Growth of Metal Alkoxide Solution Derived Epitaxial LiNbO3 Thin Films for Optical Waveguides

1996 ◽  
Vol 433 ◽  
Author(s):  
Keiichi Nashimoto ◽  
Shigetoshi Nakamura ◽  
Hiroaki Moriyama
Keyword(s):  
Thin Films ◽  
Optical Waveguides ◽  
Solid Phase ◽  
Solution Process ◽  
Propagation Loss ◽  
Buffer Layers ◽  
Crystallization Time ◽  
Metal Alkoxide ◽  
Optical Propagation

AbstractSolid phase epitaxial growth of LiNbO3 thin films, using a methoxyethoxide solution process, has been examined for optical waveguide applications. The growth variables such as crystallization temperature, crystallization time, and film thickness have been found to be critical factors in the quality of LiNbO3 thin films. High quality epitaxial LiNbO3 films were grown on sapphire (001) substrates using optimized buffer layers. The LiNbO3 showed single orientation, rocking curve full width at half maximum less than 0.04°, and rms roughness of 2.3 nm, in addition to refractive index of 2.24 and optical propagation loss of 3.0 dB/cm.

PZT Electro-Optic Waveguide Devices Fabricated by Solid-Phase Epitaxy

1997 ◽  
Vol 493 ◽  
Author(s):  
Keiichi Nashimoto ◽  
Shigetoshi Nakamura ◽  
Hiroaki Moriyama ◽  
Masao Watanabe ◽  
Eisuke Osakabe
Keyword(s):  
Optical Waveguides ◽  
Solid Phase ◽  
Solution Process ◽  
Propagation Loss ◽  
Metal Alkoxide ◽  
Solid Phase Epitaxy ◽  
Optical Propagation ◽  
Electro Optic ◽  
Pzt Thin Film ◽  
Conductive Substrate

ABSTRACTHigh quality epitaxial PZT optical waveguides have been grown by solid-phase epitaxy based on metal alkoxide solution process. Optical propagation loss was 4 dB/cm in epitaxial PZT thin film optical waveguides grown on SrTiO3 substrates. Epitaxial PZT optical waveguides were grown on Nb doped conductive SrTiO3 substrates, since considerable reduction in drive voltage will be expected when top electrode / optical waveguide / conductive substrate structures are realized. Propagation loss was relatively large, as compared with the structure using non-dope insulative substrates. Preliminary electrooptic deflection devices were fabricated by preparing prism electrodes on the surface of the PZT optical waveguides. Efficient deflection/switching of coupled laser beam in the PZT optical waveguides as large as 26 mrad was observed by applying 70 volts between prism electrode and Nb doped SrTiO3 substrates.

Preparation and Characterization of Metal Alkoxide Derived Epitaxial Lead Titanate Based Thin Films

1994 ◽  
Vol 361 ◽  
Author(s):  
Keiichi Nashimoto ◽  
Shigetoshi Nakamura
Keyword(s):  
Thin Films ◽  
Lead Titanate ◽  
Solid Phase ◽  
Sol Gel ◽  
Pyrochlore Phase ◽  
Guided Wave ◽  
Metal Alkoxide ◽  
Rocking Curve ◽  
Sol Gel Process

ABSTRACTEpitaxial and highly oriented lead titanate based thin films were prepared by a sol-gel process using non-hydrolyzed methoxyethoxide precursors and RTA process. PbTiO3 crystallized with preferred (001) or (100) orientation on SrTiO3 (100) and MgO (100). Solid phase (001) oriented epitaxial growth of PZT on SrTio3 was observed at 425°C, directly from the amorphous phase. That of PZT on MgO was observed at temperatures above 550°C, after the formation of pyrochlore phase. The PZT on SrTiO3 had a single (001) orientation and rocking curve full width at half maximum less than 0.08°. PZT showed a weak preferred (111) orientation on sapphire (0001) substrates, while highly (111) oriented PLT thin films were obtained on them. The guided wave modes were excited by a prism coupling for PZT thin films crystallized on SrTiO3 and MgO. Electrical properties of epitaxial PZT and PLT thin films on Nb-SrTiO3 substrates were characterized.

Effect of the initial thin Ti buffer layers on the quality of ZnO thin films grown on Si(111) substrates by MOCVD

2006 ◽  
Vol 40 (1) ◽  
pp. 56-63 ◽  
Author(s):  
Fan Li ◽  
Dongmei Li ◽  
Jiangnan Dai ◽  
Hongbo Su ◽  
Li Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Buffer Layers ◽  
Zno Thin Films

Growth and patterning of strontium-titanate-oxide thin films for optical devices applications

2004 ◽  
Vol 817 ◽  
Author(s):  
M. Gaidi ◽  
L. Stafford ◽  
M. Chaker ◽  
J. Margot ◽  
M. Kulishov
Keyword(s):  
Thin Films ◽  
Strontium Titanate ◽  
Oxygen Pressure ◽  
Optical Waveguides ◽  
Argon Plasma ◽  
Optical Quality ◽  
Silicon Substrates ◽  
Lower Oxygen ◽  
Pressure Regime

AbstractStrontium-titanate-oxide (STO) thin films have been deposited on silicon substrates by means of a reactive pulsed-laser-deposition technique. The influence of the oxygen deposition pressure on the microstructural properties of the films has been investigated by means of various characterization techniques. It was found that the crystalline quality of the film significantly deteriorates as the oxygen pressure increases. This is accompanied by an increase of the film microporosity. The microstructure of the film is found to directly impact the optical quality of the films. In particular, due to the higher density and crystallinity of the films deposited at lower oxygen pressure, films characterized by lower optical losses can be achieved in such conditions. These films have been used in the context of the development of optical waveguides. For this purpose, patterning of the STO films was investigated using sputter-etching with a high-density argon plasma operated in the very low pressure regime. Highly anisotropic features have been produced with high etch rate and good selectivity over resist. Preliminary results indicate the STO films can be successfully incorporated in functional waveguides.

Preparation of Yba2Cu3O7-X. Superconducting Thin Films by Means of Single Target Rf-Sputtering+

1989 ◽  
Vol 169 ◽  
Author(s):  
Herman D.L. Weyten ◽  
R. De Batist ◽  
P. Nagels ◽  
J. Cornelis
Keyword(s):  
Thin Films ◽  
Rf Sputtering ◽  
Buffer Layers ◽  
Superconducting Thin Films ◽  
High Tc ◽  
Resistivity Measurements ◽  
Single Target ◽  
Deposited Films ◽  
Post Deposition

AbstractHigh Tc superconducting thin films have been deposited on sapphire by means of RF‐sputtering from a single stoichiometric target of YBa2Cu3O7‐x composition. The YBa2Cu3O7‐x films were deposited in an argon‐oxygen atmosphere on a substrate which reached a temperature of s 400°C during deposition. The study of stoichiometry and homogeneity of the as‐deposited films, by means of electromicroprobe analysis (EMPA), was used to optimize the sputtering parameters of the system. To achieve superconductivity, with an onset of s 90 K, a high‐temperature, post‐deposition thermal treatment in oxygen was necessary. Resistivity measurements show that, with respect to the bulk samples, zero resistivity is lowered as a result of substrate interaction. The use of buffer layers can improve the quality of the superconducting thin films.

scholarly journals Surface-Interface Quality of Mn5Ge3 Thin Films on Ge(001): Reactive Deposition Epitaxy vs. Solid Phase Epitaxy

2018 ◽  
Vol 24 (S1) ◽  
pp. 1622-1623 ◽  
Author(s):  
Adriana Alvídrez-Lechuga ◽  
José T. Holguín-Momaca ◽  
Óscar O. Solís-Canto ◽  
Carlos R. Santillán-Rodríguez ◽  
José A. Matutes-Aquino ◽  
...  
Keyword(s):  
Thin Films ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Interface Quality ◽  
Reactive Deposition

scholarly journals Highly-transparent perovskite thin films obtained by a wet chemical processesing method

2019 ◽  
Vol 1 (1) ◽  
Author(s):  
Rouholah Ashiri
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Barium Titanate ◽  
Sol Gel ◽  
Dip Coating ◽  
Propagation Loss ◽  
Optical Propagation ◽  
Coating Method ◽  
Optical Applications ◽  
Reported Data

Barium titanate thin films are key materials for use in the solid-state devices, including capacitors, memories, thermistors, sensors, actuators and so on. High transmittance barium titanate thin films are suitable candidate for various electro-optic applications such as dielectric mirrors. In this research high transmittance barium titanate nanothin films were prepared by sol - gel dip - coating method, then the optical properties of the prepared nanofilms was characterized. Experimental results indicate that the surface morphology of prepared nanothin films were improved and as a result of that, a better optical properties, less optical losses were obtained in contrast with other reported data. It was found that optical propagation loss of barium titanate nanothin film was much lower than normal polycrystalline barium titanate thin film. Results also indicate that Increment of the calcination temperature reduces the thin films transparency and thickness.  Other results show that increment of withdrawal rate of the substrate from the prepared sol lead to increment of thin films thickness and decrease in thin films transparency. The prepared high transparent nanothin film was amourphous and was as thin as 30 nm. It seems to us that, prepared barium titanate nanothin films would be suitable for several optical and electro-optical applications.

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