Keyword(s):  
Low Temperature ◽  
Trap Density ◽  
Flat Band ◽  
Interface Trap Density ◽  
Interface Trap ◽  
Flat Band Voltage ◽  
Voltage Shift

scholarly journals Influence of Co-Precipitation Agent on the Structure, Texture and Catalytic Activity of Au-CeO2 Catalysts in Low-Temperature Oxidation of Benzyl Alcohol

Catalysts ◽  
2021 ◽  
Vol 11 (5) ◽  
pp. 641
Author(s):  
Lukasz Wolski ◽  
Grzegorz Nowaczyk ◽  
Stefan Jurga ◽  
Maria Ziolek
Keyword(s):  
Gold Nanoparticles ◽  
Catalytic Activity ◽  
Low Temperature ◽  
Benzyl Alcohol ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation ◽  
Oxidation Of Benzyl Alcohol ◽  
Key Factor ◽  
Au Particle Size ◽  
Co Precipitation

The aim of the study was to establish the influence of a co-precipitation agent (i.e., NaOH–immediate precipitation; hexamethylenetetramine/urea–gradual precipitation and growth of nanostructures) on the properties and catalytic activity of as-synthesized Au-CeO2 nanocomposites. All catalysts were fully characterized with the use of XRD, nitrogen physisorption, ICP-OES, SEM, HR-TEM, UV-vis, XPS, and tested in low-temperature oxidation of benzyl alcohol as a model oxidation reaction. The results obtained in this study indicated that the type of co-precipitation agent has a significant impact on the growth of gold species. Immediate co-precipitation of Au-CeO2 nanostructures with the use of NaOH allowed obtainment of considerably smaller and more homogeneous in size gold nanoparticles than those formed by gradual co-precipitation and growth of Au-CeO2 nanostructures in the presence of hexamethylenetetramine or urea. In the catalytic tests, it was established that the key factor promoting high activity in low-temperature oxidation of benzyl alcohol was size of gold nanoparticles. The highest conversion of the alcohol was observed for the catalyst containing the smallest Au particle size (i.e., Au-CeO2 nanocomposite prepared with the use of NaOH as a co-precipitation agent).

Low temperature oxidation of copper alloys—AEM and AFM characterization

2007 ◽  
Vol 42 (12) ◽  
pp. 4684-4691 ◽  
Author(s):  
Mari Honkanen ◽  
Minnamari Vippola ◽  
Toivo Lepistö
Keyword(s):  
Low Temperature ◽  
Copper Alloys ◽  
Low Temperature Oxidation ◽  
Temperature Oxidation
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